semi合集-English.pdf - 第5689页
SEMI P10-0705 © SEMI 1990, 2005 184 DATA_PATTERN_WINDOW 012600,-13000,-12600,13000 START_DATA_FRACTURE 1 PATTERN_ADDRESS_SIZE .05 END_DATA_FRACTURE 1 END_DATA_SOURCE_FILE source1.gds ! END_DATA_MANIPULATION 2 !----------…
SEMI P10-0705 © SEMI 1990, 2005 183
RELATED INFORMATION 7
EXAMPLE OF A COMPLEX BOOLEAN FUNCTION
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the standard.
The following is an excerpt of a P10 file which demonstrates how the
<data_manipulation> capability may be applied.
DATA_PATTERN_NAME METAL-1
PATTERN_FORMAT MEBES
!----------------------------------------------------------------------------
------------
START_DATA_MANIPULATION 1
BOOLEAN MINUS
!
DATA_SOURCE_FILE source1.gds
DATA_FORMAT GDSII
DATA_TOP_CELL gds_top_cell
DATA_LAYER_ID 1;0
DATA_PATTERN_WINDOW 012600,-13000,-12600,13000
START_DATA_FRACTURE 1
PATTERN_ADDRESS_SIZE .05
END_DATA_FRACTURE 1
END_DATA_SOURCE_FILE source1.gds
!
DATA_SOURCE_FILE source1.gds
DATA_FORMAT GDSII
DATA_TOP_CELL gds_top_cell
DATA_LAYER_ID 2;0
DATA_PATTERN_WINDOW 012600,-13000,-12600,13000
START_DATA_FRACTURE 1
PATTERN_ADDRESS_SIZE .05
END_DATA_FRACTURE 1
END_DATA_SOURCE_FILE source1.gds
!
END_DATA_MANIPULATION 1
!
START_DATA_MANIPULATION 2
BOOLEAN MINUS
!
DATA_SOURCE_FILE source1.gds
DATA_FORMAT GDSII
DATA_TOP_CELL gds_top_cell
DATA_LAYER_ID 3;0
DATA_PATTERN_WINDOW 012600,-13000,-12600,13000
START_DATA_FRACTURE 1
PATTERN_ADDRESS_SIZE .05
END_DATA_FRACTURE 1
END_DATA_SOURCE_FILE source1.gds
!
DATA_SOURCE_FILE source1.gds
DATA_FORMAT GDSII
DATA_TOP_CELL gds_top_cell
DATA_LAYER_ID 4;0
SEMI P10-0705 © SEMI 1990, 2005 184
DATA_PATTERN_WINDOW 012600,-13000,-12600,13000
START_DATA_FRACTURE 1
PATTERN_ADDRESS_SIZE .05
END_DATA_FRACTURE 1
END_DATA_SOURCE_FILE source1.gds
!
END_DATA_MANIPULATION 2
!----------------------------------------------------------------------------
----------------------------------
START_DATA_MANIPULATION 3
BOOLEAN AND
!Note:The input to manipulation 3 is the output
from
! manipulations #1 and #2. Discrete names of
temporary files
!are not required, just a reference to a
previous manipulation.
!This represents the output from both 1 and 2
! (1-2) and (3-4) with the logical operation of
anding them
! together ((1-2)*(3-4)).
DATA_SOURCE_FILE 1
DATA_FORMAT DATA_MANIPULATION
END_DATA_SOURCE_FILE 1
!
DATA_SOURCE_FILE 2
DATA_FORMAT DATA_MANIPULATION
END_DATA_SOURCE_FILE 2
END_DATA_MANIPULATION 3
!----------------------------------------------------------------------------
----------------------------------
START_DATA_MANIPULATION 4
BOOLEAN OR
!
DATA_SOURCE_FILE source1.gds
DATA_FORMAT GDSII
DATA_TOP_CELL gds_top_cell
DATA_LAYER_ID 6;0
DATA_PATTERN_WINDOW 012600,-13000,-12600,13000
START_DATA_FRACTURE 1
PATTERN_ADDRESS_SIZE .05
END_DATA_FRACTURE 1
END_DATA_SOURCE_FILE source1.gds
!
DATA_SOURCE_FILE 3
DATA_FORMAT DATA_MANIPULATION
END_DATA_SOURCE_FILE 3
!
END_DATA_MANIPULATION 4
!----------------------------------------------------------------------------
---------------------------------
START_DATA_MANIPULATION 5
BOOLEAN AND
!
DATA_SOURCE_FILE source1.gds
DATA_FORMAT GDSII
DATA_TOP_CELL gds_top_cell
DATA_LAYER_ID 5-7
DATA_PATTERN_WINDOW 012600,-13000,-12600,13000
START_DATA_FRACTURE 1
SEMI P10-0705 © SEMI 1990, 2005 185
PATTERN_ADDRESS_SIZE .05
END_DATA_FRACTURE 1
END_DATA_SOURCE_FILE source1.gds
!
DATA_SOURCE_FILE source1.gds
DATA_FORMAT GDSII
DATA_TOP_CELL gds_top_cell
DATA_LAYER_ID 17-19;8-9
DATA_PATTERN_WINDOW 112600,-13000,-112600,13000
START_DATA_FRACTURE 1
PATTERN_ADDRESS_SIZE .05
END_DATA_FRACTURE 1
END_DATA_SOURCE_FILE source1.gds
!
DATA_SOURCE_FILE 4
DATA_FORMAT DATA_MANIPULATION
END_DATA_SOURCE_FILE 4
!
! Note: The final sizing, output address size, and data scale are shown
below.
!
START_DATA_FRACTURE 2
PATTERN_ADDRESS_SIZE .05
DATA_SCALE_FACTOR 5
END_DATA_FRACTURE 2
!
START_DATA_FRACTURE 3
SIZING .25
SIZING_RULE TWOSIDED
SIZING_BORDER_RULE PARAGON
END_DATA_FRACTURE 3
!
END_DATA_MANIPULATION 5
!----------------------------------------------------------------------------
---------------------------------
END_DATA_PATTERN_NAME METAL-1