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SEMI P10-0705 © SEMI 1990, 2005 144 8.1.645 SHIP_FIRST_POSTPELL_DIE_ DIE_MAP — (T or F) If T, requires delivery o f the first run, post-pellicle die to die defect inspection map for the entire mask to be sent to cu stome…

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SEMI P10-0705 © SEMI 1990, 2005 143
8.1.622 SHIP_BARCODE_PLOT — (T or F) If T, the plot of the barcode must be sent to the customer.
8.1.623 SHIP_CD_DATA — (T or F) If T, requires delivery of all critical dimension measurements, criteria and
evaluation data to the customer for all CD criteria specified.
8.1.624 SHIP_CD_PRINTOUT — (T or F) If T, requires delivery to the customer of the printout from the CD
measurement tool.
8.1.625 SHIP_CD_UNIFORMITY_MAP — (T or F) If T, requires delivery to the customer of the uniformity map
from the CD uniformity measurement tool.
8.1.626 SHIP_CENTRALITY_DATA — (T or F) If T, requires delivery of the centrality measurement to the
customer.
8.1.627 SHIP_CENTRALITY_MAP — (T or F) If T, requires delivery of the centrality map to the customer.
8.1.628 SHIP_CERTIFICATE_OF_CONFORMANCE — (T or F) If T, requires delivery of a certificate of
conformance to the customer.
8.1.629 SHIP_CLOSURE_DATA — (T or F) If T, requires delivery of closure measurement data to the customer.
8.1.630 SHIP_CUSTOMER_QUALITY_FORM — (text) If present, the data field specifies the form required by
the customer to document the quality of the mask.
8.1.631 SHIP_DEFECT_DATA — (T or F) If T, requires delivery of defect inspection criteria and evaluation data
to the customer for all defect criteria specified. This should be final inspection data unless
SHIP_THRU_PELLICLE_DATA is specified, in which case it should be for final inspection prior to pelliclizing.
8.1.632 SHIP_DIE_FIT_MAP — (T or F) If T, requires delivery of a die fit map to the customer.
8.1.633 SHIP_FILM — If present, film(s) of mask(s) must be sent to customer. Indicates beginning of <films>
collection. Alphanumeric data field identifies the collection to establish which collections are hierarchically affected
by another. The appearance of a <films> at a lower level in the hierarchy supercedes the <films> at a higher level in
the hierarchy if it has the same SHIP_FILM data field.
8.1.634 SHIP_FIELD_FIT_MAP — (T or F) If T, requires delivery of a field fit map to the customer.
8.1.635 SHIP_FINAL_POSTPELL_DIE_DB_MSK_MAP — (T or F) If T, requires delivery of the final run, post-
pellicle die to database defect inspection map for the entire patterned area to be sent to customer.
8.1.636 SHIP_FINAL_POSTPELL_DIE_DB_PTN_MAP — (T or F) If T, requires delivery of the final run, post-
pellicle die to database defect inspection map for the single pattern to be sent to customer.
8.1.637 SHIP_FINAL_POSTPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the final run, post-
pellicle die to die defect inspection map for the entire mask to be sent to customer.
8.1.638 SHIP_FINAL_PREPELL_DIE_DB_MSK_MAP — (T or F) If T, requires delivery of the final run, pre-
pellicle die to database defect inspection map for the entire patterned area to be sent to customer.
8.1.639 SHIP_FINAL_PREPELL_DIE_DB_PTN_MAP — (T or F) If T, requires delivery of the final run, pre-
pellicle die to database defect inspection map for the single pattern to be sent to customer.
8.1.640 SHIP_FINAL_PREPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the final run, pre-pellicle
die to die defect inspection map for the entire mask to be sent to customer.
8.1.641 SHIP_FINAL_ROT_POSTPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the final run, post-
pellicle rotated die to die defect inspection map for the entire mask to be sent to customer.
8.1.642 SHIP_FINAL_ROT_PREPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the final run, pre-
pellicle rotated die to die defect inspection map for the entire mask to be sent to customer.
