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SEMI P10-0705 © SEMI 1990, 2005 119 8.1.118 COATING_TRANSMITT ANCE — (number) The ratio of the radiant power transm itted by the coating t o the incident radiant po wer expresse d as a percent, as specifi ed by the m ask…

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SEMI P10-0705 © SEMI 1990, 2005 118
8.1.100 CD_XY_REFERENCE_ONLY — (T or F) If T, indicates that the <cd_xy_definition> is to be measured
and the data transmitted to the customer (if requested by SHIP_CD_DATA), but that deviations in its measured
value due to mask processing would NOT be cause for mask rejection. (This does not exempt mishandling of the
data in pattern preparation from being a cause for mask rejection.)
8.1.101 CD_XY_TOLERANCE — Maximum acceptable deviation of the mean of all measured horizontally
scanned critical dimensions to the mean of all measured vertically scanned critical dimensions within a
<cd_xy_definition> and/or between the sites in {CD_X_GROUP} and the sites in {CD_Y_GROUP}. Critical
dimensions at all sites must be the same size in the pattern data and the same tone on the mask. (See Related
Information 1 at the end of this standard.)
8.1.102 CELL_ID — Name of the cell which follows; must be used in all references within this MASK_SET_ID to
this cell definition.
8.1.103 CELL_INSTANCE — (text) Identifies CELL_ID to be placed by the following location information.
8.1.104 CELL_REGISTR_MARK — (x,y) Location of registration reference mark in <mask_order> data, relative
to center of the cell (before mirroring or scaling).
8.1.105 CENTRALITY — (x,y,rotation)
Maximum misplacement in millimeters and, optionally, microradians of
all patterns as a group, relative to the nominal center of the mask.
8.1.106 CHECKSUM — For <mask_order>, an ASCII 16 bit crc checksum encompassing all records from
START_ORDER through END_ORDER, inclusive. For <mask_results>, an ASCII 16 bit crc checksum
encompassing all records from START_MASK_RESULTS through END_MASK_RESULTS, inclusive. (See
COMPUTING THE CHECKSUM, §9.)
8.1.107 CLEAR_INTERNAL_WINDOW — (x1,y1,x2,y2) Area to have all digitized data removed within the
window described by (x1,y1,x2,y2), relative to the coordinate space of DATA_SOURCE_FILE. The extents of the
output pattern file will be the same as DATA_SOURCE_FILE.
8.1.108 COAT_DATE_TIME – (date) The date and time that the coating was applied by the mask vendor.
8.1.109 COAT_EQUIP_USED – (text) The model identification of the equipment used by the mask vendor to
apply the coating.
8.1.110 COATING_COMPOSITION – (text) The name used to identify the composition of the coating, for
example IP3500, MoSi, AR3, etc., as specified by the mask blank vendor if MASK_VENDOR_APPLIED = F, or
mask vendor if MASK_VENDOR_APPLIED = T.
8.1.111 COATING_GRADE — Supplier grade of MASK_COATING applied to the substrate to build the
photomask. Text to be agreed by customer/vendor to suit the specific requirement.
8.1.112 COATING_LOT_NUMBER — (text) The lot number supplied by the mask blank vendor for a particular
coating such as the photoresist. Also known as “Resist Lot” or “Bake Lot”.
8.1.113 COATING_MASK_VENDOR_APPLIED — (T or F) If T, the coating was applied by the mask vendor.
8.1.114 COATING_OPTICAL_DENSITY — (number) A measure of the transmittance through the given coating
as specified by the mask blank vendor if MASK_VENDOR_APPLIED = F, or mask vendor if
MASK_VENDOR_APPLIED = T. Optical density equals the log to the base 10 of the reciprocal of the
transmittance
8.1.115 COATING_PHASE — (number) The angle in degrees that light is shifted by the given coating as specified
by the mask blank vendor if MASK_VENDOR_APPLIED = F, or mask vendor if MASK_VENDOR_APPLIED =
T.
8.1.116 COATING_REFLECTANCE — (number) For a given coating, the ratio of the reflected flux to the incident
flux expressed as a percent, as specified by the mask blank vendor if MASK_VENDOR_APPLIED = F, or mask
vendor if MASK_VENDOR_APPLIED = T.
