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SEMI E87-0705 © SEMI 1999, 2005 2 SEMI E99 — The Carrier ID Reader/Writ er Functional Standard: Specification of Concepts, Behavior , and Services NOTICE : As listed or revised, all documents cited shall be the latest pu…

SEMI E87-0705 © SEMI 1999, 2005 1

SEMI E87-0705

SPECIFICATION FOR CARRIER MANAGEMENT (CMS)

This specification was technically approved by the global Information & Control Committee. This edition

was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was

available at www.semi.org in June 2005 and on CD-ROM in July 2005. Originally published September

1999; previously published March 2004.

1 Purpose

1.1 This document provides a standardized behavior for host view communication with production equipment

during the coordination, execution, and completion of automated and manual carrier transfers to and from the

equipment and, if it exists, its internal buffer space.

2 Scope

2.1 This is a standard that covers host and equipment communication for SEMI E15.1 300 mm load ports.

2.2 The scope of this document is to define standards that facilitate the host’s knowledge and role in automated and

manual carrier transfers, as well as internal buffer equipment carrier transfers. Specifically, this document provides

state models and scenarios that define the host interaction with the equipment for the following:

 Carrier transfer between AMHS vehicles and production equipment load ports.

 Carrier transfers to/from production equipment internal buffer space.

 Equipment and load port access mode switching.

 Carrier to load port association.

 CarrierID verification and Carrier slot map verification.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 This standard applies to semiconductor equipment with SEMI E15.1 compliant load ports. It may also be

applied to other manufacturing equipment that supports automated carrier transfers, and/or contains an internal

buffer. This standard is intended to be used for production equipment. It may or may not be applied to other types of

equipment. Also, stocker load ports are not addressed by this standard.

4 Referenced Standards and Documents

4.1 SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E15.1 — Specification for 300 mm Tool Load Port

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E41 — Exception Management (EM) Standard

SEMI E53 — Event Reporting

SEMI E62 — Provisional Specification for 300 mm Front-Opening Interface Mechanical Standard (FIMS)

SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface

SEMI E90 — Specification for Substrate Tracking

SEMI E87-0705 © SEMI 1999, 2005 2

SEMI E99 — The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services

NOTICE: As listed or revised, all documents cited shall be the latest publications of adopted standards.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 AGT — Automated Guided Transport

5.1.2 AGV — Automated Guided Vehicle

5.1.3 AMHS — Automated Material Handling System

5.1.4 FIMS — Front-Opening Interface Mechanical Standard

5.1.5 FOUP — Front Opening Unified Pod

5.1.6 GEM — Generic Equipment Model

5.1.7 OHT — Overhead Hoist Transport

5.1.8 PGV — Person Guided Vehicle

5.1.9 PIO — Parallel Input/Output Interface

5.1.10 RGT — Rail Guided Transport

5.1.11 RGV — Rail Guided Vehicle

5.2 Definitions

5.2.1 Automated Material Handling System — an automated system to store and transport materials within the

factory.

5.2.2 automation — the degree to which activities of machines or production systems are self-acting. In this

standard automation provides methods that will reduce the amount of operator intervention required.

5.2.3 buffer — a set of one or more locations for holding carriers at/inside the production equipment.

5.2.4 carrier — a container, such as a FOUP or open cassette, with one or more positions for holding substrates.

5.2.5 CarrierID — a readable and unique identifier for the carrier.

5.2.6 CarrierID read — the process of the equipment reading the CarrierID from the carrier.

5.2.7 carrier ID tag (tag, ID tag) — a physical device for storing Carrier ID and other information. There are two

basic types of tags, read-only tags and read/write tags. [SEMI E99]

5.2.8 Collection Event —

a collection event is an event (or grouping of related events) on the equipment that is

considered to be significant to the host.

5.2.9 docked position — the position where the carrier is ready for substrate extraction or insertion.

5.2.10 FIMS port — the substrate access port where the FOUP is opened and closed.

5.2.11 fixed buffer equipment — production equipment that has only fixed load ports and no internal buffer for

carrier storage. Substrates are loaded and unloaded directly from the carrier at the load port for processing.

5.2.12 host — the factory computer system or an intermediate system that represents the factory and the user to the

equipment.

5.2.13 internal buffer — a set of locations within the equipment to store carriers. These locations exclude load ports.

5.2.14 internal buffer equipment — equipment that uses an internal buffer.

5.2.15 load — the operation of placing a carrier on a load port.

5.2.16 load port — the interface location on the equipment where carriers are loaded and unloaded.

SEMI E87-0705 © SEMI 1999, 2005 3

5.2.17 object instantiation — the act of storing of information related to a physical or logical entity so that it can be

recalled on demand based on its public identifier.

5.2.18 on-line equipment — equipment that is con-nected to, and able to communicate fully with, the host.

5.2.19 process equipment — equipment used to produce product, such as semiconductor devices. This excludes

metrology and material handling equipment.

5.2.20 production equipment — equipment used to produce product, such as semiconductor devices, including

substrate sorting, process, and metrology equipment and excluding material handling equipment.

5.2.21 properties — a set of name value pairs assigned to an object or used in a service message to include

additional information about the object (i.e., carrier, port, etc.).

5.2.22 re-initialization — a process where production equipment is either powered off then on or when some kind

of hardware or software reset is initiated to cause the equipment to reset and possibly reload its software. On

production equipment that contains some kind of mass storage device this can also be called a “reboot”.

5.2.23 read position — any position on a load port or in an internal buffer from which the tag on a carrier can be

read.

NOTE 1: This position may vary on any particular equipment depending on the read technology selected by the end user. Some

technology/load ports may allow the carrier to be moved during reading. Equipment may have more than one read position.

5.2.24 single communication connection — exactly one physical connection using exactly one logical session and a

standard set of messages.

5.2.25 slot map –– the information that relates which slots in a carrier hold substrates, both correctly and

incorrectly.

5.2.26 slot map read –– the process of the equipment reading the slot map for substrate position and placement

within the carrier.

5.2.27 standard message set — messages conforming to standard message specifications.

5.2.28 substrate — material held within a carrier. This can be product, or durables such as reticles.

5.2.29 substrate port — the carrier location from which substrates are accessed by the equipment.

5.2.30 transfer unit — maximum number of carriers allowed in a specific transfer service:

 AA is the maximum number of carriers allowed for acquisition at the transfer source.

 BB is the maximum number of carriers allowed for deposit at the transfer destination.

 CC is the maximum number of carriers allowed for transfer in one transport vehicle.

The transfer unit is the minimum of AA, BB, and CC.

5.2.31 undocked — the status of a carrier on a load port or in an internal buffer that is not at the docked position.

5.2.32 unload — the operation of removing a carrier from a load port.

5.2.33 write position — any position on a load port or in an internal buffer from which the tag on a carrier can be

written to. This position may vary on any particular equipment depending on the write technology selected by the

end user. Some technology/load ports may allow the carrier to be moved during writing. The read position and the

write position may or may not be the same position.

6 Requirements

6.1 Carrier Management Standard (CMS) compliant equipment is required to provide certain capabilities defined by

other standards: accessibility to status infor-mation, event reporting, alarm management, and equipment control.

These requirements shall be satisfied through compliance to the following sets of standards:

6.2 Generic Equipment Model Standard (GEM) SEMI E30

 Event Notification