8.1.643 SHIP_FIRST_POSTPELL_DIE_DB_MSK_MAP — (T or F) If T, requires delivery of the first run, post-
pellicle die to database defect inspection map for the entire patterned area to be sent to customer.
8.1.644 SHIP_FIRST_POSTPELL_DIE_DB_PTN_MAP — (T or F) If T, requires delivery of the first run, post-
pellicle die to database defect inspection map for the single pattern to be sent to customer.
SEMI P10-0705 © SEMI 1990, 2005 144
8.1.645 SHIP_FIRST_POSTPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the first run, post-pellicle
die to die defect inspection map for the entire mask to be sent to customer.
8.1.646 SHIP_FIRST_PREPELL_DIE_DB_MSK_MAP — (T or F) If T, requires delivery of the first run, pre-
pellicle die to database defect inspection map for the entire patterned area to be sent to customer.
8.1.647 SHIP_FIRST_PREPELL_DIE_DB_PTN_MAP — (T or F) If T, requires delivery of the first run, pre-
pellicle die to database defect inspection map for the single pattern to be sent to customer.
8.1.648 SHIP_FIRST_PREPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the first run, pre-pellicle
die to die defect inspection map for the entire mask to be sent to customer.
8.1.649 SHIP_FIRST_ROT_POSTPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the first run, post-
pellicle rotated die to die defect inspection map for the entire mask to be sent to customer.
8.1.650 SHIP_FIRST_ROT_PREPELL_DIE_DIE_MAP — (T or F) If T, requires delivery of the first run, pre-
pellicle rotated die to die defect inspection map for the entire mask to be sent to customer.
8.1.651 SHIP_INSP_DATABASE_DATA — (T or F) If T, requires delivery of die-to-database inspection data to
the customer.
8.1.652 SHIP_MANUAL_INSPECTION_FORM — (T or F) If T, requires delivering to the customer a copy of the
manual inspection form.
8.1.653 SHIP_MEASURE_FILE_REGISTR_MAP — (T or F) If T, requires delivering to the customer the
measure file registration map.
8.1.654 SHIP_PHASE_SHIFT_MEASUREMENTS — (T or F) If T, <phase_shift_measurements> must be sent to
the customer.
8.1.655 SHIP_PHASE_SHIFT_REPORT — (T or F) If T, requires delivering to the customer a report of the phase
shift characteristics of the mask.
8.1.656 SHIP_REGISTR_DATA — (T or F) If T, requires delivery of all registration measurements, criteria and
evaluation data to the customer for all registration criteria specified.
8.1.657 SHIP_REPAIR_DATA — (T or F) If T, requires delivery of repair data to the customer.
8.1.658 SHIP_SEM_PHOTOS — (T or F) If T, requires delivery of SEM photos to the customer.
8.1.659 SHIP_SPECIAL_REQUEST — (text) If present, the data field specifies the special request of the
customer.
8.1.660 SHIP_STARLIGHT_MAP — (T or F) If T, requires delivery of a defect map from the Starlight to the
customer.
8.1.661 SHIP_SURF_INSP_GLASS_SIDE_MAP — (T or F) If T, the final, post-pellicle, surface inspection map
of the glass side of the mask must be sent to the customer.
8.1.662 SHIP_SURF_INSP_MEASUREMENTS — (T or F) If T, <surface_insp_measurements> must be sent to
the customer.
8.1.663 SHIP_SURF_INSP_PATTERN_SIDE_MAP — (T or F) If T, the final, post-pellicle, surface inspection
map of the patterned side of the mask must be sent to the customer.
8.1.664 SHIP_SURF_INSP_PELL_TOP_MAP — (T or F) If T, the final, post-pellicle, surface inspection map of
the pellicle on the patterned side of the mask must be sent to the customer.
8.1.665
SHIP_SURF_INSP_PELL_BOTTOM_MAP — (T or F) If T, the final, post-pellicle, surface inspection
map of the pellicle on the glass side of the mask must be sent to the customer.
