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SEMI G59-94 © SEMI ,1994, 2002 3 11.1.3 Store the multi-ing r edient standard solution an d the calibration solutions in the correct flask s and label with the ion type and concentration. NOT E 5: New Sta ndard solutions…

SEMI G59-94 © SEMI 1994, 2002 2

Table 1 Sensitivity of Ion Chromatograph

Ion Sensitivity(ng/mL)

0.2

0.5

Cation

1.0

0.3

2.0

1.0

Anion

1.0

8.2 Chart Recorder

8.3 Ion Extraction Vessels — Polypropylene or

polytetrafluoroethylene containers with sealing caps.

NOTE 1: The contamination level of these vessels must be

less than one fifth (1/5) of the expected contamination level

on the interleaf of leadframes when measured in a control test.

8.4 Water Bath — 300 mm L × 300 mmW × 200

mmH, filled with DI water, and capable of holding

95°C.

8.5 Constant Temperature and Humidity Chamber

8.6 Volumetric Dispenser — (e.g., Pipettes — 10 mL

and 100 mL capacity).

8.7 Quartz Flasks and Pipettes for Cation Standard

Solutions — 100, 250, 500, and 1000 mL capacity

(flasks); 1, 10, and 25 mL capacity (pipettes).

8.8 Borosilicate Glass Flasks and Pipettes for Anion

Standard Solutions — 100, 250, 500, and 1000 mL

capacity (flasks); 1, 10, and 25 mL capacity (pipettes).

8.9 Chemical Balance, Weighing Chemicals

8.10 Scissors, Tweezers, Spatula

9 Reagents and Materials

9.1 Deionized water, resistivity ≥ 15 megohm

centimeters at 25°C per ASTM D 1193.

9.2 Eluents and regenerants for specific chromatograph

columns prepared per chromatograph equipment

manufacturer’s recommendations so that the water peak

can be separated from the ionic peaks.

9.3 Compounds Required for the Preparation of

Standard Solutions

9.3.1 Cations — NaCl, NH

Cl, KCl.

9.3.2 Anions — NaCl, Na

HPO

•12H

O, NaBr,

NaNO

, K

NOTE 2: All compounds must be reagent grade.

10 Sampling

10.1 Sample Conditioning

10.1.1 In case of measurement of ionic contamination

transferred from the interleaves to the leadframes, select

a stack of ten (10) leadframe strips with their nine (9)

interleaves alternately, from the lot to be tested, and

place them horizontally into a chamber at 85 ± 5°C, 85

± 5% Relative Humidity for 24 hours.

10.2 Sample Selection

10.2.1 Recommended sample size of interleaf used in

interleaf extraction test is 10,000 sq. mm.

10.2.2 In the extraction procedure, do not use the top or

bottom leadframe strips in the stack.

NOTE 3: If a load is used to hold the stack together, it shall

be recorded as part of the conditions of test.

NOTE 4: The leadframe/interleaf contact area shall be

recorded. The vender and customer shall agree on the surface

area of the leadframes.

11 Preparation of Standard Solutions

11.1 Standard Solutions

11.1.1 The single ingredient standard solutions of each

ion (Na

, NH

, K

, Cl

, NO

, Br

, SO

, PO

)are

made by dissolving 1.000 g of each ion into 1.000 liter

of DI water, respectively. The stored multi-ingredient

standard solutions shown in Table 2 are then made from

these single ingredient standard solutions by the

dilution method.

Table 2 Concentration of Standard Solution for

Calibration

Standard Solution for

Calibration(ng/mL)

Ion Mixed Standard

Solution

(µg/mL)

I II III

10 5 10 20

Cation

10 5 10 20

4 10 20 40

10 25 50 100

4 10 20 40

Anion

4 10 20 40

11.1.2 Cation and Anion standard solutions for

calibration are made by diluting the stored multi-

ingredient standard solutions as shown in Table 2.

SEMI G59-94 © SEMI ,1994, 2002 3

11.1.3 Store the multi-ingredient standard solution and

the calibration solutions in the correct flasks and label

with the ion type and concentration.

NOTE 5: New Standard solutions for calibration are required

every 24 hours. Ensure that the flasks are cleaned with water

before refilling with a new solution.

