semi合集-English.pdf - 第1574页
SEMI E36.1-0704 © SEMI 2004 11 Figure R1-1 Validation Results
SEMI E36.1-0704 © SEMI 2004 10
Number Subject Predicate Object
2513DADEEBF7
16
http://unknown.org/CA46B94
9-B999-40B3-8554-
2513DADEEBF7
http://www.semi.org/schemas/e36
Base#releaseDate
" 4/29/2003"
17
http://unknown.org/CA46B94
9-B999-40B3-8554-
2513DADEEBF7
http://purl.org/dc/elements/1.1
/title
" How To Use This Manual"
18
http://unknown.org/CA46B94
9-B999-40B3-8554-
2513DADEEBF7
http://purl.org/dc/elements/1.1
/publisher
" A Publisher"
19
http://unknown.org/CA46B94
9-B999-40B3-8554-
2513DADEEBF7
http://www.semi.org/schemas/e36
Base#procedureType
" OperationProcedure"
20
http://unknown.org/F9A6EB4
0-2DE4-4AF5-82C9-
6C26E97BD197
http://www.w3.org/1999/02/22-
rdf-syntax-ns#type
http://www.semi.org/schemas/e
36Base#Recipe
21
http://unknown.org/F9A6EB4
0-2DE4-4AF5-82C9-
6C26E97BD197
http://www.semi.org/schemas/e36
Base#releaseDate
" 4/29/2003"
22
http://unknown.org/F9A6EB4
0-2DE4-4AF5-82C9-
6C26E97BD197
http://purl.org/dc/elements/1.1
/title
" Some Operation"
23
http://unknown.org/F9A6EB4
0-2DE4-4AF5-82C9-
6C26E97BD197
http://www.semi.org/schemas/e36
Base#recipeType
" ProcessRecipe"
24
http://unknown.org/0566910
F-2C23-443F-B498-
03B984735675
http://www.w3.org/1999/02/22-
rdf-syntax-ns#type
http://www.semi.org/schemas/e
36Base#SafetyItem
25
http://unknown.org/0566910
F-2C23-443F-B498-
03B984735675
http://www.semi.org/schemas/e36
Base#releaseDate
" 4/29/2003"
26
http://unknown.org/0566910
F-2C23-443F-B498-
03B984735675
http://purl.org/dc/elements/1.1
/title
" Hazardous Material Detection"
SEMI E36.1-0704 © SEMI 2004 11
Figure R1-1
Validation Results
SEMI E36.1-0704 © SEMI 2004 12
RELATED INFORMATION 2
E36 METADATA SCHEMA
NOTICE: This related information is not an official part of SEMI E36.1 and was derived from the work of the
North American Information & Control Committee. This related information was approved for publication by full
letter ballot on March 14, 2004.
R2-1 E36 Metadata Schema
R2-1.1 The following is the schematic description of the Level 1 and Level 2 requirements. The description is
presented in the form of an RDF schema, compatible with the schema definitions available at the website listed in
section 3.2b
R2-1.2 E36 Metadata Schema XML Representation
<?xml version="1.0" encoding="UTF-8"?>
<rdf:RDF
xmlns:rdf="http://www.w3.org/1999/02/22-rdf-syntax-ns#"
xmlns:rdfs="http://www.w3.org/2000/01/rdf-schema#"
>
<rdfs:Class rdf:about="http://www.semi.org/e36/schema#E36Item"/>
<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Configuration">
<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>
</rdfs:Class>
<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Manual">
<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>
</rdfs:Class>
<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Recipe">
<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>
</rdfs:Class>
<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Procedure">
<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>
</rdfs:Class>
<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Component">
<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>
</rdfs:Class>
<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Narrative">
<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>
</rdfs:Class>
<rdfs:Class rdf:about="http://www.semi.org/e36/schema#ErrorCode">
<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>
</rdfs:Class>
<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Media">
<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>
</rdfs:Class>
<rdfs:Class rdf:about="http://www.semi.org/e36/schema#SafetyItem">
<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>
</rdfs:Class>
<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Company">
<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>
</rdfs:Class>
<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Publisher">
<rdfs:subClassOf rdf:resource="http://www.semi.org/e36/schema#E36Item"/>
</rdfs:Class>
<rdfs:Class rdf:about="http://www.semi.org/e36/schema#Configuration">