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SEMI F76-0303 © SEMI 2003 1 SEMI F76-0303 TEST METHOD FOR EVALUATION OF PARTICLE CONTRIBUTION FROM GAS SYSTEM COMPONENTS EXPOSED TO CORROSIVE GAS This test method was technically approved b y the Global Gases Comm ittee …

SEMI F75-1102 © SEMI 2002 8

Table 1 UPW System Test Parameters, Sampling Points and Recommended Monitoring Frequency for

Assuring Good UPW System Operation

Type of

Water

Source

Incoming

Feed pre

RO filters

Pre RO

Post RO

prefilters

UPW

Post RO

UPW

Post Ion

Exchange

UPW

Post Final

Filter

UPW

Return Loop

UPW

POU Tools

(Recommended)

Resistivity - Continuous

(Conductivity)

Continuous

(Conductivity)

Continuous

(Conductivity)

Continuous

(Conductivity)

Continuous

(

Conductivity)

TOC Bi-Weekly Bi-Weekly Continuous Continuous Continuous Continuous Bi-Weekly

Particles

OPC

Monthly Monthly Monthly Continuous Continuous Continuous Monthly

Particle

SEM

- - - Bi-monthly Monthly Bi-monthly Monthly

Bacteria Biweekly Biweekly Biweekly Biweekly Weekly Weekly Bi-weekly

Dissolved

Silica

Monthly Monthly Monthly Continuous Continuous Continuous Monthly

Total

Silica

Monthly Monthly Monthly Bi-weekly Weekly Weekly Bi-weekly

NVR - - - Continuous Continuous Continuous -

Sodium - - - Continuous Continuous Continuous -

Boron Monthly Monthly Monthly Quarterly Weekly - -

Anions &

Cations

Monthly Monthly Monthly Bi-weekly Bi-weekly Bi-weekly -

Critical

Ions

- - - - - - Bi-weekly

Trace

Metals-

Critical

Elements

- - - Bi-weekly - - Bi-weekly

Trace

Metals-

Full Scan

Quarterly Quarterly Quarterly Quarterly Monthly Monthly -

Critical Ions include Chloride, Fluoride, and Ammonium.

Critical Elements include Al, Ca, Cr, Cu, Fe, Mg, Ni, Na, and Zn

NOTE 7: The frequency noted for these parameters is not intended to assure against excursions due to improper maintenance

procedures or other external means of system contamination.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for

any particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein. These standards are subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI F76-0303 © SEMI 2003 1

SEMI F76-0303

TEST METHOD FOR EVALUATION OF PARTICLE CONTRIBUTION

FROM GAS SYSTEM COMPONENTS EXPOSED TO CORROSIVE GAS

This test method was technically approved by the Global Gases Committee and is the direct responsibility of

the North American Gases Committee. Current edition approved by the North American Regional Standards

Committee on November 22, 2002. Initially available at www.semi.org December 2002; to be published

March 2003.

1 Purpose

1.1 This is a test method to compare gas handling

components for potential particle generation in

corrosive gas service. It is intended as a practical

means of generating performance data for a group of

components to be compared in a selection process.

2 Scope

2.1 This method applies to valves, particle filters, and

low pressure regulators.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 This method is not intended to provide insight into

fundamental corrosion mechanisms.

3.2 Since the test is to be conducted on fully functional

gas system components, it is not designed to determine

the suitability of specific materials of construction for

corrosive gas service. Such factors as component

design, flow path, weld quality, cleanliness of

construction and manufacturing methods can impact the

results of this test making the material of construction

only one of many factors.

3.3 This method is not designed to provide reliability

or failure data. It is expected that the data produced

will be relative; that is, the data will be most useful

when groups of components are compared to each

other.

3.4 This method is not designed to evaluate parameters

besides particle contribution, for instance leak rate or

regulator drift.

3.5 Components to be tested must be capable of

withstanding the bake temperature of 100°C for filters

and 70°C for valves and regulators.

