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SEMI S20-0303 © SEMI 2003 8 RELATED INFORMATION 2 EXAMPLE FLOW FOR HAZARDOUS ENERGY CONTROL DESI GN NOTICE : This R elated Info rmation is n ot an official part of SEMI S20 but was derived from t ask force activity. This…

SEMI S20-0303 © SEMI 2003 7
RELATED INFORMATION 1
EXAMPLES OF GRAPHICAL REPRESENTATIONS
NOTICE: This Related Information is not an official part of SEMI S20. It was derived from AMD activity, but is
generic and not copyrighted. This related information was approved for publication by inclusion in the ballot and by
vote of the SEMI Standards EHS Committee. It is included to assist the user of the document in understanding what
the graphical representations should provide in the way of information and location identification.
R1-1 Drawings

SEMI S20-0303 © SEMI 2003 8
RELATED INFORMATION 2
EXAMPLE FLOW FOR HAZARDOUS ENERGY CONTROL DESIGN
NOTICE: This Related Information is not an official part of SEMI S20 but was derived from task force activity.
This related information was approved for publication by inclusion in the ballot and by vote of the SEMI Standards
EHS Committee. It is included to assist the user of the document in understanding what the graphical
representations should provide in the way of information and location identification.
Equipment Designer Specifies Which
Lockout Devices are Necessary for
Energy Control for Each Task
Figure R2-1
Flow Chart for HEC Design and Graphical Representation Generation

SEMI S20-0303 © SEMI 2003 9
RELATED INFORMATION 3
EXAMPLE OF A LOTO EID DIFFERENTIATION MARKING
NOTICE: This Related Information is not an official part of SEMI S20 and was derived from task force activity and
individual task force participants. This related information was approved for publication by inclusion in the ballot
and by vote of the SEMI Standards EHS Committee. It is included to assist the user of the document in
understanding what the graphical representations should provide in the way of information and location
identification.
R3-1 Differentiation Marking
R3-1.1 In addition to a unique identifier, it may be beneficial to differentiate LOTO EIDs from non-LOTO EIDs
by using the following symbol. This symbol may be on or adjacent to, or combined with the unique identifier
marking for that specific LOTO EID.
R3-1.2 SEMI S8 provides guidance for sizing of this differentiation symbol so it will be readable from the normal
viewpoint of a person’s access to the LOTO EID.
R3-1.3 Where LOTO EIDs are located behind a panel, it is useful to mark the exterior of the panel in order to
indicate the path of access to the LOTO EID or approximately where the EID is hidden.
NOTICE: SEMI makes no warranties or representations as to the suitability of the guidelines set forth herein for
any particular application. The determination of the suitability of the guideline is solely the responsibility of the
user. Users are cautioned to refer to supplier’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These guidelines are subject to change without notice.
By publication of this standard, SEMI takes no position respecting the validity of any patent rights or copyrights
asserted in connection with any item mentioned in this standard. Users of this standard are expressly advised that
determination of any such patent rights or copyrights, and the risk of infringement of such rights, are entirely their
own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
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