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SEMI E52-0703 © SEMI 1995, 2003 9 Code Gas Name Symbol Formula Synonym Ref 289 Acrylic acid C3H4O2 C 3 H 4 O 2 2-Propenoic acid; CH2=CHCOOH 2 290 Trifluoropropane C3H5F3 C 3 H 5 F 3 1,1,1-Trifluoropropane; CH3CH2CF3 2 29…

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SEMI E52-0703 © SEMI 1995, 2003 8
Code Gas Name Symbol Formula Synonym Ref
248 Tetrachlorodiborane B2Cl4 B
2
Cl
4
2
249 Tetrafluorodiborane B2F4 B
2
F
4
2
250 Tetramethylgermanium C4H12Ge (CH
3
)
4
Ge 2
251 Tetramethylsilane C4H12Si (CH
3
)
4
Si 2
252 Tetramethyl Tin C4H12Sn (CH
3
)
4
Sn 2
253 Tetrasilane Si4H10 Si
4
H
10
2
254 Titanium Tetraiodide TiI4 TiI
4
2
255 Tribromostibine SbBr3 SbBr
3
2
256 Trichlorostibine SbCl3 SbCl
3
2
257 Triethylaluminum C6H15Al (C
2
H
5
)
3
Al 2
258 Triethylantimony C6H15Sb (C
2
H
5
)
3
Sb 2
259 Trifluoroacetic Acid CF3CO2H CF
3
CO
2
H 2
260 Trifluoroacetonitrile C2F3N F
3
CCN 2
261 Trifluorosilane SiHF3 SiHF
3
2
262 Triisobutylaluminum C12H27Al (C
4
H
9
)
3
Al 2
263 Xylene m- C8H10 1,3-(CH
3
)
2
C
6
H
4
1,3 Dimethyl Benzene 3
264 Xylene p- C8H10 1,4-(CH
3
)
2
C
6
H
4
1,4 Dimethyl Benzene 3
265 Dichloromethane CH2Cl2 CH
2
Cl
2
266 Octafluorocyclopentene C5F8 CF
2
=C(CF
3
)-CF=CF
2
3
267 Hexafluoro Propane C3H2F6 CH
2
FCF
2
CF
3
1,1,1,2,2,3-Hexafluoropropane 2
268 Methylene Bromide CH2Br2 CH
2
Br
2
UN 2664; Methyl dibromide,
Dibromomethane
1
269 Hydrazoic Acid HN3 HN
3
1
270 Hexafluoro-2-Butyne C4F6 CF
3
C=CCF
3
Bis(trifluoromethyl)acetylene;
Perfluoro-2-butyne
3
271 Butanol-1 C4H10O CH
3
CH
2
CH
2
CH
2
OH 3
272 Hexafluoro Acetylacetone C5H2F6O2 C
5
H
2
F
6
O
2
1
273 Tungsten Hexacarbonyl C6O6W W(CO)
6
1
274 TEAsat C6H15O4As (C
2
H
5
O)
3
AsO 1
275 Hafnium Tetranitrate HfN4O12 Hf(NO
3
)
4
1
276 Acrylonitrile C3H3N CH
2
=CHCN Acrylon; Propenenitrile 3
277 Trimethylborane C3H9B (CH
3
)
3
B 2
278 Silicon tetrabromide Br4Si Br
4
Si SiBr4; Tetrabromosilane; Silicon
(IV) bromide
2
279 Tantalum (V) ethoxide C10H25O5Ta C
10
H
25
O
5
Ta Ta(Oet)5 2
280 Diphenylmethylenediamine C13H14N2 C
13
H
14
N
2
2
281 Diphenylmethan-4,4' -diisocyanat C15H10N2O C
15
H
10
N
2
O UN 2489; Benzene,1,1' -
methylenebis(isocyanatophenyl)
2
282 Tetrakis( diethylamino )titanium C16H40N4Ti C
16
H
40
N
4
Ti 2
283 Acetic acid C2H4O2 CH
3
COOH Ethanoic acid; UN 2789; 2
284 Dimethyl selenide C2H6Se C
2
H
6
Se (CH3)2Se; Selenium dimethyl;
Dimethylselenium
2
