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SEMI E102-0600 © SEMI 2000 3 3 Limitations 3.1 T he Material Transport and St o r a ge Component provides AMHS Framework level interfaces to interoperable AMHS Equipment. This level o f material transport is factory leve…

SEMI E102-0600 © SEMI 2000 2

Manufacturing Execution System (MES) as a separate

logical software entity. An AMHS is made up of the

AMHS Framework, the system controllers for AMHS

equipment (the software) and the transport and storage

machines (the hardware). In keeping with this tradition,

the CIM Framework views the AMHS as a “black box”

where the interface into that system is visible, but the

inner workings and control of that system is the

responsibility of the AMHS supplier and not in the

domain of the MES. The CIM Framework specifies the

Material Transport and Storage Component (MTSC) as

the MES level interface to AMHS capabilities.

2.4 This specification does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this specification to

establish appropriate safety and health practices and

determine the applicability of regulatory limitations

prior to use.

E81 – CIM Framework

Domain Architecture

E96 – CIM Framework

Technical Architecture

Global Declarations and Abstract Interfaces

Factory Services

Factory Operations

Product Management

Specification

Production Machine

Equipment Tracking and

Maintenance

Advanced Process Control

Scheduling

Factory Labor

Material Transport & Storage

Interbay Transport

System Controller

Stocker

System Controller

Intrabay Transport

System Controller

Intrabay Transport

Equipment

Stocker

Equipment

Interbay Transport

Equipment

nteroperable AMHS Equipmen

IBSEM

Stocker SEM

IBSEM

E84

Production

Equipment

SECS,GEM

AMHS

Framework

Durables Management

Figure 1

AMHS Environment

SEMI E102-0600 © SEMI 20003

3 Limitations

3.1 The Material Transport and Storage Component

provides AMHS Framework level interfaces to

interoperable AMHS Equipment. This level of material

transport is factory level movement, i.e., the transport

of product and durables between machines, areas or

material tracking locations. The Material Tracking and

Storage Component does not provide interfaces that

make material movement within machines visible.

3.2 Provisional Status — This specification is

designated as provisional due to known areas that need

to be completed. The following items summarize the

deficiencies of the provisional specification to be

addressed before a subsequent ballot to upgrade it to

full standard status.

3.2.1 Dependence on Global Declarations and

Abstract Interfaces — Components of this document

reference global declarations and specialize abstract

interfaces for material, resource and job concepts. The

provisional specification for these declarations and

interfaces was balloted and recommended by the SEMI

Information and Control Committee in July, 1999.

When this specification is published a revision will be

undertaken to clearly define the relationship of this

specification to those common elements of the CIM

Framework.

3.2.2 Dependence on Durables Management

Component — The Material Transport and Storage

Component depends upon interfaces specified as part of

the Durables Management Component of the CIM

Framework. This document includes only the required

interfaces from Durables Management. Those

interfaces, found in Section 6.2.3, will be removed from

this document when the Durables Management

Component of the CIM Framework is adopted in a

future ballot.

3.2.3 Dependence on Machine Abstract Interface

Group — The Material Transport and Storage

Component depends upon interfaces specified as part of

the Machine Abstract Interface Group (Machine AIG)

of the CIM Framework. This document includes only

the required interfaces from the Machine AIG. Those

interfaces, found in Section 6.2.4, will be removed from

this document when the Machine AIG of the CIM

Framework is adopted in a future ballot.

3.2.4 Dependence on Factory Operations Component

— The Material Transport and Storage Component

depends upon interfaces specified as part of the Factory

Operations Component of the CIM Framework. This

document includes only the required interfaces from the

Factory Operations Component. Those interfaces,

found in Section 6.2.5, will be removed from this

document when the Factory Operations Component of

the CIM Framework is adopted in a future ballot.

3.2.5 Deterministic Prediction of Transport Time —

The responsibility for providing estimates of predicted

transport time of future TransportJobs in a deterministic

way is beyond the scope of the Provisional

Specification. This capability may be offered in future

upgrades of this specification based on added

experience with such predictions. It may be found that

heuristic methods for transport time prediction are the

most practical way to provide such estimates.

4 Referenced Standards

4.1 SEMI Documents

SEMI E81 — Provisional Specification for CIM

Framework Domain Architecture

4.2 Other Documents

ISO/IEC International Standard 14750 (also ITU-T

Recommendation X.920): Information Technology –

Open Distributed Processing – Interface Definition

Language

UML Notation Guide, Version 1.1, document number

ad/97-08-05, Object Management Group

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 AMHS — Automated Material Handling System

5.1.2 MTSC — Material Transport and Storage

Component

6 Requirements

6.1 The following sections specify the interfaces that

comprise the Material Transport and Storage

Component of the CIM Framework. Additionally, the

subsets of interfaces from Durables Management,

Machine Abstract Interface Group, and Factory

Operations required to support Material Transport and

Storage are included here pending future ballots that

will address the full scope of these other specifications.

6.1.1 Figure 2 illustrates the context of the Material

Transport and Storage Component within the CIM

Framework. The Factory Operation component

requests the transport of material by the Material

Transport Manager which provides services for creation

1 ISO Central Secretariat, 1, rue de Varembé, Case postale 56, CH-

1211 Genève 20, Switzerland

2 UML Notation Guide v1.1 is available to the general public at

http://www.omg.org/cgi-bin/doclist.pl, +1-508-820 4300, Object

Management Group, Inc. , Framingham Corporate Center, 492 Old

Connecticut Path, Framingham, MA 01701.

of Transport Jobs. The Material Transport and Storage

Component uses services provided by the Machine AIG

to access interfaces of Machines and Ports that serve as

the source or destination of Transport Jobs. The MES

Factory defines areas within a factory which represent

groups of machines. Finally, Durables Management

provides the services needed to manage the material

containers that are moved.

6.1.2 Figure 3 shows the Material Transport and

Storage Component information model, including the

inherited interfaces and the associations between

interfaces. These interfaces are fully defined in Sections

6.3 and 6.4. The interfaces associated with the Material

Transport and Storage are as follows:

1. TransportJobSupervisor – abstract interface,

2. MaterialTransportManager,

3. MaterialTransportController, and

4. TransportJob.

6.2 Required Subsets of Future CIM Framework

Specifications

6.2.1 This specification depends on interfaces from

Durables Management Component, the Machine

Abstract Interface Group and the Factory Operations

Component that will eventually be contained in future

CIM Framework component specifications. They are

included with this document to support a complete

specification for AMHS support within the CIM

Framework. When these items are balloted as separate

documents, they will be removed from this

specification and referenced in their full form.

6.2.2 Figure 4 illustrates the dependencies of the

Material Transport and Storage Component.

Material

Transport

Manager

Material Transport and Storage

Component

Factory

Operations

requests material

movement

defines

factory areas

manages material

containers

MES Factory

Durables

Management

Equipment

Tracking and

Maintenance

tracks

machine and

port status

Figure 2

Material Transport and Storage Component Context