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SEMI E82-0705 © SEMI 1999, 2005 2 3.2.1.4 Au tomated Guided Transport (AGT) — A ground-b ased transport system with automated gu idance (i.e., no rail guidance). Automated guidan ce system allows vehicles to access SEMI …
SEMI E82-0705 © SEMI 1999, 2005 1
SEMI E82-0705
SPECIFICATION FOR INTERBAY/INTRABAY AMHS SEM (IBSEM)
This specification was technically approved by the global Information & Control Committee. This edition
was approved for publication by the global Audits and Reviews Subcommittee on April 7, 2005. It was
available at www.semi.org June 2005 and on CD-ROM in July 2005. Originally published September 1999;
previously published November 2004.
1 Purpose
1.1 This standard establishes a Specific Equipment Model (SEM) for interbay and intrabay AMHS transport
equipment (IBSEM). The model consists of equipment characteristics and behaviors that are to be implemented in
addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this standard
is to facilitate the integration of IBSEM equipment into an automated (e.g., semiconductor fabrication and flat panel
display) factory. This document accomplishes this by defining an operational model for IBSEM equipment as
viewed by a factory automation controller (Host). This definition provides a standard host interface and equipment
operational behavior (e.g., control, state models, data reports, and reporting levels). Several topics require additional
activity that are within the scope of this standard: traffic management characteristics (queuing), parallel interface for
carrier transfer (SEMI E23), transport system controller architecture, and delivery of the transfer unit.
2 Scope
2.1 The scope of this standard is limited to the usage and description of interbay and intrabay AMHS transport
equipment (OHT, OHS, RGT, AGT, DWC) as perceived by a SEMI Equipment Communications Standard 2
(SECS-II) host that complies with the GEM model (as specified in §13). It defines the view of the equipment
through the SECS communication link. It does not define the internal operation of the equipment. It includes a
specific transfer command state model and transport system controller state model as the basis for all equipment of
this class.
2.2 This document assumes that the GEM fundamental requirements and selected additional capabilities (as
specified in §13) have been implemented on the IBSEM equipment. It expands the GEM standard requirements and
capabilities in the areas of state models (TSC, transfer command, vehicle and carrier state models), collection
events, alarm documentation, remote commands, data item variables, and material movement.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Limitations
3.1 Evaluation of SEMI E32 (MMM)
3.1.1 The concepts defined in SEMI E32 were analyzed and included where applicable to the IBSEM, but the GEM
model was used as the basis for IBSEM requirements definition.
3.2 Interbay and Intrabay AMHS Transport Equipment Types
3.2.1 This standard is targeted at the different types of 300 mm and interbay and intrabay AMHS transport
equipment. The term IBSEM equipment refers to all types of transport equipment. The equipment types have
fundamental mechanical differences:
3.2.1.1 Overhead Hoist Transport (OHT) — An overhead rail guided transport system positioned for vertical access
to SEMI E15.1 compliant ports.
3.2.1.2 Over Head Shuttle (OHS) — An overhead rail guided transport system (monorail) positioned for access to
stocker automated interbay input and output ports. The OHS vehicle may or may not contain a transfer agent.
3.2.1.3 Rail Guided Transport (RGT) — A ground-based rail guided transport system positioned for access to SEMI
E15.1 compliant ports.
SEMI E82-0705 © SEMI 1999, 2005 2
3.2.1.4 Automated Guided Transport (AGT) — A ground-based transport system with automated guidance (i.e., no
rail guidance). Automated guidance system allows vehicles to access SEMI E15.1 compliant ports.
3.2.1.5 Direct WIP Conveyer (DWC) — An overhead transport system, based on direct WIP roller conveyers. No
vehicles are used for point to point delivery. The conveyers are positioned for vertical access to SEMI E15.1 ports.
3.2.2 Transport vehicles may contain zero or more internal buffers for carrier transport. If mechanically feasible,
the transport system may acquire or deposit carriers simultaneously. If transported in a safe manner, carrier
transport may occur while occupying the acquire/deposit transfer port(s) of the transport vehicle (e.g., a single
position hoist vehicle). In the context of this standard, a “vehicle” on a DWC is defined as a single carrier in the
transport system.
