semi合集-English.pdf - 第620页

SEMI E84-0305 © SEMI 1999, 2005 18 U_REQ (P->A) READY (P->A) HO_AVBL (P->A) ES (P->A) VA (P->A) VS_0 or 1 (P->A) A M_AV BL (A->P) TR_REQ (A->P) BUSY (A->P) COMPT (A->P) Vehicle Arrival Carri…

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SEMI E84-0305 © SEMI 1999, 2005 17
U_REQ
(P->A)
READY
(P->A)
CS_0
(A->P)
CS_1
(A->P)
VALID
(A->P)
TR_REQ
(A->P)
BUSY
(A->P)
COMPT
(A->P)
HO_AVBL
(P->A)
ES
(P->A)
CS is
Specified
Carrier is
Detected
Transfer is
Completed
Release
CS is
Specified
Transfer
Start
CONT
(A->P)
TP1
TA1
TA2
TP2
TP4
TA3
TP5
TP3
TD0
1
2
3
5
7
11
8
6
4
10
9
14
13
12
step numbers
are for
reference
only
Figure 13
Signal Time Diagram for Single Handoff (UNLOAD)
L_REQ
(P->A)
READY
(P->A)
HO_AVBL
(P->A)
ES
(P->A)
VA
(P->A)
VS_0 or 1
(P->A)
A
M_AVBL
(A->P)
TR_REQ
(A->P)
BUSY
(A->P)
COMPT
(A->P)
Vehicle
Arrival
Carrier is
Detected
Transfer is
Completed
Release
Vehicle
Transfer
Start
Vehicle
Arrival
report
Either VS_0
or VS_1
is on
TA2 TA3
TP2
TP3
TP4
1
2
3
5
7
11
8
6
4
10
9
14
13
12
step numbers
are for
reference only
Figure 14
Signal Time Diagram for Single Handoff (LOAD)
(Interbay Passive OHS only)
SEMI E84-0305 © SEMI 1999, 2005 18
U_REQ
(P->A)
READY
(P->A)
HO_AVBL
(P->A)
ES
(P->A)
VA
(P->A)
VS_0 or 1
(P->A)
A
M_AVBL
(A->P)
TR_REQ
(A->P)
BUSY
(A->P)
COMPT
(A->P)
Vehicle
Arrival
Carrier is
Detected
Transfer is
Completed
Release
Vehicle
Transfer
Start
Vehicle
Arrival
report
Either VS_0
or VS_1
is on
TA2
TA3
TP2
TP3
TP4
1
2
3
5
7
11
8
6
4
10
9
14
13
12
step numbers
are for reference
only
Figure 15
Signal Time Diagram for Single Handoff (UNLOAD)
(Interbay Passive OHS only)
6.2.5 Simultaneous Handoff Sequence (loading)
6.2.5.1 This specification defines the capability to control simultaneous handoff. Simultaneous handoff is the
handoff operation in which active equipment transfers two carriers to two load ports simultaneously in a single
transfer operation. Some types of AMHS equipment are able to transfer two carriers simultaneously in a transfer
operation. The capability can be applied to increase the performance of the transfer. For example, simultaneous
handoff can be applied to single arm/double hand AMHS equipment capable of transferring two carriers in a single
transfer operation.
6.2.5.2 The time diagram of simultaneous handoff is shown in Figure 16. The figure shows only the load operation;
however, L_REQ may be changed to U_REQ for the unload operation. The sequence of the simultaneous handoff is
the same as that of the single handoff except that the specification of the load port with CS_0 and CS_1 signals and
the definition of ON/OFF of the L_REQ and U_REQ signals are different. The following list describes the sequence
which is different from Figures 12 and 13:
1) The active equipment turns the signals CS_0 and CS_1 ON to inform the passive equipment it is simultaneous
handoff.
2) The active equipment turns the VALID signal ON after the transition of CS_0 and CS_1 is effective.
3) The passive equipment turns the L_REQ (U_REQ) signal ON when both carriers in the specified load ports
(load ports of both CS_0 and CS_1) are ready to be loaded (unloaded).
4)
When both carriers are detected (removed) at the two load ports, the L_REQ (U_REQ) signal is turned OFF.
6.2.5.3 This specification defines the capability to control simultaneous handoff. Simultaneous handoff is the
handoff operation in which active equipment transfers two carriers to two load ports simultaneously in a single
transfer operation. Some types of interbay AMHS equipment (i.e. stockers) are able to transfer two carriers
simultaneously in a transfer operation. The capability can be applied to increase the performance of the transfer. For
example, simultaneous handoff can be applied to single arm/double hand AMHS equipment capable of transferring
two carriers in a single transfer operation.
6.2.5.3.1 The time diagram of simultaneous interbay handoff using a passive OHS vehicle is shown in Figure 15.
The figure shows only the load operation, however L_REQ may be changed to U_REQ for the unload operation.
The sequence of the simultaneous handoff is the same as that of the single handoff except that the specification of
SEMI E84-0305 © SEMI 1999, 2005 19
the load port with VS_0 and VS_1 signals and the definition of ON/OFF of the L_REQ and U_REQ signals are
different.
L_REQ
(P->A)
READY
(P->A)
CS_0
(A->P)
CS_1
(A->P)
VALID
(A->P)
TR_REQ
(A->P)
BUSY
(A->P)
COMPT
(A->P)
HO_AVBL
(P->A)
ES
(P->A)
CS is
Specified
Carrier is
Detected
Transfer is
Completed
Release
CS is
Specified
Transfer
Start
CONT
(A->P)
TP1
TA1
TA2
TP2
TP4
TA3
TP5
TP3
TD0
TD0
1
2
4
6
8
12
9
7
5
11
10
14
15
13
3
step numbers
are for
reference
onl
y
16
Figure 16
Signal Time Diagram for Simultaneous Handoff (LOAD)
L_REQ
(P->A)
READY
(P->A)
HO_AVBL
(P->A)
ES
(P->A)
VA
(P->A)
VS_0 and 1
(P->A)
A
M_AVBL
(A->P)
TR_REQ
(A->P)
BUSY
(A->P)
COMPT
(A->P)
Vehicle
Arrival
Carrier is
Detected
Transfer is
Completed
Release
Vehicle
Transfer
Start
Vehicle
Arrival
report
Both VS_0
and VS_1
are on
TA2
TA3
TP2
TP3
TP4
1
2
3
5
7
11
8
6
4
10
9
1
13
12
step numbers
are for
reference
only
Figure 17
Signal Time Diagram for Interbay Simultaneous Handoff (LOAD) using a Passive OHS Vehicle