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SEMI E49.7-0304 © SEMI 1995, 2004 4 8.4.1 In instances where dead vol umes are unavoidabl e, the dead leg should be < 3 nomi nal flow path diameters. 8.4.2 Examples of compone nts and practices whic h help minim ize s…
SEMI E49.7-0304 © SEMI 1995, 2004 3
NOTE 2: Use 316L electropolished tubing or PFA tubing for
purge piping. (Use tubing that does not degrade N
2
.)
7.2 Ultrapure Water (Uses include cleaning and
rinsing.)
• Resistivity ≥ 18 mega ohm-cm @ 25° C (77° F)
• TOC — < 20 ppb
• Silica — < 5 ppb
• Particles — < 1 particle/milliliter @ 0.1 µ m size
• Bacteria — < 10 colonies/100 milliliter
• Hot Ultrapure Water Temperature — 80° C
(176° F), minimum
NOTE 3: If testing requirements dictate, access to higher
quality ultrapure water may be appropriate in portions of the
facility. Additional information related to ultrapure water
facility design and terminology may be obtained in SEMI
F61.
7.3 2-Propanol/IPA (Uses include cleaning.)
• 2-Propanol/IPA quality should meet requirements
of SEMI C41, Grade 1
7.4 Clean Dry Air (CDA) or Oil Free Air (Uses include
pneumatic control and air actuation.)
7.4.1 CDA is not recommended for use on cleaned
wetted surfaces. Nitrogen is recommended for drying
cleaned wetted surfaces because the purity level is
clearly defined and controlled.
8 System Design Recommendations
8.1 General Recommendations — The intent of this
section is to recommend design practices that ensure the
quality of the liquid being delivered. These
recommendations should be considered along with
design constraints such as minimizing liquid
consumption, cost, ensuring maintainability, and
limiting complexity. In addition, the appropriateness
and simplicity of the facility interface should be
considered.
8.2 Component Recommendations — Components
should limit system exposure to ionic, metallic, total
organic carbon, and particle contamination.
8.2.1 All applicable components should comply with
SEMI F57.
8.2.2 For components not addressed in SEMI F57, a
discussion of recommended materials (similar to that
found in SEMI F57) may benefit the reader and is
therefore provided.
8.2.2.1 Care should be taken to ensure that the
materials are compatible with the liquid streams for
long term applications. Additionally, it is important
that the materials used be compatible with the
application temperature and/or sanitization methods
such as ozone, UV light and/or hydrogen peroxide.
8.2.2.2 These recommendations often imply the use of
existing materials of choice, such as high purity grades
of perfluoroalkoxy (PFA), polytetrafluoroethylene
(PTFE), and polyvinylidene fluoride (PVDF).
However, unique design specifications or new materials
may result in instances where significant efficiencies
may be achieved while maintaining substantially
equivalent performance. These scenarios could result
in the use of new or existing materials such as
ethylenechlorotrifluoroethylene (ECTFE), polyether-
etherketone (PEEK), polypropylene (PP), acetal resin
(such as Delrin®™
3
, Celcon®™
1
and others),
polyvinyl chloride (PVC), perfluoromethylether-based
perfluoroalkoxy (MFA), etc.
8.2.2.3 Due to purity and traceability issues,
reprocessed or regrind material is not recommended.
8.3 Joining Recommendations — Joining technology
that is free of dead space and entrapment areas is
recommended to reduce negative effects such as
microbial proliferation and impacts to slurry particle
size distribution. For this reason pipe thread
connections are not recommended.
8.3.1 Tubing should be joined with flare fittings, or
similar dead space free technology. Preparation and
joining of fittings should be performed in accordance
with component manufacturer recommendations.
8.3.1.1 Care should be taken to ensure that dissimilar
flare fittings are not joined together. When possible,
one style of fitting should be used throughout the
system. Manufacturers should be consulted prior to
using similar style fittings from different manufacturers
interchangeably.
8.3.2 Pipe should be joined with welds that minimize
dead space and entrapment areas. Preparation and
welding should be performed in accordance with
component manufacturer’s recommendations.
