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SEMI E127-0705 © SEMI 2003, 2005 33 Table 12 IMM Data Table Object Transitions # Previous S tate Trigger Ne w State Actions Comments 1 (no state) A measuremen t data table object is created. IN PROCESS The conversion rec…

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SEMI E127-0705 © SEMI 2003, 2005 32
IMM Data Table
DataValidity: enumeration
EventList: list of text/integer pairs
IMM_ID: text
LotID: text
ProcessFlowStep: text
ProcessToolID: text
ProcessRecipeID: text
RegionRanges: list of RangeDef
Status: enumeration
SubstID: text
SubstIDRead: text
SubstOrientation: float
SubstSide: enumeration
Summary: list of SummaryData
TimeStampFormat: enumerated
TimeStart: variant
TimeComplete: variant
IMM Converted Data
Table
IMM Raw Data Table
MeasurementRecipeID: text ConversionRecipeID: text
FeatureType: enumerated text
RawDataTable: text
Data Table
RowTemplateID: text
0...* 0...*
IMM Calibration Data
Table
CalibrationDuration: integer
CalibrationStatus: enumeration
CalibrationTimeStamp: variant
RefSubstID: text
provides
data for
Figure 9
Data Table Object Hierarchy
14.2 IMM Data Table Object State Model
14.2.1 The IMM Data Table Object has a state model showing when a new instance of data object is created, when
it is finished with the current set of data, and when it has been deleted after all current retention rules have been
satisfied. The diagram of the state model is shown in Figure 10. Table data is available only for complete data rows
(following transitions 2, 3, and 4).
IMM DATA TABLE
1
2
5
3
4
In Process
In
Retention
6
Figure 10
IMM Data Table Object State Model
14.2.2 State Definitions
14.2.2.1 The IMM Data Table Object has two states: IN PROCESS, and IN RETENTION.
14.2.2.1.1 IN PROCESS — An IMM Data Table Object is IN PROCESS as long as more data is to be stored in the
data object.
14.2.2.2 IN RETENTION — This state is active when the IMM Data Table Object is complete and conditions for
ending retention have not been satisfied.
14.2.3 Table 12 shows the transitions for the IMM Data Table Object state model.
SEMI E127-0705 © SEMI 2003, 2005 33
Table 12 IMM Data Table Object Transitions
# Previous State Trigger New State Actions Comments
1 (no state) A measurement data table object is
created.
IN PROCESS The conversion recipe name
must be known at creation of
the object.
2 IN PROCESS All data for one location has been
stored. Note: This is a required
transition for all rows, from the first to
the last.
IN PROCESS Site Measurement
Data is available
for conversion.
All data for the newly
completed row must be
available for an event report.
3 IN PROCESS All data for a specified group of sites
has been stored. Note: If this transition
is supported, it is required for every
such transition, including the last, prior
to transition 4.
IN PROCESS Measurement Data
available for a site
group per recipe
specifications.
Optional transition.
Implementation-specific.
Region should be defined in
the measurement recipe.
4 IN PROCESS Data Table Object complete. Retention
conditions exist.
IN
RETENTION
Monitor conditions
for retention until
satisfied.
Data Table Object may be
required internally or
transferred to tool controller
or remote host. All summary
data for the table shall be
available for a Table
Complete Event report. If the
automatic send feature is
enabled, the table is sent to
the designated client.
5 IN
RETENTION
All client and internal retention
conditions are satisfied and the table is
removed from IMM storage.
(extinction) Event notification
required.
Normal exit.
6 IMM DATA
TABLE
Abnormal conditions cause the Data
Table object to be discarded, or to be
removed from IMM storage due to
Automatic Rollover.
(extinction) Event notification
required.
Table is not available due to
abnormal circumstances,
including forced deletion.
Retention rules have not been
satisfied.
14.3 IMM Data Table Object Attributes
14.3.1 Table 13 defines the attributes of the abstract IMM Data Table Object. Most of the information about the
substrate that is maintained to be able to keep with the data is defined here. When a type of IMM_Data Table
Object is first created, it has no row data, but it does have a RowDataTemplate that it will use.
14.3.2 All three subtypes of the IMM Data Table Object, or the IMM Data Table Object itself, may need additional
implementation-specific attributes for summary data that applies to the substrate rather than to a specific location on
the substrate. This could include totals, averages, mean, standard deviation, and similar calculations. Use of this
type of data is encouraged and in some cases may be important for advanced process control.
14.3.3 GetAttr and SetAttr services may be directed to IMM Data Table objects. In this case, all subtypes of the
IMM Data Table Object may be targets of the service request.
Table 13 IMM Data Table Object Attribute Definitions
Attribute Name Definition Access Reqd Form
DataValidity Qualifies the “goodness”. RO Y Enumerated:
Valid and complete, incomplete, out-
of-spec data.
EventList List of event name/event number pairs. RO Y List of text/integer pairs.
IMM_ID ObjID of IMM object where measured. RO Y Text.
LotID Lot identifier. RO Y Text, shall conform to SEMI E39
restrictions on ObjID.
SEMI E127-0705 © SEMI 2003, 2005 34
Attribute Name Definition Access Reqd Form
ObjID Object ID. RO Y Text string assigned by the IMM.
Shall conform in conformance with
SEMI E39 restrictions on ObjID.
ObjType Type of Object. RO Y Text = “TableIMM_Data”
ProcessFlowStep Identifies exposure-level step in product
fabrication process.
RO Y User-supplied text.
ProcessRecipeID Identifies recipe of previous process. RO Y User-supplied text.
ProcessToolID Name of last process tool or ObjID of last tool
process module.
RO Y Text, shall conform to SEMI E39
restrictions on ObjID.
RegionRanges Identifies first and last row for regions.
Required if regions supported.
RO N Ordered nested list of 0+ structures of
RegionDef.
Empty list if no regions have been
defined.
Status Current state. RO Y Enumerated:
IN PROCESS
IN RETENTION
SubstID Substrate identifier. RO Y Text, shall conform to SEMI E39
restrictions on ObjID.
SubstIDRead Substrate identifier as determined from
Substrate ID reader in IMM.
RO N Required only if the IMM has a
Substrate ID Reader.
SubstOrientation Specifies angle of rotation in radians. RO Y Floating point.
SubstSide Frontside, backside, or both. RO Y Enumerated:
Front
Back
Both
Unknown
Summary Provides summary data for the substrate. RO Y List of 0+ SummaryData structures.
TimeComplete Date/time when row data for the table was
completed.
RO Y Depends on TimeStampFormat.
TimeStart Date/time when row data entry for the table
was started.
RO Y Depends of TimeStampFormat.
TimeStamp
Format
Indicates format of timestamp. RW Y Conforms to SEMI E98 Clock
TimeStampFormat
Enumerated
14.3.4 The attribute EventList identifies all of the errors that may be generated by the IMM Data Table object and
its subtypes. Each such event shall have both a descriptive name and a numeric identifier, each of which shall be
unique within the EventList list.
14.3.5 Elements of Complex Attributes
14.3.5.1 A complex form is either a list, an array, or a structure. A complex attribute is an attribute with a complex
form for its value. An element of a complex attribute is a list element, an array element, or a structure element. For
a complex attribute, its individual elements must be defined separately, because they themselves are not individually
attributes and can not be accessed individually through SEMI E39 Object Services.
14.3.5.2 Elements of complex attributes of the IMM Data Table Object are defined in Table 14.