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SEMI D25-0600 E © SEMI 2000, 2003 7 x y z x y z ≤ 1200 ≤ 1100 950 800 ≤ 830 Unit: mm Skid 100 <150 Figure 5 Packing Box Concept

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SEMI D25-0600
E
© SEMI 2000, 2003 6
Spacer Type
Interleaf Type
Glass Substrate
Spacer
Protective
Packaging
Glass Substrate
Interleaf
Figure 4
Separator Contact Types
SEMI D25-0600
E
© SEMI 2000, 2003 7
x
y
z
x
y
z
≤ 1200
≤
1100
950
800
≤
830
Unit: mm
Skid
100
<150
Figure 5
Packing Box Concept
SEMI D25-0600
E
© SEMI 2000, 2003 8
Vertical
Loading/Unloading
Horizontal
Loading/Unloading
(Reference)
Figure 6
Loading/Unloading Method