8.1.117 COATING_THICKNESS — (number) The thickness of the coating in Angstroms as specified by the mask
blank vendor if MASK_VENDOR_APPLIED = F, or mask vendor if MASK_VENDOR_APPLIED = T.
SEMI P10-0705 © SEMI 1990, 2005 119
8.1.118 COATING_TRANSMITTANCE — (number) The ratio of the radiant power transmitted by the coating to
the incident radiant power expressed as a percent, as specified by the mask blank vendor if
MASK_VENDOR_APPLIED = F, or mask vendor if MASK_VENDOR_APPLIED = T.
8.1.119 COATING_TYPE – (CHROME, RESIST, ATTENUATOR) The name used to identify the category of
coating being described.
8.1.120 COATING_WAVELENGTH — (number) The wavelength of light in nanometers with which the given
coating is intended to be used as specified by the mask blank vendor if MASK_VENDOR_APPLIED = F, or mask
vendor if MASK_VENDOR_APPLIED = T.
8.1.121 COMPACT_LABEL — Identification of customer-supplied label to use on shipping compact.
8.1.122 CUSTOMER — The name of the company placing the order.
8.1.123 CUSTOMER_SPEC – (text) Customer’s designation for a specific mask manufacturing specification.
CUSTOMER_SPEC may be used in the data structure in addition to, but not in place of, explicit quality requirement
keywords.
8.1.124 CUSTOMER_SPEC_REVISION — (text) Customer designation of the revision of CUSTOMER_SPEC to
be used. This must be explicit and may not default to “latest” or “last used”. “None” is acceptable if no revision
identification applies to the specification. Both CUSTOMER_SPEC and CUSTOMER_SPEC_REVISION are
required if either appears at any level in the hierarchy.
8.1.125 DARK_INTERNAL_WINDOW — (x1,y1,x2,y2) Area to completely digitize within the window described
by (x1,y1,x2,y2), relative to the coordinate space of DATA_SOURCE_FILE. The extents of the output pattern file
will be the same as the DATA_SOURCE_FILE.
8.1.126 DATA_CHECKSUM — (integer) To be used to verify integrity of transmitted data.
8.1.127 DATA_CHECKSUM_TYPE — (text) Algorithm used to generate DATA_CHECKSUM.
8.1.128 DATA_COMPRESSION — (ZIP, ZOO, GZIP, Z, NONE, BINHEX) Compression algorithm used for
transmitted data.
8.1.129 DATA_CONSOLIDATION — (BACKUP, TAR, GNUTAR, ZIP, NONE Consolidation method used for
transmitted data.
8.1.130 DATA_DENSITY — (800BPI, 1600BPI or 6250BPI for 9_TRACK_-TAPE DATA_MEDIUM; HIGH or
LOW for 4MM_DAT or 8MM_DAT DATA_MEDIUM) for magnetic tape density.
8.1.131 DATA_ENCRYPTION — (PGP, NETWIZARD, USER, HARDWARE, NONE) Encryption algorithm
used for transmitted data.
8.1.132 DATA_FILE_NUMBER — For GDS-II OASIS, Mann or Electromask data, this is the file number on the
physical medium.
8.1.133 DATA_FILE_SIZE — Size of the file in bytes.
8.1.134 DATA_FORMAT — (MEBES, RDOS = RDOS dump, VAX = VAX backup, GDS-II = GDS-II stream,
OASIS = Specification for Open Artwork System Interchange Standard, CIF = Cal Tech Intermediate Format, DXF
= Autocad output, APPLICON, MANN_3000, MANN_3600, ELECTROMASK, DOS, UNIX, APPLE, TAR, and
others on request) Physical medium format.
8.1.135 DATA_FUNCTION_PURPOSE — (OPC, PSM, OPC/PSM, DRC, MRC, LVS, LOGICAL, FRACTURE,
OTHER, and additional specific functions on request) Description of software function to be performed.
8.1.136 DATA_ID — The required identifying “name” for a physical volume of data. The name must match the
label visible on the outside of the volume and must be unique among all physical volume names sent by a customer
to a vendor.
8.1.137 DATA_JOB_NAME — For E-beam data, this is the name of the job file to be expected in DATA
MEDIUM.
SEMI P10-0705 © SEMI 1990, 2005 120
8.1.138 DATA_LAYER_ID — (Layer1;Datatype1[,Layer2;Datatype2,…]) Within DATA_TOP_CELL, a numeric
pair of layer number and layer datatype separated by a semicolon and multiple sets of layers/datatypes separated by
a comma. If no datatype is specified for a layer number, then all data datatypes are assumed to be included for that
layer.
