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SEMI E125.1-0305 © SEMI 2005 4 1 Purpose 1.1 SOAP Implementation Mapping 1.1.1 The purpose o f this specificati on is to provide an i mplem en tation m apping of the SEMI E125 speci fication to the SOAP 1.1 prot ocol. Th…

SEMI E125.1-0305 © SEMI 2005 3

Table 40 SEMI E125 EnumeratedInteger  EnumeratedIntegerType Translation Table ..........................................24

Table 41 GetStateMachines Operation Binding ..........................................................................................................24

Table 42 GetStateMachines PortType Operation ........................................................................................................24

Table 43 EquipmentMetadataManager Binding..........................................................................................................24

Table 44 Translation Table for Output Arguments for the GetStateMachines Operation ...........................................26

Table 45 SEMI E125 StateMachine  StateMachineType Translation Table ...........................................................26

Table 46 SEMI E125 State  StateType Translation Table .......................................................................................26

Table 47 SEMI E125 Transition  TransitionType Translation Table ......................................................................26

Table 48 SEMI E125 Event  EventType Translation Table ....................................................................................27

Table 49 GetSEMIObjTypes Operation Binding ........................................................................................................27

Table 50 GetSEMIObjTypes PortType Operation ......................................................................................................27

Table 51 EquipmentMetadataManager Binding..........................................................................................................27

Table 52 Translation Table for Output Arguments for the GetSEMIObjTypes Operation .........................................28

Table 53 SEMI E125 SEMIObjType  SEMIObjTypeType Translation Table........................................................28

Table 54 SEMI E125 StateMachineInstance  StateMachineInstanceType Translation Table.................................29

Table 55 Example Parameter References ....................................................................................................................30

Table 56 SEMI E125 EventToParameterMap  EventToParameterMapType Translation Table.............................30

Table 57 GetExceptions Operation Binding................................................................................................................31

Table 58 GetExceptions PortType Operation..............................................................................................................31

Table 59 EquipmentMetadataManager Binding..........................................................................................................31

Table 60 Translation Table for Output Arguments for the GetExceptions Operation.................................................32

Table 61 SEMI E125 EventToParameterMap  EventToParameterMapType Translation Table.............................32

Table 62 GetEquipmentStructure Operation Binding..................................................................................................33

Table 63 GetEquipmentStructure PortType Operation................................................................................................33

Table 64 EquipmentMetadataManager Binding..........................................................................................................33

Table 65 Translation Table for Output Arguments for the GetEquipmentStructure Operation...................................34

Table 66 GetEquipmentNodeDescriptions Operation Binding....................................................................................34

Table 67 GetEquipmentNodeDescriptions PortType Operation.......................................................................

...........34

Table 68 EquipmentMetadataManager Binding..........................................................................................................34

Table 69 Translation Table for Input Arguments for the GetEquipmentNodeDescriptions Operation .......................35

Table 70 Translation Table for Output Arguments for the GetEquipmentNodeDescriptions Operation ....................36

Table 71 SEMI E125 EquipmentNodeDescription  EquipmentNodeDescriptionType Translation Table..............37

Table 72 SEMI E125 Parameter  ParameterType Translation Table.......................................................................38

Table 73 SEMI E125 Constraint  ConstraintType Translation Table......................................................................38

Table 74 SEMI E125 AssociatedParameter  ParameterAssociationType Translation Table...................................38

Table 75 SEMI E125 ParameterClassification  ParameterClassificationType Translation Table ...........................39

Table 76 SEMI E125 ReadWrite  ReadWriteType Translation Table.....................................................................39

Table 77 GetLatestRevision Operation Binding..........................................................................................................39

Table 78 GetLatestRevision PortType Operation........................................................................................................39

Table 79 EquipmentMetadataManager Binding..........................................................................................................40

Table 80 Translation Table for Output Arguments for the GetLatestRevision Operation...........................................40

Table 81 NotifyOnRevisions Operation Binding ........................................................................................................41

Table 82 NotifyOnRevisions PortType Operation ......................................................................................................41

Table 83 EquipmentMetadataManager Binding..........................................................................................................41

Table 84 Translation Table for Input Arguments for the NotifyOnRevisions Operation............................................42

Table 85 Translation Table for Output Arguments for the GetUnits Operation..........................................................42

Table 86 XML Schema................................................................................................................................................42

Table 87 MetadataClient PortType Definitions...........................................................................................................43

Table 88 EquipmentMetadataManager Binding Definitions.......................................................................................43

Table 89 EquipmentMetadataManager Port Type.......................................................................................................43

Table 90 EquipmentMetadataManager Binding..........................................................................................................43

Table 91 MetadataRevised Operation Binding............................................................................................................44

Table 92 MetadataRevised PortType Operation..........................................................................................................44

Table 93 EquipmentMetadataManager Binding..........................................................................................................44

Table 94 Translation Table for Input Arguments for the NotifyOnRevisions Operation............................................44

Table 95 SEMI E125 RevisionNotice 

Revision Translation Table ........................................................................45

SEMI E125.1-0305 © SEMI 2005 4

1 Purpose

1.1 SOAP Implementation Mapping

1.1.1 The purpose of this specification is to provide an implementation mapping of the SEMI E125 specification to

the SOAP 1.1 protocol. This document provides a description of the XML Schema data types used to support the

UML classes defined in SEMI E125, and also describes the WSDL port type and binding definitions used to support

the operations defined by the interfaces specified in SEMI E125.

