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SEMI E41.1-96 © SEMI 1996 2 7 Implementation Details 7.1 Several capabilities of the Exc e p t ion Management Service s (EMS) are accessed through the Object Services Standard. The Exception Objects are persistent. An Ob…
SEMI E41.1-96 © SEMI 19961
SEMI E41.1-0996
SECS-II SUPPORT FOR EXCEPTION MANAGEMENT STANDARD
1 Purpose
This document maps the services and data of its prime document, SEMI E41, to SECS-II streams and functions and
data definitions.
2 Scope
This is the standard way to implement the Exception Management Standard, which provides remote control
communication of exceptions and recovery, using the SECS-II message format.
3 Referenced Documents
3.1 SEMI Standards
SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)
SEMI E41 — Exception Management (EM) Standard
4 Terminology
None.
5 Mapping of Exception Ma nagement Messages
Table 1 Exception Management Messages SECS-II Mapping
Service Message Name Stream, Function SECS-II Name
EXPost Notify S5F9,F10 Exception Post Notify/Confirm
EXCleared Notify S5F11,F12 Exception Clear Notify/Confirm
EXRecover Request S5F13,F14 Exception Recover Request/Acknowledge
EXRecoveryComplete Notify S5F15,F16 Exception Recovery Complete Notify/Confirm
EXRecoveryAbort Request S5F17,F18 Exception Recovery Abort Request/Acknowledge
6 Exception Parameters Mapping
Table 2 Exceptions Data Item Mapping
Parameter SECS-II Data Item
ErrorCode ERRCODE
ErrorText ERRTEXT
EXAck ACKA
EXEnabled EXENABLED
EXID EXID
EXMessage EXMESSAGE
EXRecovery EXRECVRA
EXState EXSTATE
EXType EXTYPE
Timestamp TIMESTAMP
SEMI E41.1-96 © SEMI 1996 2
7 Implementation Details
7.1 Several capabilities of the Exception Management Services (EMS) are accessed through the Object Services
Standard. The Exception Objects are persistent. An Object Services compliant implementation of EMS will allow
access to all the attributes specified in the SEMI E5 Object definition table for an Exception Object.
All implementations shall use Object Service’s GetAttr and SetAttr to access:
EXENABLED
EXSTATE
NOTE 1: EXSTATE is read-only.
NOTICE: These standards do not purport to address safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the standards set forth herein for any particular application. The determination of the suitability of the standard is
solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature respecting any materials mentioned herein. These standards are
subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
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the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI E42-0704 © SEMI 1995, 2004 1
SEMI E42-0704
RECIPE MANAGEMENT STANDARD: CONCEPTS, BEHAVIOR, AND
MESSAGE SERVICES
This standard was technically approved by the Global Information & Control Committee and is the direct
responsibility of the Japanese Information & Control Committee. Current edition approved by the Japanese
Regional Standards Committee on April 30, 2004. Initially available at www.semi.org June 2004; to be
published July 2004. Originally published September 1995; previously published February 2000.
CONTENTS
1 Introduction
1.1 Purpose
1.2 Scope
1.3 Referenced Documents
1.4 Definitions
1.4.1 Objects
1.4.2 Services
1.4.3 Form
1.4.4 Recipe Management
1.5 Conventions
1.5.1 Text String Restrictions
1.5.2 Harel State Model
1.5.3 Objects
1.5.3.1 OMT Object Information Model
1.5.3.2 Object Attribute Representation
1.5.4 Service Message Representation
1.6 Requirements
1.7 Document Structure
1.8 Applicable Documents
2 Overview of RMS
2.1 Recipe Management Models
2.2 Major Objects in RMS
2.2.1 Recipes
2.2.2 Recipe Namespace
2.2.3 Recipe Namespace Manager
2.2.4 Recipe Executor
3 Recipes
3.1 Motivations
3.2 Basic Concepts
3.2.1 Types of Recipes
3.2.2 Recipe Structure
3.2.2.1 Recipe Body
3.2.3 Recipe Identification
3.2.3.1 Recipe Name
3.2.3.2 Recipe Class
3.2.3.3 Version
3.2.3.4 Recipe Identifiers
3.2.4 Advanced Recipe Capabilities
3.2.4.1 Multi-Part Recipes
3.2.4.2 Variable Parameters
3.2.5 Attributes
3.2.5.1 Descriptors
3.3 Full and Minimal Recipe Models
3.4 Managed Recipes
3.4.1 Generic Attributes
3.4.1.1 Timestamp Attributes
3.4.1.2 Length Attributes
3.4.1.3 Descriptors
3.4.2 Managed Recipe Object Attribute
Definitions
3.4.2.1 Generic Attribute Definitions
3.4.2.2 Agent-Specific Attribute Definitions
3.4.2.3 Minimal Managed Recipe
4 Recipe Namespace
4.1 Motivations
4.2 Namespace Model
4.3 Namespace Specifications
4.4 Member Agents
4.5 Illustrations
4.6 Attribute Definition Tables