8.1.139 DATA_LOCATION — (text) Site where the data file may be found.
8.1.140 DATA_MEDIUM — (9_TRACK_TAPE, 4MM_DAT, 8MM_DAT, 1/4_INCH_CARTRIDGE, MODEM,
FLOPPY, EMAIL, VPN, FTP, RCP, CDR, CDRW, HARDDRIVE
, ZIPDRIVE, JAZZDRIVE, FLOPPY100MB,
DERIVED) Data transfer medium used for delivering pattern files, fracture files, job files and measure files.
DERIVED indicates files which are the result of <data_manipulation> operations contained within the
<mask_order>.
8.1.141 DATA_OFFSET — For optical masks only, the (x,y) shift to be applied to the data in building the mask.
8.1.142 DATA_PATTERN_NAME — The textual name of a pattern file, either received from the customer or
generated by <data_manipulation>. If the pattern received from the customer is a numbered file in a data volume,
this is the pattern name to be applied to
the file specified by the succeeding DATA_FILE_NUMBER and/or
DATA_TOP_CELL and/or DATA_LAYER_ID. It may be used as input to <data_manipulation> if referenced by
DATA_SOURCE_FILE to generate a new (different) DATA_PATTERN_NAME, or it may be used to identify a
pattern to be written on the mask if referenced by PATTERN_NAME in <pattern_definition>.
8.1.143 DATA_PATTERN_WINDOW — (x1,y1,x2,y2) Establishes the extents of the pattern file in the coordinate
space as received in DATA_SOURCE_FILE. (x1,y1) identifies the lower-left corner; (x2,y2) identifies the upper-
right corner.
8.1.144 DATA_SCALE_FACTOR — (n) (De)Magnifying factor to be used in (de)magnifying both the geometries
and the overall pattern file extents of the current data source.
8.1.145 DATA_SOURCE_FILE — A file provided by the customer to be used in a Boolean fracturing operation, or
file resulting from a <data_manipulation> operation. It must match either a START_DATA_MANIPULATION or a
DATA_PATTERN_NAME defined earlier in the <mask_order>.
8.1.146 DATA_TOP_CELL — Top cell or structure of the design.
8.1.147 DATABASE_AREA — (x1,y1,x2,y2) Unscaled, unmirrored coordinates of the window for database
inspection, lower left and upper right corners, relative to the center and coordinate system of the pattern or cell or, if
a <mask_option>, relative to the nominal center of the mask (chrome side up), after scaling and mirroring.
8.1.148 DATABASE_FILE_NAME — Name of database file to use for database inspection.
8.1.149 DATABASE_INSPECTION — (T or F) If T, database inspection is required.
8.1.150 DATABASE_JOB_LEVEL — Mask level of customer-supplied job file to use for database inspection.
8.1.151 DATABASE_JOB_NAME — Customer-supplied job file to use for database inspection. Should be
omitted if customer does not supply job file.
8.1.152 DATABASE_LAYER — (Layer1;Datatype1[,Layer2;Datatype2,…]) Within DATABASE_TOP_CELL, a
numeric pair of layer number and layer datatype separated by a semicolon and multiple sets of layers/datatypes
separated by a comma. If no datatype is specified for a layer number, then all data datatypes are assumed to be
included for that layer. To be used if DATABASE_SOURCE is GDS-II or OASIS.
8.1.153 DATABASE_SOURCE — (MEBES, PG, GDS-II, OASIS, KLARIS, UNDERIVED, and others on
request) Data source to be used when database inspection is required. KLARIS indicates that KLARIS data was
supplied by the customer. UNDERIVED indicates the customer-supplied data prior to vendor-performed data
manipulation is to be used to produce the inspection data. GDS-II or OASIS indicates that the GDS-II or OASIS
data is being supplied for database inspection, in addition to the customer-supplied MEBES or PG data to be used to
write the mask.
8.1.154 DATABASE_TOP_CELL — Top cell to be used if DATABASE_SOURCE is GDS-II or OASIS.
8.1.155 DATABASE_UNIT — Grid size to be used for fracturing DATABASE_SOURCE into inspection data, as
required by some inspection systems.