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SEMI C9.1-93 © SEMI 1993, 2002 2 Concentration Range Relative Uncertainty Standard Concentrations > 1000 ppm 2% Standard Concentrations ≤ 1000 ppm > 100 2% Standard Concentrations ≤ 100 ppm > 10 5% Standard Conc…
SEMI C9.1-93 © SEMI 1993, 2002 1
SEMI C9.1-93 (Reapproved 1102)
GUIDE FOR ANALYSIS OF UNCERTAINTIES IN GRAVIMETRICALLY
PREPARED GAS MIXTURES
This guide was technically approved by the Global Gases Committee and is the direct responsibility of the
North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on July 21, 2002. Initially available at www.semi.org October 2002; to be published November
2002. Originally published in 1993.
1 Purpose
1.1 This document is intended to provide the minimum
criterion for the analysis of uncertainty associated with
preparation and use of gravimetric gas mixtures used
for calibrating analytical instruments to determine
whether various SEMI impurity specification are
satisfied.
2 Scope
2.1 This guideline is intended for preparation of binary
gas mixtures using individual cylinders.
2.2 It is the intent of this document to provide general
guidelines for preparation of calibration gas mixtures in
compliance with ISO 6142, with additional
requirements to meet the needs of the semiconductor
industry.
2.3 This guideline is applicable only to gaseous
components which do not react between themselves or
with the cylinder walls, and to condensable components
which are totally vaporized under the test conditions. It
is not intended for moisture calibration mixtures.
2.4 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Referenced Standards
3.1 ISO Standards
1
ISO 6142 — Gas Analysis; Preparation of calibration
gas mixtures - weighing methods.
Addendum 1 to ISO 6142 - Annex — Precautions to be
taken when weighing, handling and filling cylinders.
4 Weight Traceability
4.1 The weights used to prepare the gas mixtures or
certify the balance should be Class S1-tested at least
1 International Organization for Standardization, ISO Central
Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,
Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30
Website: www.iso.ch
annually with reference standards traceable to the
National Institute of Standards and Technology or to
another national standards organization.
5 Acceptable Mixture Criteria
5.1 Cylinder — Cylinder must comply with National or
International Codes. The type of cylinder used for
containment of the gas mixture may affect the stability
of the mixture. Historical and experimental data should
be requested from the supplier on the stability of similar
mixtures. The cylinder material should be chosen based
on its compatibility with the gas mixture.
5.2 Valve — The recommended valve should be
packless type valve and the constuction materials
selected according to their compatibility with the gas
mixture.
5.3 Homogenous Mixture — The cylinder and its
contents should be at room temperature prior to use.
The cylinder mixture components must be mixed to
insure a homogenous mixture.
5.4 Stability — The gas mixture will have a
demonstrated stability within the acceptable relative
uncertainties given in Section 6 for a period of 1 year.
The minimum useful pressure should be in accordance
with the suppliers recommendations.
5.5 Balance Gas Purity — The balance gas should be
determined to contain less than 1% of the relative
concentration for the minor component.
5.6 Minor Component Purity — The product used for
the minor component addition should be analyzed to
verify its composition.
5.7 Analysis — Confirmation analysis of the
calibration mixture should be performed to determine if
any gross weighing errors occurred.
6 Acceptable Relative Uncertainties
6.1 Using the ISO procedures the acceptable maximum
relative uncertainties for the component of interest are
given below.
SEMI C9.1-93 © SEMI 1993, 2002 2
Concentration Range Relative
Uncertainty
Standard Concentrations > 1000 ppm 2%
Standard Concentrations ≤ 1000 ppm > 100 2%
Standard Concentrations ≤ 100 ppm > 10 5%
Standard Concentrations ≤ 10 ppm ≥ 1 10%
7 Report
7.1 The composition of the mixture should be reported
including the relative uncertainty for a given mixture.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI C14-95 © SEMI 1995, 2002 1
SEMI C14-95 (Reapproved 1102)
TEST METHOD FOR PARTICLE SHEDDING PERFORMANCE OF 25 cm
GAS FILTER CARTRIDGES
This test method was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on August 29, 2002. Initially available at www.semi.org September 2002; to be published
November 2002. Originally published in 1995; previously published in 1996.
1 Purpose
1.1 The purpose of this document is to define a
comprehensive standard test sequence to derive
particle-related qualification data for 25 cm (10 inch)
filter cartridges.
2 Scope
2.1 This test method defines a particle shedding
evaluation method for 25 cm filter cartridges of various
media (e.g., PTFE, PVDF, polycarbonate, nylon, and
polysulfone) commonly used individually or in
assemblies to remove particles from gas lines. The filter
cartridges are separable from the housings which can be
cleaned and tested independently.
2.2 This standard does not purport to address safety
issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Limitations
3.1 These test methods do not apply to point-of-use
(POU) filters, for which separate methods have been
developed.
3.2 Cartridge filter performance cannot be
characterized by a single data point, as conditions of
use (e.g., pressure drop, transient pressure surges)
determine the importance of a particular measurement.
A sequence of tests, designed to measure filter
responses under various conditions, is necessary when
evaluating cartridge filters.
3.3 The order of the test sequence will affect the test
results, and it is designed for fair comparisons of
different aspects of filter operations. Hence, it is
important to follow the prescribed test sequence.
4 Summary of Method
4.1 The test sequence (shown schematically in Figure
1) consists of three steps:
1. Break-in
2. Pulse
3. Final Purge
5 Apparatus and Facility
5.1 Gas Source — Clean, dry nitrogen or dry air with
less than 0.5 ppm moisture and less than 0.5 ppm total
hydrocarbons.
5.2 Particle Detectors — A condensation nucleus
counter (CNC) with a counting efficiency of 50%, as
reported by the manufacturer, at 0.01 µm is
recommended to measure total particle concentration
greater than 0.01 µm.
5.3 Test Environments — A clean room environment is
not required during testing; however, the test
component should be unpacked and assembled in a
Class 100 clean area to prevent ambient contamination.
5.4 Configuration for Break-in Test — The schematic
of the test setup apparatus is shown in Figure 2. All
components used in the test apparatus, including the
flowmeter, valves, tubing, and filter housing, are 2.5 cm
(1 inch) components or have 2.5 cm (1 inch) inlet and
outlet connections. The apparatus consists of (1) a
differential pressure sensor that can accurately measure
∆p in the range 0.01 bar (0.15 psid) to 0.2 bar (3.0 psid)
between the upstream and downstream pressure of the
test component, (2) a flow control system that permits
instantaneous change of flow corresponding to a ∆p of
0.01 bar to 0.2 bar across the filter, and (3) a CNC
downstream of the test filter.
5.5 Configuration for Pulse Test — The schematic of
the test setup is the same as the break-in test.
5.6 Sample Installation — Reasonable precautions
should be taken when installing the test filter or spool
piece to avoid particle contamination of the system
from ambient air. These precautions may include, but
are not limited to, installation in a Class 100 laminar
flow area, installation in a purged glove bag or other
controlled ambient enclosure, use of a purge flow
downstream of the sample point so that all parts of the
system are under purge, isolation, or termination of the
CNC sample flow, and isolation of the isokinetic
sampler exhaust from ambient.
5.7 Sampling System Design — Customary practices
should be employed for the design of the sampling