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SEMI E54.5-0997 © SEMI 1997, 2004 1 SEMI E54.5-0997 (Withdrawn 0704) STANDARD FOR SENSOR /ACTUATOR NETWORK COMMUNICATIONS FOR THE SMART DISTRIBUTED SYSTEM (SDS) NOTE: This document was previously designat ed SEMI E60. Be…

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SEMI E54.4-0704 © SEMI 1997, 2004 19
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SEMI E54.5-0997 © SEMI 1997, 2004 1
SEMI E54.5-0997 (Withdrawn 0704)
STANDARD FOR SENSOR/ACTUATOR NETWORK
COMMUNICATIONS FOR THE SMART DISTRIBUTED SYSTEM (SDS)
NOTE: This document was previously designated SEMI E60. Because this document is part of a suite of documents, its
designation has been reassigned for ease of reference. Please note that the technical content of this document is unchanged from
the 0697 version.
NOTICE: This document was balloted and approved
for withdrawal in 2004.
1 Purpose
This standard defines a communication protocol based
on the Smart Distributed System (SDS) to enable
communications between intelligent devices on a
sensor/actuator network (SAN) to be used in
semiconductor manufacturing equipment.
1.1 Background and Motivation — SDS provides
interconnection of smart control devices such as
sensors, actuators, and controllers in a fast-response
time, low-cost network for industrial use. SDS enables
multiple devices to share a single bus, thereby
significantly reducing the point-to-point wiring between
controllers, sensors, and actuators. The SDS system is
based on CAN, the controller area network used in the
automotive industry and defined by Bosch.
2 Scope
This document specifies a SAN communications
standard based on the Smart Distributed System (SDS)
specification that is in compliance with the SEMI SAN
Common Device Model specification.
2.1 This document specifies the protocol and services
that compliant intelligent devices must support to
interchange information over this semiconductor
equipment sensor/actuator network.
2.2 This document is used in conjunction with a SEMI
standard SAN Common Device Model specification
and one or more SEMI standard specific device model
specifications (e.g., for a mass flow controller).
Together, the model documents describe the data
structure and behavior that are characteristic of the
various devices on the network. This SAN
communications standard identifies the protocol for the
interaction with such a device over the network to make
the data structures and behavior available to other
devices.
2.3 This standard, together with a sensor/actuator
network interoperability guideline, the sensor/actuator
network common device model, one or more
sensor/actuator network specific device model
documents, and the SDS specifications, form a
complete interoperability standard. The general
sensor/actuator network document architecture is
shown in the Sensor/Actuator Network Common
Device Model document in Figure 1.
Figure 1
Sensor/Actuator Network Related Documents
SEMI E54.5-0997 © SEMI 1997, 2004 2
The SDS Network communications standard document
structure is shown in Figure 2. This standard specifies
the mapping of the SAN common device model onto
the SDS-specific network. In addition, the document
will include mappings to specific device models (e.g.,
the mass flow controller). The latter mappings will be
included in this document as the specific device models
are defined.
Figure 2
SDS Network Communications Standard Document
Structure
3 Limitations
3.1 This document specifies a semiconductor
equipment SAN based solely on SDS and is a
companion document to the SDS specification; thus, a
complete specification of this standard necessarily
includes the SDS specifications. There are other
semiconductor equipment SAN communications
options. The specifications for these options are not
included here.
3.2 This standard specifies enhancements that provide
additional capabilities over and above those currently
required by SDS. In order to avoid document
consistency problems, information in the SDS
specification that relates to this standard is not repeated
in this document. This document is limited to
describing enhancements or limitations to the SDS
specification that are imposed by this standard.
3.3 A complete specification of the conformance
testing procedure shall include the SDS protocol
conformance testing specification. Conformance testing
shall also include enhancements and limitations to the
SDS specification required by this standard.
4 Referenced Standards
4.1 SEMI Standards
SEMI E30 — Generic Model for Communications and
Control of SEMI Equipment (GEM)
SEMI E39 — Object Services Standard: Concepts,
Behavior, and Services
SEMI E54.1 — Standard for Sensor/Actuator Network
Common Device Model
4.2 ISO Standards
1
ISO 7498 — Basic Reference Model for Open Systems
Interconnection
ISO 11898 — Road Vehicles — Interchange of Digital
Information — Controller Area Network (CAN) for
High-Speed Communications
4.3 Other Documents
Doc 84-08420-1 (GS 052 103) — SMART
DISTRIBUTED SYSTEM Application Layer Protocol
Specification, Honeywell MICRO SWITCH, February
15, 1995
Doc 84-08421-A (GS 052 104) — SDS Physical Layer
Specification, Honeywell MICRO SWITCH, December
15, 1994
Doc 85-08453-0 (GS 052 107) — SMART
DISTRIBUTED SYSTEM Component Model
Specification, Honeywell MICRO SWITCH, January
29, 1995
Doc GS 052 108 Issue 1 — SMART DISTRIBUTED
SYSTEM Conformance Test Procedure Specification,
Honeywell MICRO SWITCH, January 2, 1995
Controller Area Network Specification: Version 2, R.
Bosch GmbH, + Postfach 50 D-7000, Stuttgart 1,
Germany, 1991
5 Terminology
Terminology that is common to all of the documents in
this SAN series may also be defined in the Sensor
Actuator Network Interoperability Guideline.
Terminology may be reproduced here which is defined
in other SEMI documents.
5.1 Device Component Definitions — This standard is
based on the concepts developed in the Sensor Actuator
Network Common Device Model (SEMI E54)
document and makes use of the following terms defined
in it:
a) device
b) device model
c) object
d) instance
e) attribute
f) behavior
g) service
1
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