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SEMI E6-0303 © SEMI 1982, 2003 26 19 Other Data Sheets 19.1 Include data sheets or refere nce information for any other co nnections such as connections for life safety systems, gas detectio n systems, fire protection sy…
SEMI E6-0303 © SEMI 1982, 2003 25
Data Sheet 1000 – Exhaust (See SEMI E6 Section 18)
1000 Exhaust
A B C D E F
1
Equipment
Component
Exhaust Connection
Number
Connection Label
on Equipment
Utility Type Line Source Exhaust Conveyed
Process Wastes
2
text text text text text text
3
4
5
6
1000 Exhaust
G H I J K L
1
Minimum Static
Pressure
Maximum Static
Pressure
Maximum Static
Pressure
Fluctuation
Idle Average Flow Process Average
Flow
Maximum
Temperature
2
Pa Pa Pa cmh cmh Degrees C
3
4
5
6
1000 Exhaust
M N O P Q R
1
Equipment
Component Fitting
Size
Equipment
Component Fitting
Size Dimension
Equipment
Component Fitting
Material
Equipment
Component Fitting
Type
Flow Loss
Coefficient
External Damper
Required
2
mm or inches ID or OD text text unit less yes or no
3
4
5
6
1000 Exhaust
S T
1 Drawing References Exhaust Comments
2
text text
3
4
5
6
SEMI E6-0303 © SEMI 1982, 2003 26
19 Other Data Sheets
19.1 Include data sheets or reference information for
any other connections such as connections for life
safety systems, gas detection systems, fire protection
systems, equipment control and communication
systems, material handling systems etc.
20 Related Documents
20.1 SEMI Standards
SEMI E36 — Semiconductor Equipment
Manufacturing Information Tagging Specification
SEMI E49.1 — Guide for Tool Final Assembly,
Packaging, and Delivery
SEMI E51 — Guide for Typical Facilities Services and
Termination Matrix
SEMI E72 — Specification and Guide for 300 mm
Equipment Footprint, Height, and Weight
SEMI E78 — Electrostatic Compatibility - Guide to
Assess and Control Electrostatic Discharge (ESD) and
Electrostatic Attraction (ESA) for Equipment
SEMI F34 — Guide for Liquid Chemical Pipe Labeling
SEMI F47 — Specification for Semiconductor
Processing Equipment Voltage Sag Immunity
SEMI S2 — Environmental, Health, and Safety
Guideline for Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics
Engineering of Semiconductor Manufacturing
Equipment
20.2 Federal Standard
1
Federal Standard 209E — Airborne Particulate
Cleanliness Classes in Clean rooms and Clean Zones
20.3 ISO Standard
2
ISO 14644 – Cleanrooms and Associated Controlled
Environments – Part 1 Classification of Air Cleanliness
20.4 Other Documents
International SEMATECH 00043939ATR
3
— Utility
Measurement Protocol for Semiconductor Tools
1 General Service Administration, Federal Supply Service Bureau,
Specification Section, Suite 8167, 470 East L' Enfant Place SW,
Washington, D.C. 20407
2 International Organization for Standardization, ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30
Website: http://www.iso.ch
3 SEMATECH, 2706 Montopolis Drive, Austin, TX 78741, website:
www.sematech.org
International SEMATECH 980134474ASTD — Guide
to Documenting Tool Accommodation Time and Cost
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely
SEMI E6-0303 © SEMI 1982, 2003 27
RELATED INFORMATION 1
ADMINISTRATIVE INTERFACE INFORMATION
NOTICE: This related information is being balloted, but is not an official part of SEMI E6 and is not intended to
modify or supersede the official standard. It has been derived from the work of the originating task force.
Determination of the suitability of the material is solely the responsibility of the user.
R1-1 Installation Contacts
R1-1.1 Table R1-1 shows an example of the administrative interfaces information – installation contacts sheet to be
included with equipment installation documentation as recommended in SEMI E6 Section 7.1.1.
R1-2 Installation Roles and Responsibilities
R1-2.1 In addition to contacts, an explanation of supplier’s installation responsibilities and purchaser’s
responsibilities should be included to complete the administrative interface information.
Table R1-1 Example of Administrative Interface Information – Installation Contacts
Supplier Purchaser
Company Name
Address
Administrative Contact:
Name/Title
Phone/Fax
Email:
Sales/Purchasing Contact:
Name/Title
Phone/Fax
Email:
Shipping Contact:
Name/Title
Phone/Fax
Email:
Technical Support Contact:
Name/Title
Phone/Fax
Process Support Contact:
Name/Title
Phone/Fax
Email:
ESH Contact:
Name/Title
Phone/Fax
Email: