semi合集-English.pdf - 第4488页
SEMI D18-0299 E © SEMI 19 99, 2001 9 Figure 2 Cassette Side Do mains
SEMI D18-0299
E
© SEMI 1999, 2001 8
Figure 1
Isometric Views
SEMI D18-0299
E
© SEMI 1999, 20019
Figure 2
Cassette Side Domains
SEMI D18-0299
E
© SEMI 1999, 2001 10
Figure 3
Cassette Bottom Domain