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SEMI E109.1-0704 © SEMI 2002, 2004 7 Function SECS-II Data Item Used by S3F25 to differe ntiate betwee n port related “ChangeServiceSta tus,” “Can celReservationatPo rt,” and “ReserveAtPort” services. Note: the text betw…

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SEMI E109.1-0704 © SEMI 2002, 2004 6
Parameter Name Format SECS-II Data Item SECS-II
Format
ObjectActionParameter
Result
List on one or more arguments (parameters) providing
additional information concerning the result of the action
requested.
L,n
1. L,2
1. <SPNAME
1
>
2. <SPVAL
1
>
:
m. L,2
1. <SPNAME
m
>
2. <SPIVAL
m
>
RPMAcknowledge Enumerated SVCACK 10
ServiceParameterName " ReticleID"
" PortID"
" DestinationLocation"
" SourceLocation"
" QualificationIntervalTime"
“Status”
SPNAME 20
ServiceParameterValue Depends on parameter used SPVAL 10, 20, 51, 52
Status List of one or more arguments (parameters) providing
information concerning the result of the action requested.
Structure composed of ErrorText and ErrorCode.
L,m
1. L,2
1. <ERRCODE
1
>
2. <ERRTEXT
1
>
:
m. L,2
1. <ERRCODE
m
>
2. <ERRTEXT
m
>
ErrorCode Enumerated ERRCODE 51
ErrorText Text ERRTEXT 20
5.5 SECS-II Data Items without Corresponding E109 Parameters
5.5.1 Table 4 contains the SECS-II data items that do not correspond to SEMI E109 service parameters.
Table 4 Additional Data Item Requirements Table
Function SECS-II Data Item
Used by S3,F17 to differentiate between “Bind”,
“CancelPod”, “CancelPodNotification”, “CancelPodOut”,
“CancelPodAtPort”, “CancelBind”, “Clamp”,
“ClosePod”, “IndexDown”, “IndexUp”, “OpenPod”,
“PodComplete”, “PodIn”, “PodNotification”, “PodOut”,
“PodRelease”, “PodTagReadData”, “PodTagWriteData”,
“ProceedWithPod”, and “Unclamp” services.
Note: the text between the quotes is the actual value used
in the parameter CARRIERACTION.
CARRIERACTION
Used to satisfy SECS-II conventions for linking a multi-
block inquiry with a subsequent multi-block message.
Neither required nor specified by RPMS.
DATAID
Used to inform receiver of total message length size for
SECS-II multi-block conventions. Neither required nor
specified by SEMI E109.
DATALENGTH
Used to satisfy SECS-II multi-block requirements.
Neither required nor specified by SEMI E109.
GRANT
SEMI E109.1-0704 © SEMI 2002, 2004 7
Function SECS-II Data Item
Used by S3F25 to differentiate between port related
“ChangeServiceStatus,” “CancelReservationatPort,” and
“ReserveAtPort” services. Note: the text between the
quotes is the actual value used in the parameter
PORTACTION.
PORTACTION
Used by S3F27 to specify desired Access mode. ACCESSMODE
Used by S3F35 to differentiate between
“ReticleTransferJob” and “CancelReticleTransferJob”
JOBACTION
6 Variable Data Item Mapping
6.1 This sections shows the specific SECS-II data classes, and formats needed for the SECS-II implementation of
SEMI E109 data items.
Table 5 Variable Data Item Mapping Table
Variable Name Class Format
Access Mode DVVAL 51 (U1)
Access Mode
i
SV 51 (U1)
AlarmInfo DVVAL L,2
1. Alarm number (U4)
2. Alarm Description (A)
AvailPartitionCapacity DVVAL 51 (U1)
AvailPartitionCapacity
i
SV 51 (U1)
BufferCapacityList SV L,n
1.<BufferPartitionInfo
i
>
.
.
n.<BufferPartitionInfo
i
>
BufferPartitionInfo DVVAL L,4
1.<PartitionID>
2.<PartitionType>
3.<AvailPartionCapacity>
4.<PartitionCapacity>
BufferPartitionInfo
i
SV L,4
1.<PartitionID
i
>
2.<PartitionType
i
>
3.<AvailPartionCapacity
i
>
4.<PartitionCapacity
i
>
BypassReadID DVVAL 11 (BOOLEAN)
PodID DVVAL 20 (A[1–64])
PodID
i
SV 20 (A[1–64])
PodLocationMatrix SV L,n
1.L,2
1.<LocationID
1
>
2.<PodID
1
>
.
.
n.L,2
1.<LocationID
n
>
2.<PodID
n
>
SEMI E109.1-0704 © SEMI 2002, 2004 8
Variable Name Class Format
LocationID DVVAL 20 (A[1–64])
LocationID
i
SV 20 (A[1–64])
PartitionCapacity DVVAL 51 (U1)
PartitionCapacity
i
SV 51 (U1)
PartitionID DVVAL 20 (A[1–64])
PartitionID
i
SV 20 (A[1–64])
PartitionType DVVAL 20 (A[1–64])
PartitionType
i
SV 20 (A[1–64])
PortAssociationState DVVAL 51 (U1)
Enumerated as:
0 = NOT ASSOCIATED
1 = ASSOCIATED
PortAssociationState
i
SV 51 (U1)
Enumerated
0 = NOT ASSOCIATED
1 = ASSOCIATED
PortAssociationStateList SV L,n
1.<PortAssociationState
i
>
.
.
n <PortAssociationState
n
>
PortID DVVAL 51 (U1)
PortID
i
SV 51 (U1)
PortStateInfo DVVAL L,2
1.<PortAssociationState>
2. <PortTransferState>
PortStateInfo
i
SV L,2
1.<PortAssociationState
i
>
2. <PortTransferState
i
>
PortStateInfolist SV L,n
1.<PortStateInfo
1
>
.
.
n.<PortStateInfo
n
>
PortTransferState DVVAL 51 (U1)
PortTransferState
i
SV 51 (U1)
PortTransferStateList SV L,n
1.<PortTransferState
1
>
.
.
n.<PortTransferState
n
>
Reason DVVAL 51 (U1)
ReticleIDVerification ECV 11 (BOOLEAN)
ReticleParticleInspection ECV 11 (BOOLEAN)