3.6 This test applies to HCl which is a reducing

environment. Results may not be indicative of

performance in corrosive oxidizing environments such

as Cl

4 Referenced Standards

4.1 SEMI Standards

SEMI C3.49 — Standard for Bulk Nitrogen (N

99.99999% Quality

SEMI E66 — Test Method for Determining Particle

Contribution by Mass Flow Controllers

4.2 ASTM Standard

ASTM F1394-92 — Standard Test Method for

Determination of Particle Contribution from Gas

Distribution System Valves.

4.3 SEMATECH Documents

SEMASPEC #93021510A-STD — Test Method for

Determination of Particle Contribution by Low Pressure

Regulators in Gas Distribution Systems.

SEMASPEC #93021511A — Test Method for

Determination of Particle Contribution by Filters in Gas

Distribution Systems.

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Definitions

5.1.1 cycle purge — a procedure which employs

alternating cycles of vacuum and pressure for the

purpose of evacuating a gas system or a portion of a gas

system of impurities or active gases.

5.1.2 particle filter — a device that removes small

particles from a gas stream with high efficiency.

5.1.3 point-of-use purifier — an inline device that

removes homogeneous impurities such as moisture and

oxygen gases. An integral particle filter is typically

included in the same housing to remove particles.

1 American National Standards Institute, 1819 L Street, NW, Suite

600, Washington, DC 20036, website: www.ansi.org

2 SEMATECH, 2706 Montopolis Drive, Austin, TX 78741, website:

www.sematech.org

SEMI F76-0303 © SEMI 2003 2

5.1.4 regulator — a valve designed to reduce a high

incoming pressure to a lower outlet pressure by

automatically opening to allow flow until a desired,

pre-set pressure on the outlet side is reached, and then

automatically throttling to stop further pressure

increase.

5.1.5 valve — a device that controls the flow or

pressure of a gas. Valve functions can include shut-off,

metering, backflow prevention, and pressure relief.

6 Summary of Method

6.1 This test method is designed to provide comparative

results for similar components. It is not intended to

replicate process condition or actual use conditions.

Components will be compared for their particle

shedding performance after being exposed to moisture

and corrosive gases, in this case hydrogen chloride

(HCl) gas. The component will be exposed alternately

to corrosive gas and then to moist 100 ppm nitrogen gas

several times. The particle shed performance before

and after exposure will be compared. The overall test

sequence is outlined in Figure 2.

7 Apparatus

7.1 Corrosive Gas Exposure Apparatus

7.1.1 The corrosive gas exposure will be carried out

using the apparatus shown in Figure 1.

7.1.2 Moisture Generator — Moisture generation is

achieved using a permeation-source-type moisture

generator. The permeation source should be selected to

provide 100 ppm H

O in a flow of 500 sccm nitrogen.

Records should be kept on the age of the permeation

source so that a reliable source of moisture can be

maintained.

7.1.3 Vacuum Generator — A Venturi or similar

device capable of producing a rough vacuum of 85000

pascals (25 inches of mercury).

7.1.4 Point of HCl Introduction — The point at which

gaseous hydrogen chloride HCl and N

join the system

(point A in Figure 1) should be designed so that the

dead volume between the check valves is minimized.

The check valves following V1 and V2 should be

nearly joined to each other so as to minimize this

volume.

CORROSIVE GAS EXPOSURE

MOISTURE

GENERATOR

TEST PIECE

SCRUBBER

ANALYZER

PORT

N2 purifier

HCl

PURIFIER

APPARATUS

HCl

vacuum

generator

Figure 1

Corrosive Gas Exposure Apparatus

Legend to figure 1

SYMBOL LEDGEND

Mas Flow Contoller

Impurity Removal Purifier

Particle Removal Filter

Pneumatically Actuated Valve

Check Valve

8 Reagents and Materials

8.1 Nitrogen — Nitrogen with less than 50 ppbv

moisture is to be used. This can be accomplished with

a point-of-use purifier as shown in Figure 1 or by using

99.99999% quality bulk nitrogen according to SEMI

C3.49.

8.2 Hydrogen Chloride — Gaseous HCl should contain

less than 1 ppmv H

O. The HCl purifier shown in

Figure 1 is optional unless the source gas contains

greater than 1 ppmv H