semi合集-English.pdf - 第1367页
SEMI E30-1103 © SEMI 1992, 2003 41 Process Program Deleti on by the Host: COMMENTS HOST EQUIPMENT COMMENTS Delete Process Program Send S7,F17--> <-- S7,F18 Delete Process Program Acknowledge. The process program is…
SEMI E30-1103 © SEMI 1992, 2003
40
• A CEID shall be defined for a collection event for
the creation, the deletion, or the modification
(completion of an editing session) of a process
program (Process Program Change Event). For
recipes, there are two separate CEIDs and collection
events, one for the creation of a new recipe (New
Execution Recipe Event) and one when a recipe is
changed or deleted (Execution Recipe Change
Event). A New Execution Recipe Event shall
occur whenever a new recipe identifier is created
through download, edit, copy, or rename operations.
A Execution Recipe Change Event shall occur
whenever the body of an existing recipe is modified.
• The name (identifier) that the engineer or operator
uses to refer to the process program or recipe is the
same as the identifier used by the host.
• Upon request from the host or operator, the
equipment shall perform the following actions with
regard to process programs and recipes stored in
non-volatile storage: upload, download, delete, and
list current equipment process program or recipe
directory.
• The equipment shall be able to store in non-volatile
memory the number of process programs or recipes
sufficient to execute three unique process cycles.
For example, if a wire-bonder requires both an
“ALIGN” process program and a “BOND” process
program for a full process cycle, then it must provide
non-volatile storage for at least three pairs of process
programs. These stored process programs or recipes
may not be modified in any way by the execution
process, nor may the execution process be affected
by the modification of any process program or
recipes in storage, either by downloading or by local
editing, while that process program or recipes
is
being executed.
• The equipment must provide verification and
validation of all downloaded process programs and
recipes.
• Stream 7 provides for formatted and unformatted
process programs, while Stream 15 provides for
recipes. The equipment must support at least one of
these three methods.
• The equipment supplier shall document any
restrictions on the length or test format of PPID.
The maximum length allowed by equipment may
be less than that allowed by SECS-II.
• Where recipes are supported, the following
requirements also apply:
• The variable PPFormat shall be provided to
indicate to the user the messages supported by
the equipment.
• The recipe and its attributes shall comply to
the requirements for execution recipes as
defined in SEMI E42, Section 6.
4.6.5 Scenarios for Process Programs
4.6.5.1 Process Program Creation, Editing, or Deletion Process Program Created, Edited, or Deleted by Operator
COMMENTS HOST EQUIPMENT COMMENTS
New process program created,
edited, or deleted by operator
at equipment.
PPChangeName = PPID
PPChangeStatus = 1 (Created)
= 2 (Edited)
= 3 (Deleted)
[IF] CEID for Process Program
Change Event enabled
[THEN]
<-- S6,F11 Send Event Report
Event Report Acknowledge S6,F12-->
[END_IF]
SEMI E30-1103 © SEMI 1992, 2003
41
Process Program Deletion by the Host:
COMMENTS HOST EQUIPMENT COMMENTS
Delete Process Program Send S7,F17-->
<-- S7,F18 Delete Process Program
Acknowledge.
The process program is removed
from non-volatile storage.
4.6.5.2 Process Program Directory Request
COMMENTS HOST EQUIPMENT COMMENTS
Current EPPD Request S7,F19-->
<-- S7,F20 Current EPPD Data
SEMI E30-1103 © SEMI 1992, 2003
42
4.6.5.3 Process Program Upload
Host-Initiated Process Program Upload — Formatted:
COMMENTS HOST EQUIPMENT COMMENTS
Formatted Process Program S7,F25-->
Request <-- S7,F26 Formatted Process Program
Data
Large Formatted Process S7,F43-->
Program Request
<-- S7,44 Large Formatted Process Program
Acknowledge
Acknowledge may be “accepted
and will be performed later
with completion signaled”. When
the equipment is ready to send:
<-- S13,F1 Send Data Set Send
Send Data Set Send S13,F2-->
Acknowledge
Open Data Set request
S13,F3-->
<-- S13,F4 Open Data Set Data
[START]
Repeat until ACKC13 indicates
error:
Read Data Set Request S13,F5-->
[END] <-- S13,F6 Read Data set Data
[IF]
CEID for upload event enabled
[THEN]
[IF]
ACKC13 is "ERROR: END OF DATA"
[Then]
Event Report Acknowledge <-- S6,F12 Send Event Report "successful
S6,F12--> upload"
[ELSE]
Event Report Acknowledge <-- S6,F11 Send Event Report "bad upload"
S6,F12-->
[END_IF]
[END_IF]
Close Data Set Send S13,F7-->
<-- S13,F8 Close Data Set Acknowledge