semi合集-English.pdf - 第1094页

SEMI E5-1104 © SEMI 1982, 2004 36 Name Format Description Values Where Used SOFTREV 20 Software revision code 6 bytes ma ximum S1F2, F13, F14; S7F22, F23, F26, F31, F39, F43 SPAACK 10 Equipment acknowledgement code, 1 by…

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SEMI E5-1104 © SEMI 1982, 2004 35
Name Format Description Values Where Used
RSACK 10 Ready to Send Acknowledge
code, 1 byte
0 = Acknowledge, OK (note that
'OK' differs from 'ready')
1 = Invalid port number
2 = Port is already occupied
3 = Busy, unable to move
material at this time. Try
again
4 = Receiver does not have
permission to perform this
operation
5-63 Reserved
S4F2
RSDA 10 Request Spool Data
Acknowledge
0 = OK
1 = Denied, busy try later
2 = Denied, spooled data does
not exist
3-63 Reserved
S6F24
RSDC 51 Request Spool Data Code
0 = Transmit Spooled Messages
1 = Purge Spooled Messages
2-63 Reserved
S6F23
RSINF 3() Starting location for row or
column. This item consists o
f
3 values (x,y,direction). If
direction value is negative, it
equals decreasing direction.
If the value is positive, it
equals increasing direction.
Direction must be a non-zero
value.
S12F7, F14
RSPACK 10 Reset Spooling Acknowledge
0 = Acknowledge, spooling setup
accepted
1 = Spooling setup rejected
2-63 Reserved
S2F44
RTYPE 3(), 5() Type of record
0 = Stream
1 = Discrete
2-63 Reserved
S13F4
SDACK 10 Map set-up data acknowledge
0 = Received data
>1 = Error
1-63 Reserved
S12F2
SDBIN 10 Send bin information flag
0 = Sent bin information
1 = Don't send bin information
>1 = Error
2-63 Reserved
S12F17
SEQNUM 3(), 5() Command Number
Value which identifies a unique
process program command by its
position in the list of commands
relative to the first. For the
first command of the process
program, SEQNUM is l.
S7F27
SFCD 10 Status form code, 1 byte
S1F5
SHEAD 10 Stored header related to the
transaction timer
S9F9
SLOTID 51 Used to reference material by
slot (a position that holds
material/substrates) in a
carrier. This item may be
implemented as an array in
some messages.
S16F11, F13,
F15
SMPLN 3(), 5() Sample number
S6F1
SEMI E5-1104 © SEMI 1982, 2004 36
Name Format Description Values Where Used
SOFTREV 20 Software revision code 6
bytes maximum
S1F2, F13, F14;
S7F22, F23,
F26, F31, F39,
F43
SPAACK 10 Equipment acknowledgement
code, 1 byte
0 = Everything correct
1 = Invalid data
>1 = Equipment-specific error
2-63 Reserved
S2F4
SPD 10 Service program data
S2F3, F6
SPID 20 Service program ID, 6
characters
S2F1, F5, F7,
F9, F12;
S9F13
SPNAME 20 Service parameter name
defined in specific standard.
If service parameter is
defined as an object attribute,
this is completely the same as
ATTRID except format
restrictions above.
S14F19, F20,
F21, F28
SPR Device
Depend-
ent
Service program results
Device dependent
S2F10
SPVAL 0, 10,
11, 20,
21, 3(),
4(), 5()
Service parameter value,
corresponding to SPNAME.
If service parameter is
defined as an object attribute,
this is completely the same as
ATTRDATA except format
restrictions for the attribute.
S14F19, F20,
F21
SSACK 20 Indicates the success or
failure of a requested action.
Two characters.
S18F2, F4, F6,
F8, F10, F12,
F14
SSCMD 20 Indicates an action to be
performed by the subsystem.
S18F13
STATUS 20 Provides status information
for a subsystem component.
Used in the data item
STATUSLIST.
See
STATUSLIST
STATUSLIST 0 A list of STATUS data sent
in a fixed order.
STATUSLIST has the
following form:
L,s
1. <STATUS
1
>
.
.
s. <STATUS
s
>
S18F4, F8, F10,
F12, F14, F16
STEMP 20 String template. ASCII text
string acceptable to
equipment as a parameter
value. A data string matches
a template string if the data
string is at least as long as the
template and each character
of the data string matches the
corresponding character of
the template. A null list
indicates all user data is
acceptable to the machine.
S7F22
SEMI E5-1104 © SEMI 1982, 2004 37
Name Format Description Values Where Used
STIME 20 Sample time, 12 or 16 bytes.
NOTE 3: The 16-
b
yte format
is currently optional. After
January 1, 1998, the 16-byte
format shall be required on
new and updated
implementations. Support for
the 12-byte format shall be
supported as a configurable
option using the equipment
constant TimeFormat. This is
a format requirement only and
does not imply either
precision or accuracy.
If 12 bytes the format is
YYMMDDhhmmss
YY = Year 00 to 99
MM = Month 01 to 12
DD = Day 01 to 31
hh = Hour 00 to 23
mm = Minute 00 to 59
ss = Second 00 to 59
If 16 bytes the format is
YYYYMMDDhhmmsscc
YYYY = Year 0000 to 9999
MM = Month 01 to 12
DD = Day 01 to 31
hh = Hour 00 to 23
mm = Minute 00 to 59
ss = Second 00 to 59
cc = Centisecond 00 to 99
S6F1
STRACK 10 Spool Stream Acknowledge
1 = Spooling not allowed for
stream (i.e., Stream 1)
2 = Stream unknown
3 = Unknown function specified
for this stream
4 = Secondary function specified
for this stream
S2F44
STRID 51 Stream Identification
S2F43, F44
STRP 3() Starting position in die
coordinate position. Must be
in (X,Y) order.
S12F9, F16
SV 0, 10,
11, 20,
21, 3(),
4(), 5()
Status variable value
S1F4;
S6F1
SVCACK 10 Service acceptance
acknowledge code, 1 byte
0 = Acknowledge, service has
been performed
1 = Service does not exist
2 = Cannot perform now
3 = At least parameter is
invalid
4 = Acknowledge, service will
be performed with completion
notified later with parameters
for response
5 = Service is not completed or
prohibited
6 = No such object exists
7-63 Reserved
S14F20
SVCNAME 20 Service name provided on
specified object asking by the
host
S14F19, F26,
F27, F28
SVID 20, 3(),
5()
Status variable ID
Status variables may include any
parameter that can be sampled in
time such as temperature or
quantity of a consumable.
S1F3, F11, F12;
S2F23
SVNAME 20 Status Variable Name
S1F12
TARGETID 20 Identifies where a request for
action or data is to be applied.
If text, conforms to
OBJSPEC.
S18F1, F3, F5,
F7, F9, F11,
F13