semi合集-English.pdf - 第1073页
SEMI E5-1104 © SEMI 1982, 2004 15 Name Format Description Values Where Used CPNAME 20, 3(), 5() Command Paramete r Name S2F41, F42, F49, F50; S4F21, F29; S16F5, F27 CPVAL 10, 11, 20, 21, 3(), 5() Command Parameter Va lue…
SEMI E5-1104 © SEMI 1982, 2004 14
Name Format Description Values Where Used
CEPVAL 0, 10,
11, 20,
21, 3(),
4(), 5()
Command Enhanced
Parameter Value. A specific
application of CEPVAL shall
always be identified with a
specific value of CPNAME.
A CEPVAL has the following
forms: a single (non-list)
value (e.g., CPVAL), a list of
single items of identical
format and type, or a list of
items of the form.
L,2
1. CPNAME
2. CEPVAL
S2F49
CKPNT 54 Checkpoint as defined by the
sending system
S13F3, F6
CMDA 31, 51 Command acknowledge code
0 = Completed or done
1 = Command does not exist
2 = Cannot perform now
>2 = Other equipment-specific
error
3-63 Reserved
S2F22, F28
CMDMAX 3(), 5() Command Maximum
Maximum number of commands to be
allowed in a process program. A
value of zero indicates no
limit. Negative values are
invalid.
S7F22
CNAME 20 Command Name = 16
characters
Text string unique among other
CNAMEs in PCD which describes
the processing done by the
equipment for the corresponding
CCODE.
S7F22
COLCT 5() Column count in die
increments
S12F1, F4
COLHDR 20 Text description of contents
of TBLELT.
1–20 characters
S13F13, F16
COMMACK 10 Establish Communications
Acknowledge Code, 1 byte
0 = Accepted
1 = Denied, Try Again
2-63 Reserved
S1F14
CONDITION 20 Provides condition
information for a subsystem
component.
Used in the data item in the
CONDITIONLIST.
See
CONDITION-
LIST
CONDITIONLIST 0 A list of CONDITION data
sent in a fixed order.
CONDITIONLIST has the
following form:
L,s
1.<CONDITION1>
.
s.<CONDITIONs>
S18F16
CPACK 10 Command Parameter
Acknowledge Code, 1 byte
1 = Parameter Name (CPNAME)
does not exist
2 = Illegal Value specified for
CPVAL
3 = Illegal Format specified
for CPVAL
>3 = Other equipment-specific
error
4-63 Reserved
S2F42
SEMI E5-1104 © SEMI 1982, 2004 15
Name Format Description Values Where Used
CPNAME 20, 3(),
5()
Command Parameter Name
S2F41, F42,
F49, F50;
S4F21, F29;
S16F5, F27
CPVAL 10, 11,
20, 21,
3(), 5()
Command Parameter Value
S2F41, F49;
S4F21, F29;
S16F5, F27;
S18F13
CSAACK 10 Equipment
Acknowledgement code, 1
byte
0 = Everything correct
1 = Busy
2 = Invalid SPID
3 = Invalid data
>3 = Equipment-specific error
4-63 Reserved
S2F8
CTLJOBCMD 51 Control Job command codes
are assigned as follows:
1 = CJStart
2 = CJPause
3 = CJResume
4 = CJCancel
5 = CJDeselect
6 = CJStop
7 = CJAbort
8 = CJHOQ
S16F27
CTLJOBID 20 Identifier for Control Job.
Conforms to OBJID.
S16F27
DATA 20 A vector or string of
unformatted data
S3F29, F31;
S18F6, F7
DATAACK 10 Acknowledge code for data
0 = Acknowledge
1 = Unknown DATAID
2 = At least parameter is
invalid
3–63 Reserved
S14F22
DATAID 20, 3(),
5()
Data ID
S2F33, F35,
F39, F45, F49;
S3F15, F17;
S4F19, F25;
S6F3, F5, F7,
F8, F9, F11,
F13, F16, F18,
F27;
S13F11, F13,
F15;
S14F19, F21,
F23;
S15F27, F29,
F33, F35, F37,
F39, F41, F43,
F45, F47, F49;
S16F1, F3, F5,
F11, F13;
S17F1, F5, F9
DATALENGTH 3(), 5() Total bytes to be sent
S2F39;
S3F15, F29,
F31;
S4F25;
S6F5;
S13F11;
S14F23;
S16F1, F11;
S18F5, F7
SEMI E5-1104 © SEMI 1982, 2004 16
Name Format Description Values Where Used
DATASEG 20 Used to identify the data
requested
S3F29, F31;
S18F5, F7
DATASRC 20 Object type for Data Source
Objects
S14F1, F3, F6,
F7, F8;
S17F1
DATLC 51 Data location
Location of invalid data,
represented in bytes, measured
from the start of the message in
question, excluding all header
bytes.
S12F19
DRACK 10 Define Report Acknowledge
Code, 1 byte
0 = Accept
1 = Denied. Insufficient space
2 = Denied. Invalid format
3 = Denied. At least one RPTID
already defined
4 = Denied. At least VID does
not exist
>4 = Other errors
5-63 Reserved
S2F34
DSID 20, 3(),
5()
Data set ID
S6F3, F8, F9
DSNAME 20 The name of the Data Set
The minimum length is zero. The
maximum is 200 characters.
S13F1, F2, F3,
F4,
S7F37, F39,
F41, F43;
S15F49, F51
DSPER 20 Data sample period. DSPER
has two allowable formats:
Format 1: hhmmss, 6 bytes
Format 2: hhmmsscc, 8 bytes
Where “hh” is hours, “mm” is
minutes, “ss” is seconds’ and
“cc” is centiseconds.
Equipment shall either (1)
support only Format 1, or (2)
support both Format 1 and Format
2. Equipment shall document
which formats it accepts.
Equipment which supports Format
2 need not necessarily support a
minimum DSPER of 1 centisecond,
nor a trace resolution of 1
centisecond, but equipment
suppliers shall document its
trace performance limits.
S2F23
DUTMS 20 Die Units of Measure
Use units description per SEMI
E5 Section 12.
S12F1, F4
DVNAME 3(), 20,
5()
Data value name
S6F3, F8
DVVAL 0, 10,
11, 20,
21, 3(),
4(), 5()
Data value
S6F3, F8, F9