semi合集-English.pdf - 第302页
SEMI E47.1-0305 © SEMI 1997, 2005 17 6.12 FOUP Pl acement Sensi ng Pads — The FOUP m ust have the same carrier sensing pads as is require d of the cassette in SEMI E1.9, including th e info pads that comm unicate informa…
SEMI E47.1-0305 © SEMI 1997, 2005 16
6.8 Human Handles — All handles for use by humans must either be contained within the maximum outer
dimensions of the FOUP, be detached when not in use, or be retractable into the maximum outer dimensions when
not in use. Although such handles may extend past x53, they must still be contained within the upper limits of x50,
y40, and r67. Handles for use by humans (if present) must follow SEMI S8, and they must require the use of both
hands (each using a full wrap-around grip, given the minimum clearance requirement in SEMI E15.1). Automation
handling features shall not be considered dual purpose unless they are designed to meet SEMI S8 guidelines.
6.9 Automation Handling Features — On the top of the FOUP is a robotic handling flange for manipulating the
FOUP. Shown in Figure 12 (on the top robotic handling flange) are a center hole and 3 optional kinematic grooves
(which, if present, must be implemented entirely including the radius at the peak). On the left and right sides of the
FOUP are optional flanges (of unspecified thickness) for use with fork lifts. On the bottom of the FOUP are rails for
use with roller conveyors. Although they are only required to extend x58 to the rear and y58 to the left and right, it is
recommended that they be as long as possible. Beyond x58 and y58, only the lower bounds on z43 and z46 apply.
The side fork-lift flanges and the left and right bottom conveyor rails of the FOUP also have vertical cylindrical pin
holes for fork lift centering. On the bottom edges of the FOUP, 2 required conveyor rails (defined by x56, x57, y58,
and z43) are located on the left and right, and an optional conveyor rail (defined by x58, y56, y57, and z43) is located
on the rear. The Optional Conveyor Placement Volume is a volume of space reserved for the inclusion of alternate
conveyor features (defined by y244 and y245, the Horizontal Datum Plane and z316, and -<x<). The volume
defined by the dimensions above (y244, y245, z316) is the maximum volume into which an alternate conveying
feature must fit.
6.9.1 Optional Front Conveyor Surface — Alternate methods of conveyor transport may require the use of the
optional front conveyor surface. The y-dimension is defined by y242, y
243. In the x-dimension, the optional front
conveyor surface extends up to the left and right bottom conveyor rail edge closest to the BDP. In the z-dimension,
the optional front conveyor surface must be coplanar with the bottom of the front seal zone or farther from the HDP
than the bottom of the front seal zone. The optional front conveyor surface must be coplanar with the left and right
bottom conveyor rails.
6.10 Retaining Features — Figures 8 and 9 show two features on the bottom of the FOUP that may be used for
retaining the FOUP onto the kinematic couplings. This may be needed to prevent the FOUP from being knocked off
the kinematic couplings by the action of pushing the FOUP against the front-opening interface. The front retaining
feature contains a ramp that a wheel might roll up while the FOUP is being pushed toward the front-opening
interface. The arm with the wheel (not specified here) then holds the FOUP down on the kinematic couplings. The
center retaining feature consists of an oblong slot with a chamber above it. The FOUP can be clamped onto the
kinematic couplings by inserting an oblong head on a shaft (not specified here) through the slot and rotating it 90° in
either direction. Either retaining feature would only engage after the FOUP is fully seated on the kinematic coupling
pins. Either retaining feature must be able to withstand a force in any direction of at least f60. It is recommended that
SEMI E15.1 tool load ports be designed to accommodate the minimum hole dimensions of the retaining features to
ensure carrier interchangeability. Projections on the tool load ports that mate with the retaining features should also
not interfere with the misalignment correction function of the kinematic couplings. Figures 5 through 8 also show
front clamp flanges and exclusion volumes (defined by x62, y60, y61, z66, z67, z68, and z69) behind them that can
be used to clamp the FOUP to the FOUP opener when the FOUP is purged with Nitrogen. However, it is strongly
recommended that the front clamp flanges not be used for pulling the FOUP from the undocked position into the
FIMS interface. Also, all of the dimensions of the FOUP (such as the wafer location, etc.) are defined with
reference to the kinematic coupling pins, and most FOUPs are designed so that all of the features are in the proper
location only when the FOUP is held in place on the kinematic coupling pins only by gravity. Thus, if the front
clamp flanges are used, the wafers and the FOUP features may be in a different position than defined in SEMI E1.9
(possibly resulting in damage to wafers, wafer handlers, and the FOUP).
6.11 Inner and Outer Radii — All required concave features may have a radius of up to r65 to allow cleaning and
to prevent contaminant build-up. All required convex features may also have a radius of up to r66 to prevent small
contact patches with large stresses that might cause wear and particles. Note that these limits on the radius of all
required features are specified as a maximum (not a minimum) to ensure that the required features are not rounded
off too much. The lower bound on the radius is up to the carrier supplier. Note also that this radius applies to every
required feature unless another radius is called out specifically. Here a required feature is an area on the surface of
the carrier specified by a dimension (or intersections of dimensions) that has a tolerance and not just a maximum or
minimum (such as the edges of the robotic handling flange).