2 Scope

2.1 Specification Scope

2.1.1 The scope of this specification is the representation of the EqSD model in an XML Schema and corresponding

WSDL port types and bindings. It will not add new domain information or concepts to the SEMI E125 model. The

only additions made are those needed to render useful WSDL or XML Schema.

2.1.2 This specification requires SEMI E132 authentication, and defines requirements for the application of SEMI

E132 concepts to the SEMI E125 specification.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

3 Limitations

3.1 Provisional Specification

3.1.1 This specification is provisional pending the approval of the SEMI E138, SEMI E120.1 and SEMI E132.1.

This specification relies on XML Schema types defined by each of these specifications, and cannot be fully

implemented without these types. Finalization of these specifications is a condition for the removal of the

provisional status of this document.

3.1.2 This specification is provisional pending approval of the SEMI specification for Units for the Semiconductor

Industry. This specification relies on the unit of measure symbols defined in that specification. Finalization of this

specification is a condition for the removal of the provisional status of this document.

4 Referenced Standards

4.1 SEMI Standards

SEMI E121 — Guide for Style & Usage of XML for Semiconductor Manufacturing Applications

SEMI E120.1 — XML Schema for the Common Equipment Model

SEMI E132.1 — Specification for SOAP Binding of Equipment Client Authentication and Authorization

SEMI E125 — Specification for Equipment Self Description (EqSD)

4.2 OMG Standards

Unified Modeling Language (UML) Specification, Version 1.4, OMG Specification 01-09-67,

(http://www.omg.org/technology/documents/modeling_spec_catalog.htm)

4.3 W3C Standards

Extensible Markup Language (XML) 1.0 (Second Edition) — W3C, 6 October 2000

(http://www.w3.org/TR/2000/REC-xml-20001006/)

1 Object Management Group, Inc., 250 First Ave. Suite 100, Needham, MA 02494, USA, Telephone:1.781.444.0404, Fax: 1.781.444.0320,

website: www.omg.org.

2 World Wide Consortium, Massachusetts Institute of Technology (MIT) Computer Science and Artificial Intelligence Laboratory (CSAIL), 32

Vassar Street Room 32-G515, Cambridge, MA 02139, USA Telephone: 1.617.253.2613 Fax: 1.617.258.5999, website: www.w3c.org.

Namespaces in XML — W3C, 14 January 1999 (http://www.w3.org/TR/1999/REC-xml-names-19990114/)

XML Schema Part 0: Primer — W3C, 2 May 2001 (http://www.w3.org/TR/xmlschema-0/)

XML Schema Part 1: Structures — W3C, 2 May 2001 (http://www.w3.org/TR/xmlschema-1/)

XML Schema Part 2: Datatypes — W3C, 2 May 2001 (http://www.w3.org/TR/xmlschema-2/)

XML Path Language (Xpath) — W3C, 16 November 1999 (http://www.w3.org/TR/xpath/)

Web Services Description Language (WSDL) 1.1 — W3C Note, (http://www.w3.org/TR/wsdl)

Simple Object Access Protocol (SOAP) 1.1 — W3C Note, (http://www.w3.org/TR/2000/NOTE-SOAP-20000508/)

4.4 Other Standards

Secure Sockets Layer (SSL) Protocol 3.0 (available from http://wp.netscape.com/eng/ssl3/draft302.txt)

Web Services Interoperability (WS-I): Basic Profile Version 1.0a (available from http://www.ws-

i.org/Profiles/Basic/2003-08/BasicProfile-1.0a.html)

SEMI Specification for XML Semiconductor Common Components

SEMI Specification for the Representation of Measurement Units in XML

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 SOAP — Simple Object Access Protocol

5.1.2 UML — Unified Modeling Language

5.1.3 W3C — World Wide Web Consortium

5.1.4 WSDL — Web Service Description Language

5.1.5 XML — eXtensible Markup Language

5.2 Definitions

5.2.1 UML (Unified Modeling Language) — a notation for representing object-oriented designs and views created

by Booch, Rumbaugh, and Jacobson in order to merge their three popular notations plus aspects of other existing

notations into a single object-oriented notation intended to be usable by all.

5.2.2 XML (eXtensible Markup Language) — a markup language used for representing data rich with context and

content in documents and in communications. XML is an extension of SGML, a document-oriented markup

language. It was created by W3C for use on the Internet.

6 Conventions

6.1 Translating UML to XML Schema

6.1.1 The reader is expected to have a working knowledge of the UML, XML, WSDL, SOAP, and Schema

specifications (see ¶¶4.2 and 4.3). This document does not provide tutorial information on these subjects.

6.1.2 This document follows the guidelines for XML as outlined in SEMI E121.

6.1.3 Some of the key guidelines followed in this document are summarized here:

 Attributes of UML classes from SEMI E125 are generally represented as XML attributes, to improve efficiency

in transferring metadata descriptions from the equipment. Exceptions to this convention are UML attributes

that correspond to data structures or other constructs that cannot be represented as XML attributes, or may

include text values that may need to include non-parsed character data (CDATA).

 Composition associations are mapped to a single XML element (or multiple such elements if the specified

multiplicity is greater than 1).