NOTE 4: Users of this guideline are cautioned that suitable
welding methods, such as thermal butt welding, may be
covered by patents or other intellectual property.
8.3.2.1 Glue, solvent, or thermal socket welding of
pipe is not recommended.
8.4 System Volume Recommendations — When
possible, dead volumes should be eliminated and
overall system volume should be minimized to reduce
negative effects on purity as well as flush times.
3 Delrin is a trademark of DuPont; Celcon is a trademark of Hoechst
Celanese.
SEMI E49.7-0304 © SEMI 1995, 2004 4
8.4.1 In instances where dead volumes are
unavoidable, the dead leg should be <
3 nominal flow
path diameters.
8.4.2 Examples of components and practices which
help minimize system volume include:
• Dead-space-free branch valves
• Multi-component integrated assemblies
• Use of direct flow paths
• Trickle bypass valves
• Sampling valves
8.5 Flow Recommendations — Due to issues related to
equipment complexity and the cost of excessive liquid
consumption, general flow recommendations for
ultrapure water and liquid chemical delivery systems
are not provided. However, Related Information 1
provides a list of practices that tend to reduce microbial
proliferation in ultrapure water Systems. Because not
all liquid chemicals are subject to these effects, the user
is advised to obtain additional flow information related
to ensuring the quality of liquid chemicals from the
liquid chemical manufacturer.
8.6 Slurry System Recommendations — In addition to
the other design recommendations within this section,
the following recommendations are provided
specifically for slurry liquid delivery systems used
within CMP process equipment.
8.6.1 Areas of high shear can damage the quality of
many slurries resulting in large particle count (LPC)
growth. Sharp edges projecting into flow path, large
pressure drops, tight bends, and sudden large reductions
in tubing size can cause high shear.
8.6.2 Dead legs are of particular importance with
respect to slurries because the abrasives may settle and
agglomerate, creating LPC growth. To help minimize
this issue branch lines should be oriented such that they
project vertically above the main line to prevent the
abrasive from settling and agglomerating.
8.6.3 If point of use filtration is incorporated,
provisions to sample the slurry before and after the
filter should be provided for LPC monitoring.
8.7 Protection and Sampling Recommendations
These recommendations are intended to protect liquids
from back flow or cross contamination and to ensure
that sampling is adequate for evaluating liquid quality
throughout system.
8.7.1 Backflow/back pressure and cross contamination
protection should be included in the system.
8.7.2 The system should have provisions to accomplish
sampling. Sampling ports should be located as close as
possible to the liquid supply point, to bath/tank or
process chamber, and to the return header immediately
before exit.
8.7.3 Provisions to completely flush, drain, and sanitize
the liquid system completely (with ultrapure water or 2-
propanol/IPA for example) should be included in the
system.
8.8 Filtration Recommendations These
recommendations are intended to reduce negative
effects such as particle contamination, metallic
contamination, and micro bubbles.
8.8.1 Filters should be considered for all liquid
delivery systems. Location, selection, installation, start
up, and rinse of filters should be based on input from
customer, chemical manufacturer and equipment
manufacturer.
8.8.2 Process stream isolation should be provided for
all filters to allow for maintenance and replacement.
8.9 Labeling Recommendations — In addition to the
recommendations in Section 10.7, functional
labels/schematics should be included with assembly for
vents, drains, and other components as necessary to
ensure the proper operation of the system(s).
8.10 Maintainability Recommendations
8.10.1 Components that require operation, inspection,
or maintenance (i.e., valves, filters, pumps, gauges,
etc.) should be located where readily accessible.
8.10.2 Provide support on each side of components,
such as valves, where operation or assembly transmits
torque to the piping/tubing.
8.10.3 Design should allow for thermal expansion if
system operates at an elevated temperature.
9 Pre-Production Acceptance and Inspection
Recommendations
9.1 Identification Recommendations
9.1.1 Applicable components should meet the
traceability requirements found in SEMI F57. Where
practical, the traceability requirements of SEMI F57
should also be followed for components not covered
within SEMI F57 and assemblies, to ensure traceability
is provided from the resin source. Component and
assembly identification should provide nondestructive
post installation traceability. In addition, packaging
should have labels allowing for traceability as described
above that are clearly visible (without the need to open
the package).
