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SEMI F4-1000 © SEMI 1990 , 2000 3 7 Optional Design Requirem e n t s 7.1 Flow Limiting Device — Prov i s ion for lim iting flow, per SEMI S 5, shall be suppli ed when specifi ed. 7.2 Pr essure Relief Device s — Pre s s u…
SEMI F4-1000 © SEMI 1990, 2000 2
5.1.2 cylinder — a pressure vessel designed for
pressures higher than 276 kPa (40 psia), having a
circular cross-section, and a maximum water capacity
of less than 454 kg (1,000 lbs.). It does not include a
portable tank, multi-unit tank car tank, cargo tank, or
tank car.
5.1.3 cylinder valve — a mechanica l device attached
to a compressed gas cylinder that permits flow into or
out of the cylinder when the device is in the open
position and prevents flow when in the closed position.
5.1.4 disconnect shutoff — a device, which will not
permit the flow of gas through an open cylinder valve
without attachment to an outlet connector.
5.1.5 flow coefficient (Cv) — a num eric constant used
to characterize the flow capacity of a valve.
5.1.6 manual locking device — a device used to
prevent the cylinder valve from opening during
transportation or service.
5.1.7 manual override — a device u sed for opening
the cylinder valve manually.
5.1.8 normal temperature — a temp erature of 21°C ±
6°C (70°F ± 10°F).
5.1.9 normally closed — a design in which the
cylinder valve closure member automatically assumes
the closed position upon loss of compressed gas to the
actuator.
5.1.10 packless valve — a valve with a diaphragm or
bellows stem seal instead of a packing or O-ring seal at
the stem.
5.1.11 pneumatic actuator — a devic e which converts
compressed gas pressure into mechanical motion and
force to move the cylinder valve closure member.
5.1.12 proof pressure — a pressure g reater than the
cylinder valve’s rated pressure that the cylinder valve
can withstand without impairing its ability to meet the
leak rate limits specified in SEMI F1 upon return to
rated pressure.
5.1.13 rated pressure — the pressure at which the
cylinder valve can meet the performance and
qualification requirements of this specification. Rated
pressure shall be specified by the manufacturer.
5.1.14 valve closure member — that part of the cylin-
der valve which is positioned in the flow stream to per-
mit or obstruct flow, depending on its closure position.
5.1.15 wetted surface — surface with in the interior of
the cylinder valve, which is in contact with the
controlled gas. The surface in contact with the gas used
to actuate the cylinder valve is not, for the purpose of
this specification, considered a “wetted surface”.
6 Design Requirements
6.1 General — Components not covered by this
specification or CGA Standards shall be constructed
such that they do not compromise the safety,
substantiality, and durability of the valve or actuator.
6.2 Configuration — The cylinder valve shall be a
packless valve design with a normally closed actuator.
6.3 Size — The cylinder valve and actuator shall be of
a design size which permits the use of a protective
transportation cover which satisfies the requirements of
49 CFR Section 173.40(d)(2).
6.4 Materials — Ferrous materials used for the wetted
surfaces shall be per SEMI F20. Other materials may be
supplied to satisfy specific material or performance
requirements, provided they are compatible with the gas
service.
6.5 Inlet — The inlet of the cylind er valve shall have
tapered external threads as specified by CGA V-1 or
other recognized governmental or industry standards for
the connection of cylinder valves to gas cylinders.
6.6 Outlet — The outlet of the cylinder valve shall
conform to a CGA 630/710 series connection in
accordance with CGA V-1 or other recognized
governmental or industry standards for the outlet
connections of gas cylinder valves.
6.7 Actuator Pressure — The actuating pressure
required to open the cylinder valve fully shall not
exceed 550 kPa (gauge) (80 psig).
6.8 Manual Override — A manual override shall be
supplied.
6.9 Vents — Vent hole(s) for mass spectrometer
helium leak testing shall be supplied at appropriate
locations.
6.10 Internal Volume — The wetted surfaces should
be configured, and the internal volume minimized, to
enhance the efficacy of purging.
6.11 Particle Control — The design should minimize
accumulation and generation of particles.
6.12 Threaded Fasteners — Thread ed fasteners used
in the covers, housings, casings, and any external
mounting brackets shall have threads conforming to, as
applicable, the ASME B1.1, ISO 68, or ISO 261
standards.
