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SEMI E109-0305 © SEMI 2001, 2005 61 Variable Name Descripti on Type Access Comment Reject Reason The reason a reticle is rejected. Enumerated: ID Verification failedParticle qualifi cation failed Rejected By Host Rejecte…

SEMI E109-0305 © SEMI 2001, 2005 60

Variable Name Description Type Access Comment

PortAssociationState

The association state of the i

load port.

Enumerated:

ASSOCIATED,

NOT ASSOCIATED

PortAssociationState-

List

The current association state

for all load ports.

A list of n items

1. PortAssociationState

n. PortAssociationState

RO This can be used to re-

synchronize the host.

PortID ID of a load port. Positive integer RO

PortID

ID of the load port where the

pod transfer is taking place.

One PortID exists for each

load port.

Positive integer RO

PortStateInfo The PortAssociationState

combined with the

PortTransferState.

List of 2 items

PortAssociationState

PortTransferState

RO A combination of both port

states.

PortStateInfo

The PortAssociationState

combined with the

PortTransferState for the i

load port.

List of 2 items

PortAssociationState

PortTransferState

RO A combination of both port

states.

PortStateInfoList List of PortStateInfo for all

load ports.

List of n items

1. PortStateInfo

n PortStateInfo

RO A list of all the port states for

all the ports.

PortTransferState The current transfer state of a

load port.

Enumerated:

OUT OF SERVICE,

TRANSFER BLOCKED,

READY TO LOAD, READY

TO UNLOAD

RO Super states are not included,

only sub states.

PortTransferState

The current transfer state of

the i

load port.

Enumerated:

OUT OF SERVICE,

TRANSFER BLOCKED,

READY TO LOAD, READY

TO UNLOAD

RO Super states are not included,

only sub states.

PortTransferStateList The current Load Port

Transfer State for all load

ports.

A list of n items

1. PortTransferState

n. PortTransferState

RO This can be used to re-

synchronize the host.

Reason The reason for transition 15,

SLOT MAP NOT READ to

WAITING FOR HOST.

Enumerated:

VERIFICATION NEEDED,

VERIFICATION BY

EQUIPMENT

UNSUCCESSFUL,

READ FAIL,

IMPROPER WAFER

POSITION

RO Information to aid host in

deciding appropriate action.

SEMI E109-0305 © SEMI 2001, 2005 61

Variable Name Description Type Access Comment

Reject Reason The reason a reticle is

rejected.

Enumerated:

ID Verification

failedParticle qualification

failed

Rejected By Host

Rejected By Operator

Inspection Results Expired

RO Information to aid the host in

understanding why a reticle is

rejected.

These are defined in the Alarm Information table.

For all the variables defined as lists of port information (such as states), the port information should be placed in the list in numerical order by

PortID, from lowest to highest.

22 Alarms

22.1 This section includes specific alarms that are required to be implemented by RPMS compliant equipment.

22.2 Alarm List Table

22.2.1 Table 57 is a listing of required alarms for both fixed buffer and internal buffer equipment. This list is only a

subset of the pod transfer alarms. There may be more pod transfer related alarms that are not listed here.

Table 57 Alarm List

Equipment Danger Affected

Configuration Alarm Text Potential Imminent Operator Equipment Material

Fixed & Internal

Pod Buffer

Equipment

PIO Failure X X X X

Access Mode Violation X X X X

Attempt To Use Out Of Service Load Port X X X

Pod Placement Error X X X X

Pod Open/Close Failure X X X

Fixed and Internal

Pod Buffer

Equipment

Duplicate PodID X X

Fixed & Internal

Pod Buffer

Equipment

Pod Removal Error X X X X

Duplicate Reticle

A duplicate reticle is detected. X X

Pod Pick/Place

error

The internal robot that moves the Pods failed

to pick or place a pod. Can be triggered if the

state of the system after a pick or place is

inconsistent (i.e., both robot and pod think

they are empty).

X X X

Reticle Pick/Place

error

The internal robot that moves the reticles

failed to pick or place a reticle. Can be

triggered if the state of the system after a pick

or place is inconsistent (i.e. both robot and

pod think they are empty).

X X X

Automation Error Automation errors that do not fit other

categories have been detected.

X X X X

22.3 Alarm Usage

22.3.1 Reticle and Pod Management requires standardization on the alarm codes. Many errors may be mapped to a

sinlge “generic” alarm code. In this case, the recovery scenario would be the same but the alarm text shall contain a

more descriptive explanation of the error. For example, the Pod Open/Close alarm can be caused by many different

opener errors.

22.3.2 This alarm applies to both Fixed and Internal Pod Buffer Equipment.

22.3.3 For any load port Alarm condition, process equipment should not stop processing current jobs.

Table 58 Alarm Information

Alarm Description Alarm

Number

Auto

Clear

Set trigger Clear Trigger

PIO Failure 1 NO E84 error. Manual intervention

Access Mode Violation

(unexpected load)

2 NO Operator places pod on load port with access

mode set to auto.

Operator switches to manual

Operator removes the pod

Operator switches to auto

Operator clears alarm at UI

Access Mode

Violation

(unexpected unload)

NO Operator takes a pod off load port with

access mode set to auto.

Operator clears alarm at UI

Attempt to use out of

service load port

3 YES Pod placed on load port with transfer state

set to out-of-service.

Pod is removed

Pod placement/placement

error

4 YES Sensors detect pod is not properly placed at

pod opener.

Sensors detect pod is properly

placed at pod opener or no pod

present

Pod Open/Close error 5 NO Opener errors while opening or closing. Manual intervention

Duplicate Pod ID 6 Yes A duplicate pod is detected. Methods vary by equipment

type

Pod Removal Error 7 NO Pod removed before the Pod is in the

READY TO UNLOAD state.

Operator clears alarm at UI

Duplicate Reticle ID 8 YES A duplicate reticle is detected. Methods vary by equipment

type

Pod Pick/Place error 9 NO The internal robot that moves the Pods

failed to pick or place a pod. Can be

triggered if the state of the system after a

pick or place is inconsistent (i.e. both robot

and pod think they are empty).

Manual intervention

Reticle Pick / Place error 10 NO The internal robot that moves the reticles

failed to pick or place a reticle. Can be

triggered if the state of the system after a

pick or place is inconsistent (i.e. both robot

and pod think they are empty).

Manual intervention

Automation Error 11 NO Equipment and Alarm dependent, alarms

that do not fit other categories.

Manual intervention

22.4 Duplicate PodID at Production Equipment

22.4.1 If the equipment receives a pod with a PodID that is the same as that of another pod present at the

equipment, the following rules shall apply:

1. The second pod with a PodID shall not be processed.