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SEMI E40-0705 © SEMI 1995, 2005 17 10 Messaging Services Detail 10.1 This secti on defines the m essaging services required to i mplem ent the processing m anagement concepts. The messages were introduced in ¶8.1. T h es…

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9 Object Definitions
9.1 Processing management defines one standard object, the Process Job.
9.2 Process Job Object Definition — The process job is a dynamic object created by the processing resource as
requested by the supervisor. It tracks progress of the operations required and is deleted by the processing resource
automatically upon completion. The process job is uniquely identified by the PRJobID attribute. The object attribute
notation used in the table below is described in Conventions, ¶5.2.
9.2.1 The attributes in Table 2 shall be accessible using Object Services Standard (SEMI E39).
Table 2 Process Job Attributes
Attribute Name Definition Rqmt Access Form
ObjID An identifier for the service user. It is set when the
process job is created.
Y RO Text
ObjType The object type. Y RO Text:
“PROCESSJOB”
PauseEvent List of event identifiers that cause the equipment to
automatically transition to the PAUSING/PAUSED
states when one of the listed events is triggered.
N RO List of:
EventID
PRJobState A unique sub-state of the job according to the process
job state model in Figure 4.
Y RO Enumerated:
QUEUED/POOLED
SETTING UP
WAITING FOR START
PROCESSING
PROCESS COMPLETE
PAUSING
PAUSED
STOPPING
ABORTING
STOPPED
ABORTED
PRMtlNameList List of identifiers of the material being processed. Y RO List of:
PRMtlName
PRMtlType Identifies the type of material being processed. Y RO Enumerated
PRProcessStart Indicates that the processing resource start processing
immediately when ready.
N RO Boolean:
TRUE — Automatic start
FALSE — Manual start
PRRecipeMethod Indication of recipe specification type, whether using
is applied and which method is used.
Y RO Enumerated:
Recipe only
Recipe with Variable Tuning
RecID Identifier of the recipe applied. Y RO Text
RecVariableList List of variables supporting a recipe method. N RO List of: RecipeVariable
9.2.2 A number of the ProcessJob attributes are composite data types. The constituent data is defined in Table 3.
Table 3 Attribute Data Definitions
Data Itentifier Description Form
PRMtlName Textual identifier of the material being processed. Text
RecipeVariable Variables supporting a recipe method. Structure composed of:
RecipeVarName
RecipeVarValue
RecipeVarName The name of the recipe variable. Text
RecipeVarValue Value of the recipe variable. Depends on variable
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10 Messaging Services Detail
10.1 This section defines the messaging services required to implement the processing management concepts. The
messages were introduced in ¶8.1. These services are independent of the messaging protocol used. They may be
mapped to SECS-II (SEMI E5) or to other comparable protocols.
10.1.1 These messaging services define the messages to be used, the nature of the parameters contained within the
messages, and data type of the parameters. Not defined here is the internal structure of the actual messages as
transferred, including order of the parameters and how various data structures and data types are represented.
10.1.2 The service message notation used in the tables below is described in Conventions, ¶5.3.
10.2 Service List — The following messages are exchanged between host and equipment for the purpose of
accomplishing processing management tasks.
Table 4 Service List
Message Name Type Description
PRGetAllJobs R Get a list of the jobs and their states for all jobs which have not completed.
PRGetSpace R Get the number of jobs which can currently be created on the resource.
PRJobAlert N Notification by the processing resource that the process job is setting up, processing,
completed process, or that the job is completed.
PRJobCommand R Command which affects the process job.
PRJobCreate R Supervisor (service-user) request that a process job be performed.
PRJobCreateEnh R User request for job to be done. User assigns a unique job identifier.
PRJobDequeue R Removes (deletes) process job(s) from the queue.
PRJobEvent N Notification by the processing resource that a process-related event has occurred.
PRJobMultiCreate R Create several jobs which may be dissimilar. User assigns unique job identifiers.
PRJobSetRecipeVariable R User request for setting a new value to one of more recipe variable parameters.
PRJobSetStartMethod R Create a set of similar process jobs. User assigns unique job identifiers.
PRSetMtrlOrder R Request the service to use a specific methodology for processing order.
10.3 Parameter Dictionary
Table 5 Parameter Dictionary, Part 1
Parameter Name Definition Form: Possible Values
CmdParameter Parameter supporting a command type. Structure composed of:
CmdParmName
CmdParmValue
CmdParmName The name of the parameter. Text
CmdParmValue Value of the parameter. Varies per parameter
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Parameter Name Definition Form: Possible Values
ErrorCode Contains the code for the specific error found. Enumerated:
PRJobCreate, PRJobCreateEnh,
PRJobMultiCreate:
Parameters improperly specified
Insufficient parameters specified
Unsupported option requested
Busy (no queueing or queue full)
PRJobCreateEnh, PRJobMultiCreate:
Object identifier in use
PRJobCommand:
Parameters improperly specified
Insufficient parameters specified
Unsupported option requested
Command not valid for current state
PRJobComplete:
No material altered
Material partially processed
All material processed
Recipe specification related error
Failed during processing
Failed while not processing
Failed due to lack of material
Job aborted
Job stopped
Job cancelled
ErrorText Text in support of the error code. Text
PRAck Indicates whether the activity was successful. Boolean:
TRUE — Successful
FALSE — Unsuccessful
PRCmdName Indicates which process job command to perform. Text:
ABORT
STOP
CANCEL
PAUSE
RESUME
STARTPROCESS
PREventData Data related to the specific event. Varies per parameter reported
PREventID Identifier of the specific event which occurred. Enumerated:
Unique collection event ID for
Waiting for Material and Process Job State
Change events.