semi合集-English.pdf - 第291页

SEMI E47.1-0305 © SEMI 1997, 2005 6 y 52 =165.5± 0.5 (at seal zones, etc.)  166 (el sewhere) x 62  188.5 (front c lam p flange) y 53  190 roboti c handli ng flange (see Fi gure 12) bila tera l datum pl ane front si de…

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SEMI E47.1-0305 © SEMI 1997, 2005 5
z
67
79.5
z
66
55.5
z
68
133.5
(253.5)
z
69
157.5
(277.5)
y
60
155
facial
datum plane
horizontal datum plane of FOUP nest or load port
horizontal datum plane inside FOUP
z
41
0
y
53

190
y
56 =189.75±0.25
(at bottom rail)
bottom conveyor rail
z
43 =2±1
y
58
75
y
50
130
y
51
140
z
44 =11±0
(numbers in parentheses are for 25-wafer FOUPs, if different)
y
57

178
y
46
=71±1
y
44
53
z
49
8
z
48
15
z
47
=210
(330)
±1
y
52 =165.5±0.5
(at seal zones, etc.)
166 (elsewhere)
d
65
=10±0.5
z
65
7
z
46
=60±1
z
59
72
human
handle
(optional)
side
fork-lift
flange
(optional)
y
61 =3.5±0.5
front clamp features
y
40 =122.5±2.5
Figure 5
Side View of FOUP
z
59
72
human
handle
(optional)
side
fork-
lift
flange
(optional)
bilateral datum plane
z
41
0
x
57
180
(numbers in parentheses are for 25-wafer FOUPs, if different)
z
43 =2±1
z
44
=11±0
horizontal datum plane
of FOUP nest or load port
horizontal datum plane inside FOUP
bottom conveyor rail
x
50 =214±1
(at side fork-lift flange)
x
56 =194.75
±0.25
(at bottom rail)
x
53
195
(elsewhere)
x
46
=71±1
x
44
53
z
49
8
z
48
15
z
47
=210
(330)
±1
x
58
75
d
65 =10±0.5
z
65
7
x
65 =187.5
z
46
=60±1
x
63 =199.3±1
front clamp feature
s
Figure 6
Rear View of FOUP
SEMI E47.1-0305 © SEMI 1997, 2005 6
y
52 =165.5±0.5
(at seal zones,
etc.)
166
(elsewhere)
x
62
188.5 (front clamp flange)
y
53
190
robotic
handling
flange
(see
Figure
12)
bilateral
datum plane
front side of the cassette and FOUP where wafers are accessed
y
51
140
y
50
130
x
61
190.5 (front clamp flange)
x
53
195 (elsewhere)
x
50
215 (at side fork-lift flange
and human handle)
human
handle
(optional)
side fork-
lift flange
(optional)
y
67
=25
r
67
240
facial
datum
plane
y
40
=122.5
±2.5
(to side
fork-lift
flange)
y
61 =3.5±0.5
y
60
155
(to front
clamp
feature)
front clamp
feature
Figure 7
Top View of FOUP
y
40
=122.5
±2.5
facial
datum
plane
bottom
conveyor rail
center
retain-
ing
feature
side
fork-lift
flange
(optional)
y
62
28
x
50 =214±1
(at side fork-lift flange)
x
56 =194.75 ±0.25
(at bottom rail)
x
53
195 (elsewhere)
y
52 =165.5±0.5
(at seal zones, etc.)
166 (elsewhere)
r
60 =16
±0.5
r
64
9.5
x
64
35
y
58
75
bilateral
datum
plane
x
y
53

190
y
56
=189.75±0.25
(at rear
conveyor rail)
y
57

178
front side of the cassette and/or FOUP where wafers are accessed
y
65
104
x
60
=8.0±0.5
r
61
16
front
retaining
feature
x
58
75
y
67
=25
r
67
240
y
64
=42.1
±0.5
y
63
=37.3
±0.5
d
65 =10±0.5
x
65 =187.5
x
68
25
x
63 =199.3±1
(4x)
=45
±0.5°
front clamp
feature
57
180
Figure 8
Bottom View of FOUP
SEMI E47.1-0305 © SEMI 1997, 2005 7
z
61
15
z
60
=8±0.5
y64 =42.1 ±0.5
z
62
18
y 62
28
y
65
104
facial
datum plane
horizontal datum plane
of load port
y63 =37.3 ±0.5
=30
±0.5°
z63 =7.5
±0.5
r 61
16 (above z 60)
r 60 =16±0.5 (below z 60)
front side of the FOUP
where wafers are accessed
Figure 9
Side View of Retaining Features on Bottom of FOUP
r1
151
(reference
dimension
from SEMI
E1.9)
y52
166
y49
134
y11
85
(from SEMI
E1.9)
x
52
170
facial
datum
plane
x
51
140
x
3
125
(from SEMI E1.9)
bilateral
datum
plane
r4
170 (from
SEMI E1.9)
Figure 10
Exclusion Volume Inside FOUP