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SEMI E102-0600 © SEMI 2000 43 Factory Operations Durable Management MTSC AMHS Equipment Controll ers 30: informJobStateChange(Job TrJob1, previousSt ate JobExecuting, newS tate JobCompleted) 31: removeFinishedJob(Job TrJ…

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SEMI E102-0600 © SEMI 2000 42
R1-2.6 Scenario Six — AMHS Equipment Monitoring
MTSC reserves and manages AMHS equipment capacity (Internal Service)
MTSC determines AMHS Route, selects stk10 from sgr1. Ohs2 is down, no alternate
route is available therefore MTSC waits until Ohs2 is up. (Internal Service)
8: MaterialContainerStateChangedEvent
20: DurableLocationChangedEvent
23: DurableLocationChangedEvent
28: MaterialContainerStateChangedEvent
2: requestJob(JobType Transport, Prioriy 1, Deadline time1, container aaa, DestinationMachine stk9)
6: informJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
7: makeInTransit()
11: MachineResourceE10StateChangedEvent
13: MachineResourceE10StateChangedEvent
19: setMaterialTrackingLocation(MaterialTrackingLocation ohs2)
22: setMaterialTrackingLocation(stk9)
27: makeStored()
10: Ohs2 AlarmSet (IBSEM)
12: Ohs2 AlarmCleared (IBSEM)
14: Transfer Command to Stk4 (carrier aaa, src shelf, dest Bay_Out) (Stocker SEM)
15: Transfer Command Updates (Stocker SEM)
16: Transfer Command Complete (Stocker SEM)
17: Transfer Command to Ohs2 (carrier aaa, src stk4/Bay_Out, dest stk9/Bay_In) (IBSEM)
18: Transfer Command Updates (IBSEM)
21: Transfer Completed (IBSEM)
24: Transfer Command to stk9 (carrier aaa, src stk9/Bay_In, dest shelf) (Stocker SEM)
25: Transfer Command updates (Stocker SEM)
26: Transfer Command Complete (Stocker SEM)
3: Returns Job Handle TrJob1
4: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
9: getUnit()
29: JobStateChangedEvent(..previousState JobExecuting, newState JobCompleted)
5: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
1: setUnit(unitvalue)
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
Figure R1-13
Scenario Case 6
SEMI E102-0600 © SEMI 200043
Factory
Operations
Durable
Management
MTSC AMHS Equipment
Controllers
30: informJobStateChange(Job TrJob1, previousState JobExecuting, newState JobCompleted)
31: removeFinishedJob(Job TrJob1)
32: JobStateChangedEvent(..previousState JobCompleted, newState JobUndefined)
Figure R1-14
Scenario Case 6 (continued)
SEMI E102-0600 © SEMI 2000 44
R1-2.7 Scenario 7 — Batch Delivery to Internal Buffer Equipment
3: requestBatchTransportJob(JobType TransportJob, Priority 1, Deadline time1, container aaa, DestinationMachine Eq6, JobType
TransportJob, Priority 1, Deadline time1, container bbb, DestinationMachine Eq6, JobType TransportJob, Priority 1, Deadline time1,
container ccc, DestinationMachine Eq6, JobType TransportJob, Priority 1, Deadline time1,container ddd, DestinationMachine Eq6)
7: InformJobStateChange(Job TrJob1, previousState JobQueued, newState JobExecuting)
MTSC reserves and manages AMHS
equipment capacity(internal)
MTSC determines AMHS
route(internal)
14: InformJobStateChange(Job TrJob2, previousState JobQueued, newState JobExecuting)
18: Transfer Command to Stk7 (carrier aaa, src. shelf, dest. Stk. 7/Bay_Out) (Stocker SEM)
19: Transfer Command Updates (Stocker SEM)
20: Transfer Completed (Stocker SEM)
21: Transfer Command to Stk7 (carrier bbb, src. shelf, dest. Stk. 7/ Bay_Out) (Stocker SEM)
22: Transfer Command Updates (Stocker SEM)
23: Transfer Completed (Stocker SEM)
24: Transfer Command to Ohs2 (carrier aaa, src. stk7/Bay_Out, dest. stk9/Bay_In) (IBSEM)
25: Transfer Command Updates (IBSEM)
28: Transfer Completed (IBSEM)
31: Transfer Command to Ohs2 (carrier bbb, src. stk7/Bay_Out, dest. stk9/Bay_in) (IBSEM)
32: Transfer Command Updates (IBSEM)
4: Return Job Handle TrJob1 TrJob2 TrJob3 TrJob4
8: makeInTransit()
15: makeInTransit()
16: MaterialContainerStateChangedEvent
26: setMaterialTrackingLocation(MaterialTrackingLocation Ohs2)
27: DurableLocationChangedEvent
29: setMaterialTrackingLocation(MaterialTrackingLocation Stk9)
30: DurableLocationChangedEvent
For clarity reasons only the
messages for containers aaa
and bbb are defined. The same
messages would also take
place for ccc and ddd.
5: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
12: JobStateChangedEvent(..previousState JobUndefined, newState JobQueued)
9: MaterialContainerStateChangedEvent
6: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
13: JobStateChangedEvent(..previousState JobQueued, newState JobExecuting)
17: getUnit()
10: getUnit()
1: setUnit(unitvalue)
2: setUnit(unitvalue)
11: getMachineType()
AMHS Equipment
Controllers
Factory
Operations
MTSCDurable
Management
Machine Object
Eq6
Figure R1-15
Scenario Case 7