SEMI E47.1-0305 © SEMI 1997, 2005 17
6.12 FOUP Placement Sensing Pads — The FOUP must have the same carrier sensing pads as is required of the
cassette in SEMI E1.9, including the info pads that communicate information about the carrier such as the carrier
capacity (number of wafers) and type (cassette or FOUP). See SEMI E1.9 for information about info pad
configurations for different wafer carriers similar to FOUPs including front-opening shipping boxes (as defined in
SEMI M31) and single-wafer interface (SWIF) systems (as defined in SEMI E103). Two additional sensing pads
(that can be used continuously while the FOUP is advancing into the FIMS interface) must be located near the center
of the bottom at the same distance from the horizontal datum plane as the carrier sensing pads. In addition, the
surfaces on the door of the FOUP that mate with the seal zones and the reserved spaces for vacuum application may
also be used for door-presence sensing.
7 Related Documents
7.1 SEMI Standards
SEMI E63 — Provisional Mechanical Specification for 300 mm Box Opener/Loader to Tool Standard (BOLTS-M)
Interface
SEMI E103 — Provisional Mechanical Specification for a 300 mm Single-Wafer Box System that Emulates a
FOUP
SEMI M31 — Provisional Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship
300 mm Wafers
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
SEMI E47.1-0305 © SEMI 1997, 2005 18
APPENDIX 1
APPLICATION NOTES
NOTICE: The material in this appendix is an official part of SEMI E47.1 and was approved by full letter ballot
procedures on August 27, 2001.
A1-1 The automation handling features do not need to be molded into the plastic shell of the FOUP, but can be
attached as a framework around the shell.
A1-2 To increase the stability of the FOUP on the kinematic couplings, it is recommended that the points on the
FOUP bottom extend as close as practical to the horizontal datum plane to minimize tipping of the FOUP.
A1-3 Skewness, warp, rock, and stiffness are implicitly defined in the geometric tolerances.
A1-4 Dimension y52 is given as a maximum based on the maximum distance to the port door specified in SEMI
E62.
A1-5 The position tolerance of the door of the FOUP is likely to be much larger than the position tolerance of the
registration pins. To make both manual and automated door opening easier, it is recommended that the holes for the
registration pins on the door of the FOUP have openings with a lead-in capability.
NOTE A1-1: If the bottom of the FOUP does not extend below the bottom conveyor rail, the conveyor rail may become
contaminated and may distribute particles.
A1-6 Although both of the retaining features on the bottom of the FOUP must be able to withstand a force in any
direction of f60, continuously applied stress may result in plastic deformation.
A1-7 In order to minimize particle generation when the FOUP door is opened or closed, it is recommended that the
tolerance between the FOUP door and its frame be larger than the tolerance between the FOUP door registration
holes and FIMS registration pins.
A1-8 One type of carrier presence sensor uses a beam of light with an optical detector that is triggered when the
beam of light is attenuated as it passes through the FOUP shell.
A1-9 The use of the registration pins for FOUP door lead-in to the loadport door is not recommended. The
registration pins should be only used to limit the maximum displacement of the FOUP door while on the loadport
door. Neither the FOUP nor FOUP door positions should change as a result of engaging or disengaging the
registration pins. When the Loadport experiences utility loss (such as EMO, vacuum loss, electrical failure, etc.),
the registration pins may be used to maintain the FOUP door’s position, and to ensure that the FOUP door does not
fall off. The clearance between the Registration Pins and the Registration Pin Holes should be less than the
clearance between the outer edge of the FOUP Door and the inner edge of the FOUP Door Frame. Balancing these
tolerances is a FOUP design issue related to the E62 Seal Zone specification. The diameter of the Registration Pin
Holes should be designed to accommodate the Registration Pin tolerance defined in E62 (x31, z31, d31) and the
Registration Pin Hole location tolerance in a FOUP.
A1-10 It is recommended that the FOUP have a capability to roughly position the FOUP door in the FOUP frame
during the door close sequence (during either return of the FOUP door or during latching of the FOUP door). This
positioning capability should keep the clearance between the FOUP frame and the FOUP door larger than sum of the
FOUP (self) tolerance and the E62 registration pin tolerance along with the FOUP door’s circumference. Possible
methods for accomplishing this may include positioning by latch motion and positioning by a slope between the
FOUP frame and the FOUP door.
A1-11 It is recommended that the FOUP have a lead-in mechanism on its latch key holes. This lead-in mechanism
should compensate for the FOUP’s latch key hole location error, as shown in Figure A1-1.
A1-12 It is recommended that the latch key hole mechanisms have some flexibility in their position for compliance
with the latch key positions. The purpose of this is to adjust for any discrepancy in rotation axis between the latch
key and the latch key hole mechanism. As shown in Figure A1-2, if only one side of the latch key pushes on the
inside of the latch key hole, the latch key can not rotate more than half way.
A1-13 It is recommended that the torque required to rotate the FOUP latch key holes be kept small enough that it
will not produce movement of the FOUP door in the x and z directions during latch key rotation.