semi合集-English.pdf - 第4211页

SEMI F73-1102 © SEMI 2002 13 1 5 6 7 10 11 12 13 9 8 2 B D C E F H G J I K L M N O P Q S R T U 3 4 14 A 15 16 Figure A2-5 Pits Left by Inclusion Stringers in Which the Inclusi ons Have Been Electropo lished Out; Also Num…

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Figure A2-4
Large Inclusion is Counted in Grids J7, K7, I8, J8 and K8. Pits in A8, C7 and C8 (Same Pit on Grid
Boundary), E9, F8, J9, I12, I15.
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Figure A2-5
Pits Left by Inclusion Stringers in Which the Inclusions Have Been Electropolished Out; Also Numerous
Discrete Pits. All Pits with Edges Distinct Enough to Image with a “White Halo” Effect are Countable. This
Includes All of the Pits Associated with the Upper Stringer, and Those in the Lower Stringer in Grids M7N7,
O6 and O7, P6, Q6, R5 and R6. Also G1, Q1, A4, G5, L5, G7, N9, R9, G10, H12, Q12, E13, J13, N14, O14.
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Figure A2-6
Long, Partially Continuous Stringer; the Inclusion that Formed this Stringer has been Electropolished Out.
All Grids Occupied by the Stringer Should be Counted, from F16 to S2. Also Pits at M2, N1 and O1.