semi合集-English.pdf - 第6530页

SEMI G81-0703 © SEMI 2000, 2003 5 Item Name Data Type Size Description CreateDate String 16 Date and time when the map da ta is acquired: forma tted as YYYYMMDDhhmmsscc (year-month-date-hour-minut e-second-centisecond). …

SEMI G81-0703 © SEMI 2000, 2003 4

Item Name Data Type Size Description

BinType String 16 The format in which the bin code for each device will be represented in the [Map].

The choices are as follows:

[BinType] = ‘Ascii’: Single ASCII character (1 byte per device)

[BinType] = ‘Decimal’: 3 digit integer from 000 to 255 (1 byte per device)

[BinType] = ‘HexaDecimal’: 2 digit Hexadecimal value from 00 to FF (1 byte per

device)

[BinType] = ‘Integer2’: 4 digit Hexadecimal value from 0000 to FFFF (2 bytes per

device)

NOTE 1: For readability when [BinType] = ‘Decimal’ there must be spaces added

between each device and each row of devices should be on a new line.

NOTE 2: When [BinType] = ‘Ascii’ or ‘Hexadecimal’ or ‘Integer2’ there must not be

spaces between each device and for readability, each row should be on a new line.

ReferenceDeviceX Integer 2 X coordinate of the reference device to align device matrix on physical substrate with

the map data.

ReferenceDeviceY Integer 2 Y coordinate of the reference device to align device matrix on physical substrate with

the map data.

RefDevicePosX Float 4 Offset in µ m of the center of a reference device in the X-direction from the center of

substrate.

RefDevicePosY Float 4 Offset in µ m of the center of a reference device in the Y-direction from the center of

substrate.

MapName String 32 A name that describes the purpose of the bin codes in the map. Possible examples

include: “CellStatus”, “DefectCode”, “MarkGrade”, “PackageGrade”, “SortGrade”.

MapVersion String 32 The version is used to distinguish between multiple versions of maps for the same

substrate with the same MapName.

BinCode Integer 1 A bin category from 0 to 255, other that the value assigned to [NullBin], that may be

assigned to a device. It should be represented according to [BinType].

NOTE: BinCode and NullBin may take on values from 0 to 255 is represented as

Ascii, Decimal, Hexadecimal, or Binary, according to BinType. See definition of

BinType for more information.

BinCount Integer 4 The number of devices on the substrate with the specified [BinCode].

BinQuality String 16 Describes the quality of the specified [BinCode]. The following values are reserved

for the data item:

“Pass” – Indicates a quality that has commercial value

“Fail” – Indicates a quality that does not have commercial value

Other values defined by an application.

BinDescription String 256 A description of the specified [BinCode], e.g. “100MHz”.

NullBin Integer 1 Code to indicate no device or not measured device in [Data]. It should be represented

according to [BinType].

SupplierName String 256 Name of the supplier of the substrate.

OriginLocation Integer 1 Coordinate system on substrate to address devices. Location of the datum point or the

origin of the coordinates shall be one of the following:

0 = Center device* – top side

1 = Upper right – top side

2 = Upper left – top side

3 = Lower left – top side**

4 = Lower right – top side

5 = Center device* – bottom side

6 = Upper right – bottom side

7 = Upper left – bottom side

8 = Lower left – bottom side

9 = Lower right – bottom side

* Center device is X = (row count + 1), Y = (column count + 1)/2.

** Default value is 3 (= Lower left – top side) if this item is not present.

SEMI G81-0703 © SEMI 2000, 2003 5

Item Name Data Type Size Description

CreateDate String 16 Date and time when the map data is acquired: formatted as YYYYMMDDhhmmsscc

(year-month-date-hour-minute-second-centisecond).

Status String 16 Status of map data supplying process or preceding process.

Label String 256 Name of a special parameter.

SupplierValue String 256 Value of a special parameter.

SlotNumber Integer 2 This identifies the slot in the carrier in which the substrate is placed.

SubstrateNumber Integer 2 Identifies the substrate within a lot.

GoodDevices Integer 4 The total number of “good” devices on the substrate. The definition of “good” is

beyond the scope of this document.

SubstrateType String 16 The type of substrate. The choices are as follows:

[SubstrateType] = ‘Wafer’

[SubstrateType] = ‘Strip’

[SubstrateType] = ‘Tray’

SubstrateId String 32 A character code that may be printed or encoded on the substrate, which uniquely

identifies the substrate, and can be used to correlate the map with the physical

substrate.

CarrierType String 16 The type of substrate carrier. The choices are as follows:

[CarrierType] = ‘Cassette’

[CarrierType] = ‘Magazine’

CarrierId String 32 A character code that may be printed or encoded on the substrate carrier, which

uniquely identifies the substrate carrier.

LastModified String 16

Date and time when the map data was last modified: formatted as

YYYYMMDDhhmmsscc (year-month-date-hour-minute-second-centisecond)

NOTE 1: A set of above items is prepared for each single substrate to make it possible to consolidate more than one lot in a cassette.

7.3 Example

<?xml version="1.0"?>

<Map xmlns=”http://www.semi.org” SubstrateType=”Wafer”

SubstrateId="ZSDGS88DF" FormatRevision="SEMI G85-0703">

<Device

ProductId="854CS1C"

LotId="wksfd87dcj37"

Orientation="0"

DeviceSizeX="343.8"

DeviceSizeY="373.1"

Rows="6"

Columns="6"

BinType="HexaDecimal"

FrameId="KJKSDFK45"

NullBin="FF"

SupplierName="Company X"

OriginLocation="1"

CreateDate="2002110112000000"

LastModified="2003010612000000"

Status="Product">

<ReferenceDevice

ReferenceDeviceX="2"

ReferenceDeviceY="-3"

RefDevicePosX="2"

RefDevicePosY="2"

<ReferenceDevice

ReferenceDeviceX="4"

ReferenceDeviceY="-5"

RefDevicePosX="2"

RefDevicePosY="2"

<Bin

BinCode="02"

BinQuality="Pass"

BinDescription="500MHz"

</Data>

</Device>

</Map>