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SEMI E19.3-0697 © SEMI 1991, 2002 2 product data sheets, and other relevant literatu re respecting any materials mentioned herein. These standards are subject to change without noti ce. The user’s attention is called to …

SEMI E19.3-0697 © SEMI 1991, 2002 1

SEMI E19.3-0697 (Reapproved 0702)

PORT STANDARD FOR MECHANICAL INTERFACE OF WAFER

CASSETTE TRANSFER, 150 mm (6 inch) PORT

This standard was technically approved by the Global Physical Interfaces & Carriers Committee and is the

direct responsibility of the North American Physical Interfaces & Carrier Committee. Current edition

approved by the North American Regional Standards Committee on March 17, 2002. Initially available at

www.semi.org June 2002, to be published July 2002. Originally published in 1991; previously published June

1997.

The complete specification for this interface includes all general requirements of SEMI E19.

Table 1 Port Dimensions for 150 mm (6 in.) Wafer Cassette

A1 98.48 mm ± 0.13 mm (3.875 in. ± 0.005 in.)

A2 98.48 mm ± 0.13 mm (3.875 in. ± 0.005 in.)

Port Door

A3 9.53 mm ± 0.25 mm (0.375 in. ± 0.010 in.)

B1 115.57 mm ± 0.13 mm (4.550 in. ± 0.005 in.)

B2 107.95 mm ± 0.13 mm (4.250 in. ± 0.005 in.)

B3 6.35 mm ± 0.25 mm (0.250 in. ± 0.010 in.)

B4 6.35 mm ± 0.25 mm (0.250 in. ± 0.010 in.)

B5 17.78 mm (0.700 in.) maximum

B7 12.70 mm (0.500 in.) minimum

B8 3.18 mm ± 0.25 mm (0.125 in. ± 0.010 in.)

Guide Rails

B9 6.35 mm (0.250 in.) maximum radius

C1 106.68 mm ± 0.13 mm (4.200 in. ± 0.005 in.)

C2 6.35 mm ± 0.13 mm (0.250 in. ± 0.005 in.)

C3 63.50 mm ± 0.13 mm (2.500 in. ± 0.005 in.)

C4 3.18 mm ± 0.05 mm (0.125 in. ± 0.002 in.) diameter

C6 6.35 mm ± 0.25 mm (0.250 in. ± 0.010 in.)

C7 Full spherical radius

Latch Pins

C8 4.44 mm (0.175 in.) minimum

D1 152.40 mm ± 0.13 mm (6.000 in. ± 0.005 in.)

D2 76.20 mm ± 0.13 mm (3.000 in. ± 0.005 in.)

D3 165.10 mm ± 0.13 mm (6.500 in. ± 0.005 in.)

D4 82.55 mm ± 0.13 mm (3.250 in. ± 0.005 in.)

D5 6.35 mm ± 0.08 mm (0.250 in. ± 0.003 in.)

D6 10.16 mm ± 0.25 mm (0.400 in. ± 0.010 in.)

Registration

D7 Full spherical radius

F1 1.36 kg (3 lb) minimum Latch Pin Force each

F2 1.36 kg (3 lb) minimum

G1 12.70 mm ± 0.25 mm (0.500 in. ± 0.010 in.) Position of Cassette

G2 0.50 mm (0.020 in.) maximum

NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish appropriate safety and health practices and determine the

applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability

of the standards set forth herein for any particular application. The determination of the suitability of the standard is

solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,

SEMI E19.3-0697 © SEMI 1991, 2002 2

product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are

subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E19.4-0998

(Reapproved 0703)

200 mm STANDARD MECHANICAL INTERFACE (SMIF)

This standard was technically reapproved by the Global Physical Interfaces & Carriers Committee and is the

direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition

approved by the North American Regional Standards Committee on March 12, 2003. Initially available at

www.semi.org May 2003; to be published July 2003. Originally published in 1992; previously published

March 2003.

NOTICE: The user’s attention is called to the

possibility that compliance with this standard may

require use of an invention covered by patent rights. By

publication of this standard, Semiconductor Equipment

and Materials International (SEMI) takes no position

with respect to the validity of any patent rights asserted

in connection with any item mentioned in this

document. Users of this document are expressly advised

that determination of any such patent rights, and the

risk of infringement of such rights, are entirely their

own responsibility.

1 Purpose

1.1 A standard interface is required for containers

intended to control the transport environment of

cassettes containing substrates. The interface must

address the proper container orientation for material

transfer and maintain continuity between the container

and equipment environment in order to control

particulate matter.

2 Scope

2.1 This specification describes one approach to

interfacing a clean cassette transport box to a clean

environmental housing on a piece of semiconductor

processing equipment or to other clean environments.

The system concept involves mating a door on a

cassette container to a door on an equipment enclosure

and transferring the cassette into, and out of, the

equipment without exposing the cassette and substrates

to outside contamination.

2.2 The incorporation of this standard may require

equipment designers to include the features of the

interface into the tool design. Spacing between open

cassette ports must be considered when incorporating

this interface. Designers are directed to the

specifications and recommendations made in SEMI E15

in this regard.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This standard is specific to 200 mm wafers. This

specification focuses on applications in which the

interface port is positioned horizontally. The standard is

focused exclusively on the box-to-canopy interface.

Other considerations of box and equipment design are

purposely excluded.

NOTE 1: Hewlett Packard has patent coverage for this

concept and is offering non-exclusive licenses on an equal

basis to any company. Companies intending to manufacture

products to this standard should be aware of Hewlett

Packard' s position.

4 Referenced Standards

4.1 SEMI Standards

SEMI E15 — Specification for Tool Load Port

SEMI E19 — Standard Mechanical Interface (SMIF)

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 (See Figure 1 for a pictorial depiction of most

terms.)

5.2 Definitions

5.2.1 box — a protective portable container for a

cassette and/or substrate(s).

5.2.2 cassette — an open structure that holds one or

more substrates (wafers, masks, etc.).

5.2.3 guide rail — a component of a port plate that

provides coarse location for placing the pod on the port

assembly.

5.2.4 hold-down latch — a mechanism for locking the

pod to the port plate.

5.2.5 latch pins — pins that engage the pod door latch

and accomplish the pod door lock/unlock functions.

Latch pins are carried by the port door.

5.2.6 pod — a box having a Standard Mechanical

Interface per SEMI E19.