285 Ethoxy silane C2H8OSi C
2
H
8
OSi 2
286 Hexafluoropropylene oxide C3F6O C
3
F
6
O Hexafluoroepoxypropane 2
287 Trimethoxy silane C3H10O3Si C
3
H
10
O
3
Si 2
288 Pentafluoropropanol C3H3F5O C
2
F
5
CH
2
OH Perfluorodihydropropanol,
1,1,1,2,2-Pentafluoropropane
2
SEMI E52-0703 © SEMI 1995, 2003 9
Code Gas Name Symbol Formula Synonym Ref
289 Acrylic acid C3H4O2 C
3
H
4
O
2
2-Propenoic acid;
CH2=CHCOOH
2
290 Trifluoropropane C3H5F3 C
3
H
5
F
3
1,1,1-Trifluoropropane;
CH3CH2CF3
2
291 Ethyl Formate C3H6O2 HCO
2
C
2
H
5
Ethyl ester formic acid;
HC00C2H5
3
292 Methyl acetate C3H6O2 CH
3
CO
2
CH
3
Methyl ester acetic acid; UN
1231
3
293 Propenamine C3H7N C
3
H
7
N Allylamine; Monoallylamine; UN
2334
2
294 Trimethyl ester phosphoric acid C3H9O4P C
3
H
9
O
4
P Methyl phosphate;
Trimethoxyphosphine oxide
2
295 Heptafluoropropane C3HF7 C
3
HF
7
1,1,1,2,3,3,3-Heptafluoropropane,
Freon 227
2
296 Hexafluorocyclobutene C4F6 C
4
F
6
Perfluorocyclobutene;
1,2,3,3,4,4-
Hexafluorocyclobutene
3
297 Hexafluoro butadiene-1,3 C4F6 CF
2
=CF-CF=CF
2
Perfluorobutadiene-1,3; 3
298 Diethyl sulfide C4H10S C
4
H
10
S UN 2375; Ethyl sulfide; 2
299 Tetramethoxygermanium C4H12GeO4 (CH
3
O)
4
Ge Ge(OMe)4 2
300 Dimethoxydimethyl silane C4H12O2Si (CH
3
O)
2
Si(CH
3
)
2
KBM 22 2
301 Tetramethoxy silane C4H12O4Si (CH
3
O)
4
Si Silicic Acid (H4SiO4);
Tetramethyl ester; Tetramethyl
silicate
2
302 Tetramethyl lead C4H12Pb (CH
3
)
4
Pb (CH3)4Pb; Plumbane,
tetramethyl;
2
303 Trimethylvinylsilane C5H12Si C
5
H
12
Si Vinyltrimethylsilane;
CH2=CHSi(CH3)3
2
304 Pyridine C5H5N C
5
H
5
N Azabenzene; Azine 2
305 Methyl methacrylate polymer C5H8O2 C
5
H
8
O
2
Poly(methyl methacrylate);2-
Methyl1-2-propenoic acid
2
306 Triethyl arsine C6H15As (C
2
H
5
)
3
As Arsine; Triethylarsenic 2
307 Trietoxy arsine C6H15AsO3 (C
2
H
5
O)
3
As Triethyl ester arsenous acid;
Triethyl arsenite
2
308 Triethoxyborane C6H15BO3 (C
2
H
5
O)
3
B Boron triethoxide 2
309 Triethylindium C6H15In (C
2
H
5
)
3
In Indium triethyl 2
310 Triethylamine C6H15N (C
2
H
5
)
3
N UN 1296; Ethanamine 2
311 Triethoxyphosphine C6H15O3P (C
2
H
5
O)
3
P Triethyl phosphite; UN 2323;
Phosphorous acid, triethyl ester
2
312 Triethoxy silane C6H16O3Si (C
2
H
5
O)
3
SiH 2
313 Triethyl silane C6H16Si (C
2
H
5
)
3
SiH (C2H5)3SiH 2
314 Trimethylisoxazole C6H9NO CH
3
CH=CHCH=CHCON
H
2
3,4,5-Trimethylisoxazole,
Sorbamide
3
315 Tetraethylgermane C8H20Ge (C
2
H
5
)
4
Ge (C2H5)4Ge; Germanium
tetraethyl