3.3 Physical Layout Limitations
3.3.1 The equipment controlled by a single TSC must allow for a carrier to be transported from any given source
port to any destination port via a single transfer command without the assistance of an external device (manual or
automated). In other words, if a source port and a destination port are controlled by a TSC, there must not exist a
physical or logical barrier that prevents a carrier from being moved between the two ports. This assumes that the
type of carrier (FOUP, Reticle Pod, etc.) is permitted at the source and destination ports.
4 Referenced Standards
4.1 SEMI Standards
SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E23 — Specification for Cassette Transfer Parallel I/O Interface
SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)
SEMI E32 — Material Movement Management (MMM)
SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
4.2 Other References
Harel, D., “Statecharts: A Visual Formalism for Complex Systems,” Science of Computer Programming 8 (1987)
231-274.
1
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations and Acronyms
5.1.1 AGT — Automated Guided Transport
5.1.2 AMHS — Automated Material Handling System
5.1.3 DWC — Direct WIP Conveyor
5.1.4 FOUP — Front Opening Unified Pod
5.1.5 GEM — Generic Equipment Model
5.1.6 ITS — Interbay or Intrabay Transport System
5.1.7 OHS — Over Head Shuttle
5.1.8 OHT — Overhead Hoist Transport
1 Elsevier Science, P.O. Box 945, New York, NY 10159-0945, http://www.elsevier.nl/homepage/browse.htt
SEMI E82-0705 © SEMI 1999, 2005 3
5.1.9 PGV — Person Guided Vehicle
5.1.10 RGT — Rail Guided Transport
5.1.11 TCP/IP — Transmission Communication Protocol/ Internet Protocol
5.1.12 TSC — Transport System Controller
5.2 Definitions
5.2.1 active vehicle — a vehicle in the transport system that contains a robot or other transfer agent for providing
the acquiring (loading) and depositing (unloading) actions.
5.2.2 buffer — a set of one or more locations for holding carriers at the production equipment.
5.2.3 carrier — a container with one or more fixed positions for holding substrates. Examples of carriers include
FOUPs and open cassettes.
5.2.4 FOUP — a closed carrier for holding wafers.
5.2.5 host — the factory computer system, or an intermediate system, that represents the factory and the user to the
equipment. Refers to the system that controls or supervises the Transport System Controller (TSC) throughout this
document.
5.2.6 internal buffer — locations within the equipment to store carriers. These locations exclude load ports.
5.2.7 internal transfer port — a specific type of transfer port, which is internal to a single TSC domain. As an
example, this location may be used to transfer carriers among different vehicles in a single TSC domain.
5.2.8 load port — the interface location on the equipment where carriers are delivered.
5.2.9 open cassette — an open structure that holds one or more wafers.
5.2.10 passive vehicle — a vehicle in the transport system that does not contain a robot or other transfer agent for
providing the acquiring (loading) and depositing (unloading) actions. The vehicle simply contains a position(s) to
carry the transfer unit. The loading and unloading action must be accomplished at the load or unload port by a
different system (e.g., stocker port robot).
5.2.11 process equipment — equipment used to make semiconductor devices. This excludes metrology and
material handling equipment.
5.2.12 production equipment — equipment used to produce semiconductor devices, including wafer sorting,
process, and metrology equipment and excluding material handling equipment.
5.2.13 transfer port — point on the transport system at which a change of equipment ownership of the carrier
occurs. See also internal transfer port.
5.2.14 transfer unit — the element of movement (assemblage of carriers) of the ITS that consists of a maximum
number of carriers allowed in a specific transfer command:
AA is the maximum number of carriers allowed for acquire at the transfer source.
BB is the maximum number of carriers allowed for deposit at the transfer destination.
CC is the maximum number of carriers allowed for transfer in one transport vehicle.
The maximum size of the transfer unit is the minimum of AA, BB, and CC.
5.2.15 Transport System — a transport system dedicated to one or more bays in the factory and responsible for
transferring carriers to production equipment, from production equipment, from production equipment to production
equipment or from stocker to stocker. TS consists of the physical units of the system (e.g., vehicles, nodes, docking
stations), the low-level unit controllers, and a system-level controller. TS excludes factory floor storage systems
(stockers), but includes any short-term storage integral to the system, such as storage locations within an overhead
track system that are accessible only to units of the particular TS.
5.2.16 Transport System Controller — interbay or intrabay Transport System Controller that communicates with
the Factory Host and represents the system as the equipment.