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SEMI E30-1103 © SEMI 1992, 2003 21 related to the equipment state models allows the h ost to track the equipment state. An equipm ent’s behavior is related to its current state. Thus, th is capability helps the host unde…

SEMI E30-1103 © SEMI 1992, 2003

4.1.5.3 Simultaneous Attempts to Establish Communications — For equipment that supports interleaving, it is

possible that either the host or equipment could send an Establish Communications Request before receiving the

request from its partner. As communications are established by the successful acceptance of any one Establish

Communications Request, it is immaterial who sends the request first. The roles of host and equipment may be

reversed.

Equipment Receives S1,F14 From Host Before Sending S1,F14:

COMMENT HOST EQUIPMENT COMMENT

Communications State = NOT COMMUNICATING

<--S1,F13 Establish Communications Request

Establish Communications S1,F13-->

Request

Reply COMMACK = Accept S1,F14--> S1,F14 received from Host and

Communications established

and

Communications state =

COMMUNICATING

<--S1,F14 Reply COMMACK = Accept

Equipment Sends S1,F14 To Host Before Receiving S1,F14:

COMMENT HOST EQUIPMENT COMMENT

Communications State = NOT COMMUNICATING

<--S1,F13 Establish Communications Request

Establish Communications S1,F13-->

Request

<--S1,F14 Reply COMMACK = Accept

Communications established

and

Communications state =

COMMUNICATING

Reply COMMACK = Accept S1,F14--> S1,F14 received from Host

15 Communications are establisted at the successful completion of the S1,F13/14 transaction where COMMACK is set to zero.

16 Communications are established on the successful transmission of S1,F14, even if there is an open S1,F13.

4.2 Data Collection — Data collection allows the host

to monitor equipment activity via event reporting, trace

data reporting, limits monitoring, and query of selected

status or other variable data.

4.2.1 Event Data Collection — Event data collection

provides a dynamic and flexible method for the user to

tailor the equipment to meet individual needs with

respect to data representation and presentation to the

host. The event-based approach to data collection

provides automatic notification to the host of

equipment activities and is useful in monitoring the

equipment and in maintaining synchronization with the

equipment.

Event data collection may be broken into two logical

parts: host notification when an event occurs and

dynamic configuration of the data attached to the event

notification.

4.2.1.1 Event Notification — This section describes the

method of notifying the host when equipment

collection events occur.

4.2.1.1.1 Purpose — This capability provides data to

the host at specified points in equipment operation.

This asynchronous reporting eliminates the need for the

host to poll the equipment for this information. Events

on the equipment may trigger activity on the part of the

host. Also, knowledge of the occurrence of events

SEMI E30-1103 © SEMI 1992, 2003

related to the equipment state models allows the host to

track the equipment state. An equipment’s behavior is

related to its current state. Thus, this capability helps

the host understand how an equipment will behave and

how it will react to host behavior.

4.2.1.1.2 Definitions

Collection Event — An event (or grouping of related

events) on the equipment that is considered significant

to the host.

Collection Event ID (CEID) — A unique identifier of a

collection event. See the SEMI E5 Standard for a full

definition of this data item.

Event — A detectable occurrence significant to the

equipment.

Report — A set of variables predefined by the

equipment or defined by the host via S2,F33/F34.

4.2.1.1.3 Detailed Description — The equipment

supplier must provide a set of predefined collection

events. Specific collection events are required by

individual capabilities and state models. Examples of

collection events include:

— The completion of each action initiated by a host

requested command,

— Selected processing and material handling activities,

— Operator action detected by the equipment,

— A state transition,

— The setting or clearing of an alarm condition on the

equipment, and

— Exception conditions not considered alarms.

See Section 6 for a list of required collection events.

The reporting of a collection event may be disabled per

event by the user to eliminate unwanted messages. An

event report message shall be sent to the host upon the

occurrence of a particular collection event if the

collection event (CEID) has been enabled. Attached to

each event message is one or more event reports which

contain variable data. Section 4.2.1.2 describes the

capability which allows for the dynamic customization

of event reports. The values of any data contained in an

event report message must be current upon the

occurrence of the event. This implies that event reports

be built at the time of the event occurrence.

The equipment shall also provide the S6,F15/F16

transaction to allow the host to request the data from a

specific event report.

