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SEMI E98.1-1102 © SEMI 2001, 2002 3 Parameter Name Parameter Range SECS-II Da ta Item Reference SECS-II Format Status (list of) Structure L,m 1. L,2 1 . <ERRCODE 1 > 2 . <ERRTEXT 1 > m. L ,2 1 . <ERRCODE m…

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SEMI E98.1-1102 © SEMI 2001, 2002 2
5 Service Parameter Mapping
5.1 Table 2 shows the mapping between service parameters defined by OBEM and the data items defined by SEMI
E5. All OBEM messages map to Stream 14 Functions 19 and 20. The data item SVCNAME is the text string
representation of the service name found in Table 1 and should be assumed as case-sensitive. The name of each
parameter is the text string representation of the parameter name as it appears in Table 2. The SECS-II Data Item
Reference, where different from SPVAL, provides additional information and restrictions for the value.
Table 2 Service Parameter Mapping Table
Parameter Name Parameter Range SECS-II Data Item Reference SECS-II Format
DateTime A valid date and time. L,2
1. <SPNAME>
2. <SPVAL>
SPNAME = “DateTime”
SPVAL = (20,34,30)
DeviceProgramID 0–65,535 L,2
1. <SPNAME>
2. <SPVAL>
SPNAME = “DeviceProgramID”
SPVAL = (51,52)
ErrorCode Enumerated as defined
in SEMI E5 or by
supplier.
ERRCODE 5()
ErrorText 1–80 characters ERRTEXT 20
ObjSpec 0–80 characters OBJSPEC 20
ProcessCapability 1–80 characters L,2
1. <SPNAME>
2. <SPVAL>
SPNAME = “ProcessCapability”
SPVAL = (20)
Property Each property is an
attribute name/value pair
for some object
indicated in ObjSpec.
Each attribute name
maps directly to
ServiceParameterName
and each attribute value
maps directly to
ServiceParameterValue.
L,2
1. <SPNAME>
2. <SPVAL>
—
RequestStatus Structure L,2
1. <SVCACK>
2. Status
RequestAcknowledge Enumerated:
0 = Request performed
1 = Invalid request
2 = Can not perform
now
4 = Will perform when
able and report results
when complete.
SVCACK 10
Service Enumerated:
0 = OUT OF SERVICE
1 = IN SERVICE
L,2
1. <SPNAME>
2. <SPVAL>
SPNAME = “Service”
SPVAL = (51)
ServiceParameterName Text SPNAME 20
ServiceParameterValue Depends on parameter
used.
SPVAL 10, 20, 34, 40, 51, 52
SEMI E98.1-1102 © SEMI 2001, 2002 3
Parameter Name Parameter Range SECS-II Data Item Reference SECS-II Format
Status (list of) Structure L,m
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
m. L,2
1. <ERRCODE
m
>
2. <ERRTEXT
m
>
5.2 Table 3 shows the data items in SECS II messages that do not have a corresponding service parameter.
Table 3 Additional Data Item Requirement Table
Function SECS-II Data Item
Used to satisfy SECS-II conventions for linking a multi-block inquiry with
subsequent multi-block message.
DATAID
Name of OBEM service. Enumerated:
“Abort”
“Add Element”
“AddProcessCapability”
“ChangeService”
“Cleanup”
“GetDateTime”
“GetProgramDirectory”
”Pause”
“RemoveProcessCapability”
“RemoveElement”
“Resume”
“SelectProgram”
“SetDateTime”
“Shutdown”
“Start”
“Startup”
“Stop”
SVCNAME
A unique number generated by the service requestor to identify a specific
operation and connect it to a later completion confirmation.
OPID
NOTE 1: The text strings specified in Table 3 for SVCNAME shall be recognized by the equipment as vaild, whether the equipment is or is not
case-sensitive.
6 Object Attribute Form
6.1 Section 6 defines the SECS-II form of the attributes of objects defined in OBEM, presented in alphabetical
order. Note that attribute names in this section indicate the literal text string that shall be accepted in string
comparisons for attribute names in Stream 14 messages.
6.1.1 By convention, all tables include ObjID as well as ObjType as the two attributes required by SEMI E39.
6.2 AbstractEquipmentElement
6.2.1 Table 5 specifies the attributes of the AbstractEquipmentElement.
Table 4 AbstractEquipmentElement Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“Cycles” 0+. 54
“Description” 20
“Function” 20
“ImmutableID” 20
SEMI E98.1-1102 © SEMI 2001, 2002 4
Attribute Name Range/Value SECS-II Format
“InService “ Enumerated:
0 = OUT OF SERVICE
1 = IN SERVICE
51
“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
“ObjType” ”EqpElement” 20
“ResetDate” Conforms to DateTime attribute of Clock 20,30,34
“Supplier” 20
6.3 AbstractEquipmentModule
6.3.1 Table 6 specifies the elements of the AbstractEquipmentModule object.
Table 5 AbstractEquipmentModule Object Attribute Specification
Attribute Name Range/Value SECS-II Format
“BehaviorState” Enumerated:
0 = IDLE
1 = ACTIVE SERVICE
2 = PAUSING
3 = PAUSED
4 = STOPPING
5 = STOPPED
6 = ABORTING
7 = ABORTED
8 = IDLE WITH ALARMS
“Model” 20
“ModelRevision” 20
“Nickname” 20
“ObjID” Conforms to OBJID restrictions in SEMI E39.1, Section 6. 20
“ObjType” 0 or more 20
“ProcessType” 20
”ProcessCapabilityList” 0
“ProcessSetup” 20
“PreviousBehaviorState” Enumerated:
0 = IDLE
1 = ACTIVE SERVICE
2 = PAUSING
3 = PAUSED
4 = STOPPING
5 = STOPPED
6 = ABORTING
7 = ABORTED
8 = IDLE WITH ALARMS
51
“SoftwareVersions” 0
“Units” Conforms to SEMI E5, Section 9. 20
6.4 AbstractEquipmentSubsystem
6.4.1 Table 7 specifies the attributes of the AbstractEquipmentSubsystem.