semi合集-English.pdf - 第2519页

SEMI E88-1104 E © SEMI 1999, 2004 16 Collection Event Name From State To State Required DVVALs GEM TransferCancelFailed CANCELING QUEUED CommandID CarrierID CarrierLoc CarrierZoneName N TransferCancelInitia ted QUEUED CA…

100%1 / 7923
SEMI E88-1104
E
© SEMI 1999, 2004 15
9 Collection Event List
9.1 This section identifies data collection events and defines (Stream 6) reporting levels for variable data items. The
host can use the report definition scenario defined in SEMI E30 to define reports at Stocker SEM defined levels.
The intent of this section is to demonstrate that certain suggested data is available at specific events. The collection
events are grouped according to whether or not they are associated with a state change (according to the state models
defined within this document).
9.2 Requirements
9.2.1 This standard requires all collection events listed in the SEMI E30 standard (according to the GEM
capabilities required per Section 14). There are cases where specific collection event names are designated for GEM
defined collection events. Such collection event names are denoted by “Y” in the GEM column.
9.3 State Transition Collection Event Table
Table 6 State Transition Collection Event Table
Collection Event Name From State To State Required DVVALs GEM
SC STATE TRANSITION EVENTS
AlarmCleared ALARMS NO ALARMS CommandID
ErrorID
StockerUnitInfo
ErrorNumber
Y
AlarmSet NO ALARMS
ALARMS
ALARMS
ALARMS
CommandID
ErrorID
StockerUnitInfo
RecoveryOptions
ErrorNumber
Y
SCAutoCompleted PAUSED
PAUSING
AUTO
AUTO
N/A N
SCAutoInitiated None SC INIT N/A N
SCPauseCompleted PAUSING PAUSED N/A N
SCPaused SC INIT PAUSED N/A N
SCPauseInitiated AUTO PAUSING N/A N
TRANSFER COMMAND STATE TRANSITION EVENTS
TransferAbortCompleted ABORTING None CommandID
CarrierID
CarrierLoc
CarrierZoneName
N
TransferAbortFailed ABORTING ACTIVE CommandID
CarrierID
CarrierLoc
CarrierZoneName
N
TransferAbortInitiated ACTIVE ABORTING CommandID
CarrierID
CarrierLoc
CarrierZoneName
N
TransferCancelCompleted CANCELING None CommandID
CarrierID
CarrierLoc
CarrierZoneName
N
SEMI E88-1104
E
© SEMI 1999, 2004 16
Collection Event Name From State To State Required DVVALs GEM
TransferCancelFailed CANCELING QUEUED CommandID
CarrierID
CarrierLoc
CarrierZoneName
N
TransferCancelInitiated QUEUED CANCELING CommandID
CarrierID
CarrierLoc
CarrierZoneName
N
TransferCompleted ACTIVE None
This event will occur when the
carrier arrives at the transfer
completed port.
The TRANSFER command
DEST is an LP if transferring to
an output of the stocker.
CommandID
CarrierID
CarrierLoc
ResultCode
CarrierZoneName
N
TransferInitiated QUEUED
CANCELING
TRANSFERRING
TRANSFERRING
CommandID
CarrierID
CarrierLoc
CarrierZoneName
Dest
N
TransferPaused TRANSFERRING PAUSED CommandID
CarrierID
CarrierLoc
CarrierZoneName
N
TransferResumed PAUSED TRANSFERRING CommandID
CarrierID
CarrierLoc
CarrierZoneName
N
STOCKER CARRIER STATE TRANSITION EVENTS
CarrierInstallCompleted None COMPLETED CarrierID
CarrierLoc
CarrierZoneName
N
CarrierRemoveCompleted INSTALLED None CarrierID
CarrierLoc
CarrierZoneName
N
CarrierRemoved WAIT OUT
TRANSFERRING
None
None
CarrierID
HandoffType
N
CarrierResumed ALTERNATE TRANSFERRING CommandID
CarrierID
CarrierLoc
CarrierZoneName
Dest
StockerCraneID
N
CarrierStored TRANSFERRING COMPLETED CarrierID
CarrierLoc
CarrierZoneName
N
SEMI E88-1104
E
© SEMI 1999, 2004 17
Collection Event Name From State To State Required DVVALs GEM
CarrierStoredAlt TRANSFERRING ALTERNATE CommandID
CarrierID
CarrierLoc
CarrierZoneName
Dest
N
CarrierTransferring WAIT IN
COMPLETED
None
TRANSFERRING
TRANSFERRING
TRANSFERRING
CarrierID
CarrierLoc
CarrierZoneName
StockerCraneID
N
CarrierWaitIn None WAIT IN CarrierID
CarrierLoc
CarrierZoneName
N
CarrierWaitOut TRANSFERRING
WAIT OUT
None
WAIT OUT
WAIT OUT
WAIT OUT
CarrierID
CarrierLoc
CarrierZoneName
PortType
N
ZoneCapacityChange Any State or None Any State or None ZoneData N
STOCKER CRANE STATE TRANSITION EVENTS
CraneActive IDLE ACTIVE CommandID
StockerCraneID
N
CraneIdle ACTIVE IDLE CommandID
StockerCraneID
N
PORT TRANSFER STATE TRANSITION EVENTS
PortInService None
OUT OF SERVICE
IN SERVICE PortID
PortOutOfService None
IN SERVICE
OUT OF SERVICE PortID
PortTransferBlocked Any TRANSFER BLOCKED PortID
PortReadyToLoad Any READY TO LOAD PortID
PortReadyToUnload Any READY TO UNLOAD PortID
9.4 Non-Transition Collection Event Table
Table 7 Non-Transition Collection Event Table
Collection Event Name Event Description Required DVVALs or
Reports
CarrierIDRead A carrier identification has been performed by the stocker system. For
reads that occur at an Input port, the event shall come prior to the
CarrierWaitIn event. For reads that occur at CarrierWaitOut port
locations, the CarrierIDRead event and the CarrierWaitOut events for that
port shall be sent to the host in a consistent sequence (i.e. CarrierIDRead
shall always precede the CarrierWaitOut, or alternatively, the
CarrierWaitOut event shall always precede the CarrierIDRead event).
There are not dependencies with this event at any other location.
CarrierID
CarrierLoc
IDReadStatus
CarrierInstallFailed An INSTALL command has failed. CarrierID
FailureCode
CarrierLocateCompleted A LOCATE remote command has completed. CarrierLocations
CommandID
CarrierRemoveFailed A REMOVE command has failed. CarrierID
FailureCode