11.2 Calibration

11.2.1 Set up the chromatograph and regenerate the

columns according to the manufacturer’s instructions

(ASTM D 4327 provides further details).

11.2.2 Run the eluent through the chromatograph until

a stable baseline chromatograph is obtained.

11.2.3 Select the injection volume recommended by

the manufacturer for each ion type and inject it into the

chromatograph. Record the chromatograph for each ion

type, and make the calibration curve for each ion (ion

concentration versus peak height or area).

NOTE 6: Peak height or area under the ion’s characteristic

curve is proportional to the concentration.

12 Procedure — Container Extraction Method

NOTE 7: The size of the extraction vessels depends on the

expected volume of water and the leadframes. The vessels

must be at least threequarters filled with water and

leadframes.

NOTE 8: The vessels must be from the same manufacturing

batch.

12.1 Extraction Vessels — Cleaning

12.1.1 Fill three vessels three-quarters of the way full

in order to reduce the amount of air in the vessel and

attach the caps.

12.1.2 Place the vessels in a water bath at > 95°C for

30 ± 2 minutes.

12.1.3 Remove the vessels from the bath and rinse out

five (5) times with DI water.

12.2 Interleaf Contamination Extraction

12.2.1 Place the interleaf sample in one of the cleaned

vessels.

NOTE 9: The interleafing may be cut in order to ease loading

into the vessels.

12.2.2 Add 100 mL of DI water and cap the vessels.

Place a similar amount of water into the other cleaned

vessel and attach the cap.

NOTE 10: 100 mL is the recommended volume of water;

however, the samples must be covered with water.

12.3 Leadframe Contamination Extraction

12.3.1 Place five (5) leadframe strips in one of the

vessels cleaned per Section 12.1.

NOTE 11: The leadframes may be cut as required to ease

entry into the vessel.

12.3.2 Cover with DI water and cap.

NOTE 12: 25 mL is the recommended volume of water for a

small volume of leadframe samples, 100 mL for a large

volume. The samples must be covered with water.

12.3.3 Place a similar volume of water in one of the

vessels cleaned per Section 12.1.

12.4 Extration

12.4.1 Place the three (3) vessels into the water bath at

T ≥ 95°C, for 30 ± 2 minutes.

12.4.2 Remove the vessels from the bath and allow to

cool.

12.4.3 Remove the leadframes and interleafing

material from their respective vessel and recap.

13 Measurements and Calculations

13.1 Chromatograph Preparation and Calibration

13.1.1 Prepare the chromatograph for operation by

regenerating the columns according to the

manufacturer’s recommendations.

13.1.2 Run the eluent through the chromatograph until

a stable baseline calibration is established.

13.2 Testing

13.2.1 Inject the recommended sample size of solution

from the interleaf extraction into the chromatograph

and obtain the chromatogram.

13.2.2 Repeat 13.1 and then inject the recommended

sample size from the leadframe extraction and obtain

the chromatogram.

13.2.3 Repeat 13.1 and then inject the recommended

sample size from the water-only vessel and obtain the

chromatogram of the background sample.

NOTE 13: The time from extraction to insertion of the sample

into the chromatograph shall not exceed eight (8) hours.

13.3 Results

13.3.1 Sample concentrations are determined from the

calibration curves for each ion type.

13.3.2 The surface concentration of ionic contaminants

(SCIC) for each ion type is given by the following

equation:

SCIC ng/cm

()

Sample

Concentration

−

Background

Concentration

÷ ×

Extraction

Volume(mL)

Total Interleaf(or Leadframe) Surface Area(cm

)

14 Report

The report, when used by a vender to certify a user’s

requirement, or by a user at incoming inspection, shall,

at least, contain the following information. Additional

information shall be agreed between user and supplier.

14.1 Vendor’s lot numbers for leadframes and interleaf

material, and date of shipment.

14.2 Sample conditioning conditions.

14.3 Test conditions.

15 Related Documents

15.1 SEMI Specifications

SEMI G52 — Standard Test Method for Measurement

of Ionic Contamination on Semiconductor Leadframes

(Proposed)

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their responsibility.

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