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SEMI S2-0703a E © SEMI 1991, 2004 10  chemical inventory and hazard analysis (see Section 23);  ionizing radiation assessment (see Section 24);  non-ionizing radiation assessment (see Secti on 25);  laser assessment …

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and supporting information needed to perform the

evaluation.

8.2 General — The evaluating party (see Section 8.4)

should evaluate the equipment according to this

guideline and create a written evaluation report.

NOTE 13: The intent is that the “should” provisions of this

guideline be used as the basis for evaluating conformance.

The intent is also that the “may,” “suggested,” “preferred,”

“recommended,” and “NOTE” provisions of this guideline not

be used for evaluating conformance.

8.2.1 Conformance to specific sections of SEMI S2

may be achieved by instructions included in the

supplier’s equipment installation instructions (reference

SEMI E6) or other documentation.

8.3 Evaluation Report Contents: General — The

evaluation report should include only the manuals

(Section 9.6) and the design-specific sections (Sections

10 through 27). The Appendices should be used in the

evaluation, and referenced in the report, only as they

pertain to the specific application.

8.3.1 For each numbered section, the evaluation report

should state one of the following, and provide

supporting rationale:

 “Conforms” — equipment conforms to the section

or to the intent of the section.

 “Does not Conform” — equipment conforms to

neither the section nor to the intent of the section.

 “N/A” — section is not applicable to equipment.

8.3.1.1 The results of a risk assessment indicating no

significant risk may be used in determining that the

equipment conforms to the intent of a section.

8.3.1.2 The evaluation report should include a

determination per SEMI S10 of the level of risk

associated with nonconformance findings.

8.3.1.3 Supporting rationale may include test data or

documented engineering rationale.

8.4 Evaluation Report Contents: Other Information —

The evaluation report should also include:

 manufacturer’s model number;

 serial number of unit(s) evaluated;

 the date(s) that the equipment was evaluated;

 a system/equipment description including

configuration, options, and essential diagrams; and

 a statement of the qualifications of the evaluating

party. An in-house body, independent laboratory,

or product safety consulting firm (“third party”)

meeting the provisions of SEMI S7 may be used to

supply testing or evaluation of conformance to this

document.

8.5 Supporting Information Provided to Evaluator —

The following documentation should be provided to, or

developed by, the evaluator, as necessary to

demonstrate conformance to the provisions of this

guideline.

NOTE 14: It is recommended that the manufacturer’s typical

configuration and process be used for evaluation purposes.

Alternatively, a process agreed upon between the user and the

supplier may be used.

NOTE 15: Special options or configurations that may pose

additional hazards and are not included in the initial

evaluation may need a separate review. It is recommended

that upgrades, retrofits, and other changes that affect the

safety design of the equipment be evaluated for conformance.

8.5.1 General Information

 Written system description, including hardware

configuration and function(s), power requirements,

power output, and other information necessary to

understand the design and operation of the

equipment.

 Engineering data used to provide the rationale that

the equipment and subassembly seismic

anchorages are designed to satisfy the applicable

design loads (see Section 19, Seismic Protection).

 Descriptions of the purpose and function of safety

devices, such as: emergency off devices (EMOs),

interlocks, pressure relief devices, and limit

controls.

 A hazard analysis (see Section 6.8).

 Ergonomics evaluation (see Section 16).

 A list of safety critical parts and, for each one,

evidence of certification, or documentation

showing that the component is suitable for its

application.

 A residual fire risk assessment as described in

Section 14.2.

 Tests results, certifications, and design

specifications that are necessary to evaluate the

equipment with respect to fire safety. Descriptions

of the fire detection and suppression equipment and

controls should also be provided.

8.5.2 Industrial Hygiene Information

8.5.2.1 An industrial hygiene report, which should

include, as applicable:

 ventilation assessment (see Section 22);

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 chemical inventory and hazard analysis (see

Section 23);

 ionizing radiation assessment (see Section 24);

 non-ionizing radiation assessment (see Section 25);

 laser assessment (see Section 26); and

 audio sound pressure level assessment (see Section

27).

8.5.3 Environmental Information (see Section 21) —

Documentation substantiating the following:

 consideration or inclusion of features that conserve

resources (e.g., energy, water, deionized water,

compressed gases, chemicals, and packaging);

 consideration of features that would promote

equipment and component reuse or refurbishing, or

material recycling upon decommissioning;

 consideration or inclusion of features for resource

recycling or reuse;

 chemical selection methods and criteria (see

Section 21.2.3);

 consideration of integrating effluent and emission

controls into the equipment; and

 efforts to reduce wastes, effluents, emissions, and

by-products.

NOTE 16: For purposes of Section 8.5.3, documentation may

include design notes, metrics (whether normalized or not),

meeting minutes, pareto evaluations, or other analyses.

9 Documents Provided to User

9.1 This section describes the documents that the

supplier provides to the user.

9.2 Evaluation Report — Upon request by the user, the

supplier should provide the user with a summary of the

SEMI S2 evaluation report (see Section 8) or the full

report.

9.2.1 Nonconformances noted in the report should be

addressed by the supplier, by providing either an action

plan or a justification for acceptance. The justification

should include countermeasures in place and a risk

characterization per SEMI S10.

9.3 Seismic Information — Refer to Section 19 of this

document.

9.4 Environmental Documentation — The

manufacturer should provide the user with the

following environmental documentation as applicable:

9.4.1 Energy consumption information, including idle,

average, and peak operating conditions, for the

manufacturer’s most representative (“baseline”)

process.