6.13 Cleanliness — The cylinder valve and actuator
shall be cleaned, as a minimum, per CGA Standard G-
4.1.
SEMI F4-1000 © SEMI 1990, 20003
7 Optional Design Requirements
7.1 Flow Limiting Device — Provision for limiting
flow, per SEMI S5, shall be supplied when specified.
7.2 Pressure Relief Devices — Pressure relief devices
must be required in accordance with CGA S-1.1 or S-7.
7.3 Disconnect Shutoff — A disco nnect shutoff shall
be supplied when specified.
7.4 Manual Locking Device — A manual locking
device shall be supplied when specified.
7.5 Electropolish — Cylinder valves shall be
electropolished per SEMI F19 when specified.
7.6 Cleanliness — Cleaning above the minimum
requirements of CGA G-4.1 may be specified.
7.7 Position Indicator — A device for visual
confirmation of open or closed position may be
specified.
8 Qualification Requiremen ts
8.1 General — Any new cylinder valve design or
substantially revised cylinder valve design shall be
tested prior to production to demonstrate compliance
with this specification.
8.1.1 Leakage — Cylinder valves shall be leak tested
using the methods and leak rate limits specified in
SEMI F1 for qualification of components.
8.1.2 Operating Temperature Range — The cylinder
valves shall perform satisfactorily at any temperature
between -40°C (-40°F) and 55°C (131°F).
8.2 Qualification Cylinder Valve Samples — Nine
cylinder valves shall be selected at random from the
pre-production manufacturing phase of the product for
qualification to this specification.
a. One cylinder valve shall be used for the Flow
Coefficient and Transportation Vibration Tests.
b. Three cylinder valves shall be used for the Pressure
Tests.
c. Three cylinder valves shall be used for the
Endurance Test.
d. Two cylinder valves shall be used for the Tip-Over
Tests.
8.3 Flow Coefficient Test — The flow coefficient of a
fully open cylinder valve tested without a flow
restrictor shall be a minimum of 0.1. The method of test
for determining the flow coefficient shall be as
prescribed by SEMI F32.
8.4 Transportation Vibration Test — After being
subjected to vibration for one hour at a frequency of
3400 to 3600 vibrations per minute at an amplitude of
0.8 mm (0.031 in.) to 1.6 mm (0.063 in.), the cylinder
valve shall not exceed the inboard, outboard, and
internal leak rate limits specified.
8.5 Pressure Tests
8.5.1 Back Pressure — The cylinder valve shall not
exceed the internal leak rate limits specified in SEMI
F1 with the cylinder valve closed, the rated pressure
applied at the outlet, and the inlet connected to the leak
detector.
8.5.2 Proof Pressure — The proof p ressure at normal
temperature shall be a minimum of 1.67 times the rated
pressure. Tests shall be conducted following the back
pressure test with the cylinder valve open, the outlet
capped, and the pressure relief port capped or plugged.
After exposure to an aerostatic proof pressure for ten
minutes, the cylinder valve shall not exceed the
inboard, internal, and outboard leak rate limits specified
in SEMI F1.
8.5.3 Burst Pressure — The burst pressure at normal
temperature shall be a minimum of three times the rated
pressure. Tests shall be conducted hydrostatically
following the proof pressure test with the cylinder valve
open, the outlet capped, and the pressure relief port
capped or plugged. Visible outboard leakage is not
permitted during the burst test. After testing, the
cylinder valve need not be functional.
8.5.3.1 Pressure Rating Determination — The rated
pressure shall be less than or equal to the pressure
determined from the burst pressure test as follows:
P ≤ 0.33BT
m
/T
a
Where:
P = Rated pressure
B = The lowest burst pressure recorded for the three
specimens tested
T
a
= The actual tensile strength of the failed test
specimen material obtained from Certified Material
Test Reports.
T
m
= The specified minimum tensile strength of the failed
specimen material.
NOTE 2: The factor of T
m
/T
a
is included to normalize
between the particular steel stock from which the test
specimens were made and the minimum tensile strength of the
specified steel.