4.2.1.1.4 Requirements

— The equipment supplier shall provide

documentation of all collection events defined on

the equipment and the conditions for each event to

occur.

— The equipment supplier shall provide unique CEIDs

for each of the various collection events that are

available for reporting.

— The equipment supplier shall provide a method for

enabling and disabling the reporting of each event.

This method shall either be available via the host

interface (see Section 4.2.1.2) or the equipment’s

operator console.

— For each event, the equipment supplier shall provide

either

• a default set of report(s) linked to the event

which contain data pertinent to that event, or

• the ability for the user to configure the data

linked to that event via the equipment’s

operator console or host interface (see Section

4.2.1.2).

4.2.1.1.5 Scenarios

Collection Event Occurs on the Equipment:

COMMENT HOST EQUIPMENT COMMENT

[IF] Event Report is Multi-block

<--S6,F5 [THEN] send Multi-block inquire

Multi-block grant S6,F6-->

[ENDIF]

<--S6,F11 Equipment sends Event Report

Host acknowledges Event Report S6,F12-->

SEMI E30-1103 © SEMI 1992, 2003

Host Requests Event Report:

COMMENT HOST EQUIPMENT COMMENTS

Host requests an event report S6,F15-->

<--S6,F16 Equipment sends event report.

4.2.1.2 Dynamic Event Report Configuration — This

section describes a capability which allows the host to

dynamically modify the equipment event reporting

setup.

4.2.1.2.1 Purpose — This capability is defined to

provide the data reporting flexibility required in some

manufacturing environments. It allows the host to

increase or decrease the data flow according to need.

For example, if the performance of an equipment

degrades, the data flow from that equipment may be

increased to help diagnose the problem.

4.2.1.2.2 Definitions

EventsEnabled — A variable data item that consists of

a list of currently enabled collection events (CEIDs).

See SEMI E5 for a full definition of this variable data

item.

Report ID (RPTID) — A unique identifier of a specific

report. See SEMI E5 for a full definition of this data

item.

Variable Data (V) — A data item containing status

(SV), data (DVVAL), or constant (ECV) values. See

SEMI E5 for a full definition of this data item.

Variable Data ID (VID) — A unique identifier of a

variable data item. The set of VID’s is the union of all

SVID’s, ECID’s, and ID’s for DVVAL’s

(DVNAME’s). See SEMI E5 for a full definition of this

data item.

4.2.1.2.3 Detailed Description — The equipment shall

support the following event report configuration

functionality through the SECS-II interface:

— Host definition/deletion of custom reports,

— Host linking/unlinking of defined reports to

specified collection events, and

— Host enabling/disabling the reporting of specified

collection events.

NOTE 4: The equipment may also supply alternative means

for defining reports and linking reports to events (e.g., via the

operator console). Implementation of alternate means is not

required.

The equipment can be instructed by the host to enable

or disable reporting of collection events on an

individual or collective basis. A status value (SV) shall

be available that consists of a list of enabled collection

events. (See Section 5.2, Variable Item List,

EventsEnabled variable.)

Reports may be attached to an event report message

(S6,F11). These reports are specifically linked to the

desired event and typically contain variable data

relating to that event. The reports may be provided by

the equipment supplier or created by the user. The user

must be able to create reports and link them to events

via the SECS-II interface.

The data reported in the event report messages may

consist of Status Values (SV’s), Equipment Constant

Values (ECV’s), or Data Values (DVVAL’s). Note that

data values shall be valid and current on certain events

and certain states and might not be current at other

times. The implementor shall document when a data

value will be current and available for reporting.

4.2.1.2.4 Requirements

— The equipment manufacturer must provide

documentation of all variable data available from

the equipment. This is to include variable name,

variable type or class (SV, ECV, DVVAL), units,

format codes, possible range of values, and a

description of the meaning and use of this variable.

— The equipment manufacturer must provide unique

VIDs for the various variable data (V) available for

data collection in the equipment. For example, this

means that no SV shall have a VID which is the

same as the VID of any ECV or DVVAL.

— All variable data must be available for report

definition and event data collection. See Section

5.2, Variable Item List, for a list of required

variable data.

— All report definitions, report-to-event links, and

enable/disable status of event reports must be

retained in non-volatile storage.