semi合集-English.pdf - 第811页

SEMI E111-0305 © SEMI 2001, 2005 8       Figure 7 Section A-A: Door Only Top View of RSP1 50    Figure 8 Section C-C: Door Only Side View of RSP150

100%1 / 7923
SEMI E111-0305 © SEMI 2001, 2005 7
d63 =
35 + 0.9 / -0.1
Figure 5
Detail B: Top Robotic Handling Flange Hole Feature
1.5
Figure 6
Detail C: Reticle Seating and Capture Detail
SEMI E111-0305 © SEMI 2001, 2005 8
Figure 7
Section A-A: Door Only Top View of RSP150
Figure 8
Section C-C: Door Only Side View of RSP150
SEMI E111-0305 © SEMI 2001, 2005 9
Figure 9
Section B-B: Door Only Top View of RSP150 with Reticle Contact Surfaces
Figure 10
Detail D: Reticle Contact Surface