2
316 Tetraethyl lead C8H20Pb (C
2
H
5
)
4
Pb Plumbane, tetraethyl; UN 1649 2
317 Tetraethyl silane C8H20Si C
8
H
20
Si Tetraethylsilane;
Tetraethylsilicon; (C2H5)4Si
2
318 Tetrakis( dimethylamino )titanium C8H24N4Ti C
8
H
24
N
4
Ti 2
319 Styrene C8H8 C
8
H
8
Ethenylbenzene; UN 2055 2
320 Triallylamine C9H15N C
9
H
15
N 2
SEMI E52-0703 © SEMI 1995, 2003 10
Code Gas Name Symbol Formula Synonym Ref
321 Trifluoromethylhypofluorite CF4O CF
4
O CF3OF; Hypofluorous acid;
trifuoromethyl ester
2
322 Formaldehyde CH2O CH
2
O H2C0; UN 1198; BFV 2
323 Iodomethane CH3I CH
3
I Methyl iodide; Un 2644 2
324 Xenon difluoride XeF2 XeF
2
F
2
Xe; Xenon fluoride 2
325 Selenium hexafluoride SeF6 SeF
6
UN 2194; Selenium fluoride 2
326 Disilane hexafluoride SiF6 SiF
6
F
6
Si
2
; Hexafluorodisilane 2
327 Fluoro silane SiH3F SiH
3
F H
3
FSi 2
328 Trisilane Si3H8 Si
3
H
8
Silicopropane; Trisilicane; H
8
Si3 2
329 Mercury Hg Hg UN 2809 2
330 Zinc Zn Zn UN 1383 2
331 Acetaldehyde methoxy C3H6O2 CH
3
OCH
2
CHO 3
332 Acetone,hydroxy C3H6O2 CH
3
COCH2OH Acetol 3
333 Glycol methylene ether C3H6O2 C
3
H
6
O
2
1,3 - Dioxolane 3
334 Propanoic acid C3H6O2 CH
3
CH
2
CO
2
H Propionic acid 3
335 Glycidol C3H6O2 CH
2
CHCH
2
OH 1-Propanol, 2,3 epoxy 3
336 Butanol-2 C4H10O CH
3
CH
2
CH(OH)CH
3
3
337 Tertiary Butyl Alcohol C4H10O (CH
3
)
3
COH 3
338 Diethyl ether C4H10O C
2
H
5
OC
2
H
5
3
339 Methyl propyl ether C4H10O CH
3
OC
3
H
7
3
340 Methyl isopropyl ether C4H10O (CH
3
)
2
CHOCH
3
3
341 Isobutyl Alcohol C4H10O (CH
3
)
2
CHCH
2
OH 3
342 3-one-2,5-dimethyl hexadiene C8H10 CH
2
=C(CH
3
)C=CC(CH
3
)
CH
2
3
343 1,7-Octadiyne C8H10 HC=C(CH
2
)
4
C=CH 3
344 2,6-Octadiyne C8H10 CH
3
C=CCH
2
CH
2
C=CCH
3
3
345 1,3,5,7-Octatetraene C8H10 CH
2
=CHCH=CHCH=CH
CH=CH
2
3
346 Niobium Pentachloride NbCl5 NbCl
5
3
347 Disilabutane Si2C2H10 Si
2
C
2
H
10
3
348 Ethane,1,1,1-Trifluoro C2H3F3 C
2
H
3
F
3
HFC-143a 3
349 Diselenium Dichloride Se2Cl2 Se
2
Cl
2
3
350 Deuterium Ammonia ND3 ND
3
3
351 Perfluoro (Oxacyclopentane) C4F8O C
4
F
8
O 3
7 Gas Table Sorted by Name
Table 2 Gases Sorted by Name
Code Gas Name Symbol Formula Synonym Ref
345 1,3,5,7-Octatetraene C8H10 CH
2
=CHCH=CHCH=CH
CH=CH
2
3
343 1,7-Octadiyne C8H10 HC=C(CH
2
)
4
C=CH 3
186 2,2 Dichloro1,1,1 Trifluoroethane C2HCl2F3 CHCl
2
-CF
3
Freon 123, Suva 123 2
344 2,6-Octadiyne C8H10 CH
3
C=CCH
2
CH
2
C=CCH
3
3
342 3-one-2,5-dimethyl hexadiene C8H10 CH
2
=C(CH
3
)C=CC(CH
3
)
CH
2
3