8.1.666 SHIP_SURF_INSPECTION_MAP — (T or F) If T, the final, post-pellicle, surface inspection map(s) must
be sent to the customer.
8.1.667 SHIP_THRU_PELLICLE_DATA — (T or F) If T, requires delivery of through-pellicle defect inspection
criteria and evaluation data to the customer for all defect criteria specified. This should be final inspection data.
SEMI P10-0705 © SEMI 1990, 2005 145
8.1.668 SHIP_TRAVELER — (T or F) If T, requires delivery of mask traveler document to the customer.
8.1.669 SHIPPING_ADDRESS — Address for delivery of masks.
8.1.670 SHIPPING_CONTACT — Name of person to receive masks.
8.1.671 SHIPPING_EMAIL — Internet address for SHIPPING_CONTACT.
8.1.672 SHIPPING_FAX — Phone number for facsimile machine of SHIPPING_CONTACT.
8.1.673 SHIPPING_PHONE — Phone number for SHIPPING_CONTRACT.
8.1.674 SHIPPING_METHOD — Transportation method for masks, including special arrangements for off-hours
and weekends.
8.1.675 SHIPPING_METHOD_USED — Transportation method used to deliver masks.
8.1.676 SIZING — (n) The amount to increase or decrease the width and height of all geometry within a pattern
while fracturing. (n) is in microns and can be negative, indicating a decrease. Note that (n) results in a “one-sided”
change in feature size.
8.1.677 SIZING_BORDER_RULE — (FIT, INSIDE, OUTSIDE and others on request) Describes methodology for
applying SIZING at the borders of the output file and the effect on the final dimensions of the output file.
8.1.678 SIZING_RULE — (SQUARE, PARAGON, EXTEND, OCTAGON and others on request) Describes
methodology for applying SIZING around corners.
8.1.679 SO_NUMBER — Alphanumeric sales order number.
8.1.680 SOFTWARE_NAME — Name of the software program, not the brand (e.g., MaskRigger or MaskWeaver,
not MaskTools). If, for a given function_purpose, multiple software_program names appear, then they are
alternative software tools to achieve the desired outcome.
8.1.681 SOFTWARE_REVISION — (text, including …“OR HIGHER”) Revision identification, per software
vendor’s nomenclature.
8.1.682 START_BARCODE — (text) name of barcode.
8.1.683 START_BILLING_INFORMATION — (text) name of <billing_information>.
8.1.684 START_CD — Indicates beginning of <cd_group>. Alphanumeric data field identifies the collection to
establish which collections are hierarchically affected by another. The appearance of a <cd_definition> at a lower
level in the hierarchy supercedes the entire <cd_definition> at a higher level in the hierarchy if and only if it has the
same START_CD data field.
8.1.685 START_CD_GROUP_MEASUREMENTS — (text) name of <cd_group_measurements>.
8.1.686 START_CD_ISO_DENSE — (text) name of <cd_iso_dense_definition>.
8.1.687 START_CD_ISO_DENSE_RESULTS — (text) name of <cd_iso_dense_results>.
8.1.688 START_CD_MEASUREMENT — (text) name of <cd_measurement>.
8.1.689 START_CD_SET — Indicates beginning of <cd_set>. Alphanumeric data field identifies the collection to
establish which collections are hierarchically affected by another. The appearance of a <cd_set> at a lower level in
the hierarchy supercedes the entire <cd_set> at a higher level in the hierarchy if and only if it has the same
START_CD data field.
8.1.690 START_CD_SET_RESULTS — (text) name of <cd_set_results>.
8.1.691 START_CD_XY_DEFINITION — (text) name of <cd_xy_definition>.
8.1.692 START_CD_XY_RESULTS — (text) name of <cd_xy_results>.
8.1.693 START_CLOSURE_MEASUREMENTS — (text) name of <closure_measurements>
8.1.694 START_COATING — (text) name of <coating>.
8.1.695 START_DATA_FRACTURE — (text) name of <data_fracture> group.