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SEMI E52-0703 © SEMI 1995, 2003 47 NOTICE: SEMI makes no warranties or representations as to the su itability of the standard set fo rth herein for any particular application . The determinati on of the suitability o f t…

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SEMI E52-0703 © SEMI 1995, 2003 46
MIXED GAS NAME SYMBOL CODE
50%HYDROGEN BROMIDE/HYDROGEN CHLORIDE 50%HBr/HCI 0650
50%HYDROGEN/NITROGEN 50%H2/N2 0850
50%NITROGEN DIOXIDE/AMMONIA 50%NO2/NH3 0851
50%NITROGEN/HELIUM 50%N2/He 0852
50%NITROGEN/OXYGEN 50%N2/O2 0631
50%PHOSPHINE/NITROGEN 50%PH3/N2 0518
50%PHOSPHINE/SILANE 50%PH3/SiH4 0632
50%SILANE/HELIUM 50%SiH4/He 0521
50%SILANE/HYDROGEN 50%SiH4/H2 0633
50%SULFUR DIOXIDE/NITRIC OXIDE 50%SO2/NO 0853
6%CARBON DIOXIDE/NITROGEN 6%CO2/N2 0854
6%HYDROGEN CHLORIDE/OXYGEN 6%HCl/O2 0855
6%HYDROGEN/NITROGEN 6%H2/N2 0856
6%OZONE/OXYGEN 6%O3/O2 0857
6.5%DIBORANE/15%SILANE/NITROGEN 6.5%B2H6/15%SiH4/N2 0634
6.5%DIBORANE/HYDROGEN 6.5%B2H6/H2 0635
6.5%DIBORANE/NITROGEN 6.5%B2H6/N2 0858
7%CARBON DIOXIDE/10%HYDROGEN/20%CARBON
MONOXIDE/NITROGEN 7%CO2/10%H2/20%CO/N2 0748
7%HYDROGEN/ARGON 7%H2/Ar 0859
7%HYDROGEN/HELIUM 7%H2/He 0883
7%METHYLENE CHLORIDE/3%OZONE/AIR 7%CH2CI2/3%O3/Air 0685
7%OZONE/OXYGEN 7%O3/O2 0901
7.5%PHOSPHINE/SILANE 7.5%PH3/SiH4 0676
8%CARBON TETRAFLUORIDE(FREON-14)/OXYGEN 8%CF4/O2 0574
8%DIBORANE/ARGON 8%B2H6/Ar 0860
8%DIBORANE/NITROGEN 8%B2H6/N2 0861
8%GERMANE/HYDROGEN 8%GeH4/H2 0664
8%HYDROGEN/ARGON 8%H2/Ar 0692
8%HYDROGEN/NITROGEN 8%H2/N2 0727
8%OXYGEN/CARBON TETRAFLUORIDE(FREON-14) 8%O2/CF4 0613
8%OZONE/OXYGEN 8%O3/O2 0639
8%PHOSPHINE/HELIUM 8%PH3/He 0667
8%PHOSPHINE/NITROGEN 8%PH3/N2 0620
8%PHOSPHINE/SILANE 8%PH3/SiH4 0636
8%PROPANE/10%AMMONIA/AIR 8%C3H8/10%NH3/Air 0714
8.2%PROPANE/9.8%AMMONIA/AIR 8.2%C3H8/9.8%NH3/Air 0715
8.6%ARGON/NITROGEN TRIFLUORIDE 8.6%Ar/NF3 0706
9.4%ARGON/NITROGEN TRIFLUORIDE 9.4%Ar/NF3 0705
11 Related Document
11.1 Data Sheet
Schumacher Material Safety Data Sheet, No. 48.1 JN, Revision Date 8/94
14
14 Schumacher, 1969 Palomar Oaks Way, Carlsbad, CA 92009-1307, 619.931.9555
SEMI E52-0703 © SEMI 1995, 2003 47
NOTICE: SEMI makes no warranties or representations as to the suitability of the standard set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E56-1104 © SEMI 1996, 2004 1
SEMI E56-1104
TEST METHOD FOR DETERMINING ACCURACY, LINEARITY,
REPEATABILITY, SHORT-TERM REPRODUCIBILITY, HYSTERESIS,
AND DEADBAND OF THERMAL MASS FLOW CONTROLLERS
This test method was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published
November 2004. Originally published December 1996.
1 Purpose
1.1 The purpose of this document is to provide a
standardized method to quantify the accuracy, linearity,
repeatability, short-term reproducibility, hysteresis, and
deadband of a thermal mass flow controller.
1.2 The intent of this document is not to suggest any
specific testing program but to specify the test method
to be used when testing for parameters that are covered
by this method. The user might use this document to
check significant performance characteristics such as
accuracy, precison, bias, repeatability, linearity, short-
term reproducibility, and deadband under a set of
closely controlled test conditions.
1.3 The significance of the accuracy calculations in
this method is to allow an MFC user to transfer a
process from one manufacturing tool to another and to
exchange MFCs within a single manufacturing tool
while maintaining process control.
2 Scope
2.1 This document describes the conditions and
procedures for testing the accuracy, linearity,
repeatability, hysteresis, and deadband of thermal mass
flow controllers (MFCs). Because of the generic nature
of this document, not all test procedures apply to all
types of MFCs.
2.2 This document provided a common basis for
communication between manufacturers and users.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations prior
to use.
3 Limitations
3.1 It is not practical to evaluate performance under all
possible combinations of operating conditions. This
test procedure should be applied under laboratory
conditions; its intent is to collect sufficient data to form
a judgement of the field performance of the MFC being
tested.
4 Referenced Standards
4.1 SEMI Standard
SEMI E17 — Guideline for Mass Flow Controller
Transient Characteristics Tests
4.2 ASME Standard
1
ASME MFC-10M — Method for Establishing
Installation Effects on Flowmeters
4.3 ISA Standard
2
ISA S51.1 — Process Instrumentation Terminology
NOTICE: Unless otherwise indicated, all documents
cited shall be the latest published versions.
5 Terminology
5.1 Abbreviations & Acronyms
5.1.1 A — Measured Value
5.1.2 A
a
— average measured value
5.1.3 A
a
— average measured value at 100% setpoint
5.1.4 AD — accuracy of the DUT
5.1.5 AD
f
— accuracy of the flow standard
5.1.6 AS — accuracy of setpoint
5.1.7 A
l
— measured value, down cycle
5.1.8 A
u
— measured value, up cycle
5.1.9 B — bias
5.1.10 D — deadband value
5.1.11 DBD — deadband of device
1 American Society of Mechanical Engineers, Three Park Avenue,
New York, NY 10016-5990, USA. Telephone: 800.843.2763
(U.S./Canada), 95.800.843.2763 (Mexico), 973.882.1167 (outside
North America), Website: www.asme.org
2 Instrument Society of America, 67 Alexander Drive, Research
Triangle Park, NC 27709, USA Telephone: 919.549.8411 Website:
www.isa.org