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SEMI E94-0705 © SEMI 2000, 2005 6 Control Job Carrier ProcessJob (SEMI E40) Substrate uses 1..* specifies Equipment manage s 0..* 0..* 0..* 0..* 0..* Mater ial 1..* manage s specifies holds 0..1 Figure 1 ControlJob Objec…

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SEMI E94-0705 © SEMI 2000, 2005 5
7.4 Operational Descriptions
7.4.1 The ProcessJob as referenced in the specification of the control job model is the SEMI E40 process job.
Within a ProcessJob the material processing order is managed by the equipment. For some equipment types, the
user may be able to configure the material processing order. If available, this feature shall be fully documented by
the supplier (see SEMI E40).
7.4.2 To support a simpler interface for single substrate processing, it is suggested to use the PRJobMultiCreate (see
SEMI E40) service.
7.4.3 The use of control jobs restricts some SEMI E40 functionality. In particular, the equipment’s queue
management functionality for process jobs is super-seded by the job order as defined in the control job.
7.4.4 The relationship between control jobs and process jobs varies by equipment type. The equipment supplier
should document this relationship. In general aborting or stopping a process job does not stop or abort the control
job. Equipment is responsible to disposition material correctly depending on how a process job ends. In the case of
equipment types that always have a one to one relationship between a control job and a process job it may be
convenient for a process job abort or stop to automatically abort the respective control job. In the same sense, if a
control job specifies more than one process job, it may be convenient for an abort or stop of all process jobs to
automatically abort or stop the respective control job.
8 ControlJob Object Model
8.1 This specification only standardizes the ControlJob object’s interface. The other objects provide a context for
the ControlJob interface. Since only the interface is standardized, it is not a requirement for equipment to
implement a control job object, it is only required that the equipment provide an external interface that provides the
services and behavior defined for the ControlJob.
8.2 Material to Job Linkage
8.2.1 The equipment has relationships with many other components not illustrated in Figure 1. In particular, from
its knowledge based on substrate and carrier tracking capabilities, the equipment shall connect the process job
material list to the materials in the carriers that it has. It is the responsibility of the factory host to make sure that the
description or identifiers of material contained in carriers can be mapped to the material identifiers in the process job
definition.
8.3 Control Jobs and Carriers
8.3.1 A control job may specify work for several carriers. The supplier shall document the behavior of the
equipment in the case where a carrier is specified for use in more than one control job.
8.4 Attribute Definitions
8.4.1 The attributes in Table 1 shall be accessible using the Object Services standard (SEMI E39). Object services
is a set of messages which may be required of any service provider which is modeled by objects. An object model
for a service provides a consistent naming convention for exchanging information between the service provider and
user. Object services implementations shall be consistent with the service’s object and state models. For instance, if
an attribute can only be modified in a certain state, then a request to set that attribute when the model is in the wrong
state shall be rejected (fail). ControlJob Attributes shall be modifiable if and only if the ControlJob is not in either
the EXECUTING or COMPLETED states by using OSS to change them (see ¶14.3.1).
SEMI E94-0705 © SEMI 2000, 2005 6
ControlJob
Carrier
ProcessJob
(SEMI E40)
Substrate
uses
1..*
specifies
Equipment
manages
0..*
0..*
0..*
0..* 0..*
Material
1..*
manages
specifies
holds
0..1
Figure 1
ControlJob Object Model
Table 1 ControlJob Attributes
Name Definition Rqmt Access Form
ObjID Host defined identifier of the control job. Y RO Text
ObjType Object type Y RO Text = ‘ControlJob’
CurrentPRJob Holds the identifiers of any process job in the active
state (i.e., in the Executing, Stopping, Aborting or
Pause states).
Y RO (list of)
PRJobID
(see SEMI E40)
DataCollectionPlan Identifier for a data collection plan to be used during
execution of the control job.
N RW Text
CarrierInputSpec A list of carrierID for material that will be used by
the ControlJob. An empty list is allowed.
Y RW (list of)
CarrierID
MtrlOutSpec Maps material from source to destination after
processing. For uni-carrier operation, the list shall
be empty. The list shall also be empty, if
CarrierInputSpec is an empty list.
Y RW List of Structure:
SourceMap
DestinationMap
MtrlOutByStatus List structure which maps locations or Carriers
where processed material will be placed based on
material status.
N RW List of structure:
MaterialStatus
DestinationMap
SEMI E94-0705 © SEMI 2000, 2005 7
Name Definition Rqmt Access Form
PauseEvent Identifier of a list of events on which the Control Job
shall PAUSE.
N RW (list of)
EventID
PRJobStatusList A list of all process jobs managed by this Control
Job and their associated status.
Y RO (list of)
PRJobID
PRJobState
(see SEMI E40)
ProcessingCtrlSpec A list of structures that defines the process jobs and
rules for running each that will be run within this
ControlJob.
Y RW (list of)
Structure:
PRJobID
ControlRule
OutputRule
ProcessOrderMgmt Define the method for the order in which process
jobs are initiated.
Y RW Enumeration:
LIST
ARRIVAL
OPTIMIZE
StartMethod A logical flag that determines if the ControlJob can
start automatically. A user start may come through
either the host connection or the operator console.
Y RO Boolean:
TRUE – Auto
FALSE – UserStart
State The current state of the ControlJob. Y RO Enumerated:
per State Model
8.4.2 A number of the ControlJob attributes are composite data types. The constituent data is defined in Table 2.
Table 2 Attribute Data Definitions
Data Identifier Description Form
CarrierID The identifier of a carrier that is the source or destination for substrates. Text
ControlRule Provides additional job control functionality. It is equipment type dependent. It may
be used to modify processing based on processing results. Use of this attribute is not
required for equipment, which does not support it. Suppliers shall document the use
of this attribute when supported.
(list of)
Structure:
RuleName
RuleValue
Destination The identifier of a substrate location at which material can be placed. (Identifier
should conform to standards for substrate tracking.)
Text
DestinationMap Describes carrier positions into which finished material will be placed. If the list of
carrier positions is empty, then follow sequential order of source.
Structure:
CarrierID
List of
SubstrateLocation
MaterialStatus ControlJob processing assigns this value to finished material. The association of
MaterialStatus to Destination enables ControlJob processing to put material at the
desired destination.
Equipment
dependent
enumeration
OutputRule Defines the MaterialStatus (such as Good, Reject, Aborted, Monitor, etc.) based on
results of the process job.
Equipment
dependent
PRJobID A process job identifier as defined by SEMI E40. Host must supply same name in the
ProcessingCtrlSpec as when it requested creation of process job. NOTE: SEMI E40
process jobs link material to a recipe.
See SEMI E40.
Rule Value The value used by the equipment for execution of a control rule. Equipment
dependent
RuleName Identifier of a control rule. Text
SourceMap Describes the locations from which material is taken for processing. If the list of
location is empty, then assume the default of ascending order.
Structure:
CarrierID
List of
SubstrateLocation