8.6 Endurance Test — The cycle l ife of the cylinder
valve shall be at least 5,000 operational cycles. During
and after 5,000 operations, the cylinder valve shall not
exceed the inboard, internal, and outboard leak rate
limits specified in SEMI F1. A cycle shall consist of
one opening and one closing of the cylinder valve.
SEMI F4-1000 © SEMI 1990, 2000 4
8.6.1 Cylinder valves shall be opera ted alternately
through minimum and maximum temperatures
specified in Section 8.1.2 in 1000 cycle increments until
completion of the specified number of cycles. The first
thermal cycle shall take the cylinder valves to
maximum temperature. Cylinder valves shall be at
thermal equilibrium while mechanically cycling.
Initially, and at the completion of every 1000 cycles,
the cylinder valves shall not exceed the inboard,
internal, and outboard leakage tests specified in SEMI
F1 at normal temperature.
8.6.2 The cylinder valve inlet pressu re shall be the
cylinder valve rated pressure. Cylinder valves shall be
cycled at a rate of one cycle per ten seconds, equally
divided between opening and closing. During the off
cycle, the cylinder valve's downstream pressure shall be
allowed to decay to 50% or less of the inlet pressure.
8.7 Tip-Over Test
After being s ubjected to tip-over
tests the cylinder valves shall show no evidence of
structural damage, shall not exceed the inboard,
internal, and outboard leak rates specified in SEMI F1,
and shipping caps or other protective devices shall be
able to be removed or adjusted so that the valve can be
operated.
8.7.1 Tip-over testing shall be conducted in
accordance with CGA V-9, Section 5.2.6.4.
8.7.2 The tip-over tests shall be performed with the
cylinder valve installed on a 166 kPa (2400 psig), 250
mm (10 inches) diameter by 1550 mm (61 inches) long
(including cap) gas cylinder, or onto a smaller cylinder
if the valve is restricted by the manufacture for use on
the smaller cylinder.
8.7.3 A shipping cap or other protec tive device shall
be installed onto the cylinder during the tip-over tests.
If a special cap or protective device is used it shall
conform to the requirements of CGA V-9, Appendix E-
49 CFR cylinder drop protocol.
9 Manufacturing Requirements
9.1 Acceptance Testing
9.1.1 Each cylinder valve shall be acceptance tested
for inboard, internal, and outboard leakage per SEMI
F1.
9.1.2 Each actuator shall be tested fo r leakage of less
than 1 sccm at 550 kPa (80 psig).
9.1.3 Each cylinder valve shall be vi sually inspected
for cleanliness, damage, proper markings, and actuator
function, as a minimum.
9.2 Marking — Each cylinder valve shall be
permanently identified with the following minimum
information:
9.2.1 Manufacturer’s name or logo.
9.2.2 Manufacturer’s part number or part number
code.
9.2.3 Outlet type (CGA number or other specification
identification).
9.2.4 Pressure relief device marked in accordance with
CGA pamphlet S-1.1 or other specification
identification.
9.2.5 Manufacturer’s serial number or code that will
provide traceability for materials, test data, and
assembly date.
9.2.6 Flow limiting information when the flow
limiting device is integral to the cylinder valve and not
intended for removal.
9.3 Traceability — The manufacturer shall use a
program to qualify raw materials, parts, assemblies, and
purchased components and to provide traceability of all
components (manufactured or purchased) used in
production of cylinder valves.
9.4 Instructions
9.4.1 Clear, concise instructions and diagrams stated
in terms clearly understandable and adequate for proper
installation and safe operation shall be provided with
each cylinder valve.
9.4.2 Instructions for periodic maintenance or repair,
as required, shall be made available by the
manufacturer. No repairs or maintenance shall be
conducted without these instructions. Parts that require
replacement shall be identified.
9.5 Maintenance — Ideally, the cylinder valve shall be
capable of fulfilling the performance and qualification
requirements of this specification after any of the
maintenance procedures specified by the cylinder valve
manufacturer. Maintenance shall be performed by only
those persons the cylinder valve manufacturer deems
qualified.
10 Related Documents
10.1 Military Specification
5
MIL-DTL-2E — Valves, Cylinder, Gas
5 Military Specification, Commanding Officer, Naval Publications
and Forms Center, Attention: MPFC 105, 5801 Tabor Avenue,
Philadelphia, PA 19120