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SEMI E82-0705 © SEMI 1999, 2005 4 5.2.17 Transport Syst em Equipme nt — an individual t r ansport syst em viewed as a single piec e of equipm ent, with distributed c omponents and distrib u ted cont rol. The TS controlle…

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5.1.9 PGV — Person Guided Vehicle
5.1.10 RGT — Rail Guided Transport
5.1.11 TCP/IP — Transmission Communication Protocol/ Internet Protocol
5.1.12 TSC — Transport System Controller
5.2 Definitions
5.2.1 active vehicle — a vehicle in the transport system that contains a robot or other transfer agent for providing
the acquiring (loading) and depositing (unloading) actions.
5.2.2 buffer — a set of one or more locations for holding carriers at the production equipment.
5.2.3 carrier — a container with one or more fixed positions for holding substrates. Examples of carriers include
FOUPs and open cassettes.
5.2.4 FOUP — a closed carrier for holding wafers.
5.2.5 host — the factory computer system, or an intermediate system, that represents the factory and the user to the
equipment. Refers to the system that controls or supervises the Transport System Controller (TSC) throughout this
document.
5.2.6 internal buffer — locations within the equipment to store carriers. These locations exclude load ports.
5.2.7 internal transfer port — a specific type of transfer port, which is internal to a single TSC domain. As an
example, this location may be used to transfer carriers among different vehicles in a single TSC domain.
5.2.8 load port — the interface location on the equipment where carriers are delivered.
5.2.9 open cassette — an open structure that holds one or more wafers.
5.2.10 passive vehicle — a vehicle in the transport system that does not contain a robot or other transfer agent for
providing the acquiring (loading) and depositing (unloading) actions. The vehicle simply contains a position(s) to
carry the transfer unit. The loading and unloading action must be accomplished at the load or unload port by a
different system (e.g., stocker port robot).
5.2.11 process equipment — equipment used to make semiconductor devices. This excludes metrology and
material handling equipment.
5.2.12 production equipment — equipment used to produce semiconductor devices, including wafer sorting,
process, and metrology equipment and excluding material handling equipment.
5.2.13 transfer port — point on the transport system at which a change of equipment ownership of the carrier
occurs. See also internal transfer port.
5.2.14 transfer unit — the element of movement (assemblage of carriers) of the ITS that consists of a maximum
number of carriers allowed in a specific transfer command:
AA is the maximum number of carriers allowed for acquire at the transfer source.
BB is the maximum number of carriers allowed for deposit at the transfer destination.
CC is the maximum number of carriers allowed for transfer in one transport vehicle.
The maximum size of the transfer unit is the minimum of AA, BB, and CC.
5.2.15 Transport System — a transport system dedicated to one or more bays in the factory and responsible for
transferring carriers to production equipment, from production equipment, from production equipment to production
equipment or from stocker to stocker. TS consists of the physical units of the system (e.g., vehicles, nodes, docking
stations), the low-level unit controllers, and a system-level controller. TS excludes factory floor storage systems
(stockers), but includes any short-term storage integral to the system, such as storage locations within an overhead
track system that are accessible only to units of the particular TS.
5.2.16 Transport System Controller — interbay or intrabay Transport System Controller that communicates with
the Factory Host and represents the system as the equipment.
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5.2.17 Transport System Equipment — an individual transport system viewed as a single piece of equipment, with
distributed components and distributed control. The TS controller communicates with the host using HSMS and
GEM and represents the system as an equipment. The factory may require more than one type of transport system.
5.2.18 transport unit — a physical component of a transport system, such as a vehicle, node, or docking unit.
Figure 1
Example of Transport System Equipment
6 Communication Requirements
6.1 It is required that any IBSEM compliant equipment follow the Communications State Model in SEMI E30. In
addition, IBSEM compliant equipment shall support either the High-speed SECS Message Services Single-Session
Mode (SEMI E37 and SEMI E37.1, HSMS and HSMS-SS) communication standard or SEMI Equipment
Communications Standard 1 Message Transfer (SEMI E4, SECS-I) communication standard.
7 State Models
7.1 State Model Requirements
7.1.1 The state models included in this standard are a requirement for IBSEM equipment. This standard requires
implementation of all SEMI E30 state models (such as control, communication, on-line/off-line, etc. according to
the GEM capabilities required per §13). A state model consists of a state model diagram, state definitions, and a
state transition table. All state transitions in this standard, unless otherwise specified, shall correspond to collection
events.
7.1.2 A state model is the host’s view of the equipment, and does not necessarily describe the internal equipment
operation. All IBSEM state model transitions shall be mapped into the appropriate internal equipment events that
satisfy the requirements of those transitions. In certain implementations, the equipment may enter a state and have
already satisfied all of the conditions required by the IBSEM state model for transition to another state. The
equipment makes the required transition without any additional actions in this situation.
7.1.3 Some equipment may need to include additional substates other than those in this standard. Additional
substates may be added, but shall not change the IBSEM defined state transitions. All expected transitions between
IBSEM states shall occur.
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7.2 TSC State Model
7.2.1 TSC State Model Requirements
7.2.1.1 The purpose of the Transport System state model is to provide information to the host regarding the overall
status of the Transport System. The TSC state model is valid when the SEMI E30 (GEM) state is ON-LINE. The
TSC state model is not valid when the SEMI E30 (GEM) state is OFF-LINE. Since a transport system may consist
of many components (e.g., vehicle, robot arm, ID reader, etc.), it may be possible to continue ON-LINE operation
when the operation mode of some transport components (as viewed by the TSC) is a manual state. The details of
what happens when individual components of the transport system enter a manual state are specific to the IBSEM
equipment supplier. When the SEMI E30 Control state changes from OFF-LINE to ON-LINE, the TSC State Model
is started from the TSC INIT state.
7.2.2 TSC State Model
PAUSED
PAUSING
AUTO
ALARMS
NO ALARMS
TSC INIT
6
3
4
8 7
AVAILABILITY
SYSTEM
5
2
1
9
C
Figure 2
Generic IBSEM TSC State Model Diagram
7.2.3 TSC State Definitions
7.2.3.1 TSC INIT — TSC initialization of TS components is occurring. This is a non-operational state. No
commands from the host will be processed or queued. The system will not move out of this state if there are
vehicles actively loading or unloading carriers at ports. These vehicles must be manually or automatically recovered
before moving on to the next state.
7.2.3.2 PAUSING — A system PAUSE command has been received and is being processed. All vehicles that are
currently loading or unloading will continue until the load/unload is complete. Vehicles that are currently moving
may continue to move but they must not begin a load or unload. TRANSFER commands are accepted and queued.
All status requests will be processed. The RESUME command will also be processed.
7.2.3.3 PAUSED — No vehicles are in the process of loading or unloading a carrier at a port, but vehicles may still
be moving. TRANSFER commands are accepted and queued. All status requests will be processed. The RESUME
command will also be processed.
7.2.3.4 AUTO — System is in the normal operational state. Commands are actively processed.
7.2.3.5 NO ALARMS — There are no alarms present in the system.
7.2.3.6 ALARMS — There are one or more alarms present in the system, but the TSC is still capable of normal
processing since several components may remain unaffected by the alarm situation.