9.4.2 Mass balance, including idle, average, and peak

operating conditions, for the manufacturer’s most

representative (“baseline”) process.

NOTE 17: The mass balance may include resource

consumption rates, chemical process efficiencies, wastewater

effluent and air emission characterization, solid and hazardous

waste generation (quantity and quality), and by-products.

9.4.3 Information regarding routes of unintended

release (of effluents, wastes, emissions, and by-

products) and methods and devices to monitor and

control such releases. This should include information

on features to monitor, prevent, and control unintended

releases (see Section 21.2.4).

9.4.4 Information regarding routes of intended release

(of effluents, wastes, and emissions) and features to

monitor and control such releases (see Section 21.2.5).

9.4.5 A list of items that become solid waste as a result

of the operation, maintenance, and servicing of the

equipment, and that are constructed of or contain

substances whose disposal might be regulated (e.g.,

berylium-containing parts, vapor lamps, mercury

switches, batteries, contaminated parts, maintenance

wastes).

9.5 Industrial Hygiene Information — Refer to

Sections 22–27 of this document.

9.6 Manuals

9.6.1 The supplier should provide the user with

manuals based on the originally intended use of the

equipment. The manuals should describe the scope and

normal use of the equipment, and provide information

to enable safe facilitization, operation, maintenance,

and service of the equipment.

9.6.2 The manuals should conform to SEMI S13.

NOTE 18: Fire suppression agents, and chemicals used to

test fire detection or suppression systems, fall under the

MSDS provisions of SEMI S13 when they are provided with

the equipment.

NOTE 19: Hazardous energies within fire detection or

suppression systems fall under the hazardous energy control

provisions of SEMI S13 when fire detection or suppression

systems are provided with the equipment.

9.6.3 In addition to the provisions of SEMI S13, the

manuals should include:

 specific written instructions on routine Type 4

tasks, excluding troubleshooting (refer to Section

13.3);

 instructions for energy isolation (“lockout/tagout”)

(refer to Section 17.2);

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 descriptions of the emergency off (EMO) and

interlock functions;

 a list of hazardous materials (e.g., lubricants,

cleaners, coolants) required for maintenance,

ancillary equipment or peripheral operations,

including anticipated change-out frequency,

quantity, and potential for contamination from the

process;

 a list of items that become solid waste as a result of

the operation, maintenance, and servicing of the

equipment, and that are constructed of or contain

substances whose disposal might be regulated (e.g.,

berylium-containing parts, vapor lamps, mercury

switches, batteries, contaminated parts,

maintenance wastes); and

 maintenance and troubleshooting procedures

needed to maintain the effectiveness of safety

design features or devices (i.e., engineering

controls).

9.6.4 Information should be provided regarding

potential routes of unintended releases (see Section

21.2.4).

9.6.5 Recommended decontamination and

decommissioning procedures should be provided in

accordance with SEMI S12, and should include the

following information:

 identity of components and materials of

construction, in sufficient detail to support

recycling, refurbishment, and reuse decisions (see

Section 8.5.3); and

 residual hazardous materials, or parts likely to

become contaminated with hazardous materials,

that may be in the equipment prior to

decommissioning.

NOTE 20: It is recommended that the manual state that

changes to the typical process chemistry or to the equipment

could alter the anticipated environmental impact.

9.6.6 Maintenance Procedures with Potential

Environmental Impacts — The supplier’s

recommended maintenance procedures should:

 identify procedural steps during which releases

might occur, and the nature of the releases; and

 identify waste characteristics and methods to

minimize the volume of effluents, wastes, or

emissions generated during maintenance

procedures.

9.7 Fire Protection Documentation — The equipment

supplier should provide:

 a summary fire protection report as described in

Section 14.3;

 descriptions of optional fire risk mitigation features

(see Section 14.3.2);

NOTE 21: It is recommended that this be provided prior to

purchase.

 fire detection system operations, maintenance, and

test manuals;

 fire suppression system operations, maintenance,

and test manuals;

 acceptance documents provided by licensed

designers and installers (see Sections 14.4.4.12 and

14.4.5.16); and

 a list of any special apparatus needed to test the fire

detection or suppression features of the equipment.

The list should note whether the apparatus is

included with the equipment, or is sold separately.

10 Hazard Warning Labels

10.1 Where it is impractical to eliminate hazards

through design selection or to adequately reduce the

associated risk with safety or warning devices, hazard

warning labels should be provided to identify and warn

against hazards.

10.2 Labels should be durable and suitable for the

environment of the intended use.

10.3 Labels should conform to SEMI S1.

EXCEPTION: Some hazard label formats and content

are dictated by law (e.g., laser labeling and chemical

hazard communication labeling in certain countries of

use) and may not conform to SEMI S1.

11 Safety Interlock Systems

11.1 This section covers safety interlocks and safety

interlock systems.

NOTE 22: If a fire detection or suppression system is

provided with the equipment, see Section 14 for additional

information.

11.2 Where appropriate, equipment should use safety

interlock systems that protect personnel, facilities, and

the community from hazards inherent in the operation

of the equipment.

NOTE 23: Safety critical parts whose primary function is to

protect the equipment (e.g., circuit breakers, fuses) are

typically not considered to be safety interlocks.

11.3 Safety interlock systems should be designed such

that, upon activation of the interlock, the equipment, or

relevant parts of the equipment, is automatically

brought to a safe condition.