SEMI E49.7-0304 © SEMI 1995, 2004 5
NOTE 5: Practical limitations such as component size may
not allow for permanent post installation marking of every
component.
9.2 Packaging Recommendations
9.2.1 Applicable components should meet the
packaging requirements found in SEMI F57. Where
practical, the packaging requirements of SEMI F57
should also be followed for other components and
assemblies to avoid contamination of wetted surfaces.
9.3 Documentation
9.3.1 The equipment supplier should be responsible for
maintaining and supplying, upon request,
documentation that proves their assemblies meet the
user' s performance requirements. Similar requirements
for maintaining component documentation are covered
in SEMI F57 and are the responsibility of the
component manufacturer.
9.4 Receiving, Inspection, and Storage
9.4.1 All incoming components and assemblies should
be segregated until they have been formally accepted
through a documented procedure.
9.4.1.1 Cartons should be checked visually for damage
(e.g., torn bags, inadequate padding causing damage).
9.4.1.2 A statistically significant sample size should
undergo minimum QA checks such as visual inspection
and critical dimension inspection. In some instances
further inspection of components to ensure compliance
with SEMI F57 may be required.
9.4.1.3 Components and assemblies should be stored in
original packaging until ready for inspection.
Inspection involving opening sealed plastic bags should
be conducted within the staging prefab cleanroom.
After inspection, heat-seal the component (and if
appropriate the assembly) into a clean and dry
polyethylene bag.
9.4.2 Any component or assembly failing initial
inspection should be immediately “red tagged” and set
aside in a “quarantine” area until the supplier of the
component is notified and disposition is determined.
9.4.3 Components and assemblies should be accepted
only after these incoming QA checks are completed.
9.4.4 Accepted component and assemblies should have
traceability to the appropriate incoming QA check.
9.4.5 Components and assemblies should be stored in
the original shipping containers when possible. Pipe
may be stored on racks with appropriate supports.
9.5 Staging
9.5.1 Prior to entry into the cleanroom components and
assemblies should have the outer bag removed and the
inner bag wiped down with cleanroom wipes using 2-
propanol/IPA or 2-propanol/IPA and ultrapure water
mix in the staging area.
10 Assembly Recommendations
10.1 General
10.1.1 Assembly should take place in
assembly/cleanroom (see Section 6.5).
10.1.2 Inner bags should be removed within the
assembly/cleanroom.
NOTE 6: In the event components must be handled outside
cleanroom areas, personnel should wear protective gloves at
all times and components returning to the cleanroom should
be clean. All ends should be capped to avoid exposure of
wetted surfaces.
10.1.3 If work must stop for an extended period,
assemblies should be purged with nitrogen and capped
immediately to isolate wetted materials from
contamination.
10.2 Pipe/Tube Cutting
10.2.1 Use dedicated clean tools for piping/tubing
system fabrication and installation. Clean tools at the
start of each shift with 2-propanol/IPA, rinse with
ultrapure water, and blow dry with nitrogen. Maintain
tools in accordance with manufacturers’
recommendations.
10.2.2 Cut piping/tubing in accordance with
manufacturers recommendations. Saws are prohibited.
10.2.3 The cut end of the pipe/tube should be finished
before use to comply with the manufacturers’
recommendations for squareness and finish. Cut
surfaces should be clean and free of loose particles and
debris.
10.3 Component and Assembly Cleaning
10.3.1 What follows are limited and general
recommendations for cleaning components or
assemblies. It is the equipment manufacturer’s
responsibility to ensure that cleaning procedures and
solutions are adequate and do not impact equipment
performance.
10.3.1.1 Every effort should be made to keep the
interior of the pipe clean during cutting and prepping.
If, however, the pipe has become contaminated and
nitrogen (Section 7.1) will not dislodge the particles it
can be cleaned by blowing an ultrapure water soaked
swab (often called a “pig”) through it using nitrogen
(see Section 7.1). The pig should be constructed of a