semi合集-English.pdf - 第7063页

SEMI S18-1102 © SEMI 2002 1 SEMI S18-1102 ENVIRONMENTAL, HEALTH, AND SA FETY GUIDELINE FOR SILANE FAMILY GASES HANDLING This guideline was technically approve d by the Global Environm ental, Health, and Safety Committee …

100%1 / 7923
SEMI S17-0701 © SEMI 2001 10
R1-6.4 Shield devices, when chosen, should prevent
simultaneous load/unload operation by a floor-traveling
vehicle or person and a space-traveling vehicle.
R1-6.5 Protective Device Interlocks — These
confirmation signals from shield devices are used to
interrupt the transfer process if a shield is breached.
R1-6.5.1 In the case of UTV systems, protective device
interlocks should communicate to the UTV equipment
either directly or through the manufacturing equipment.
R1-6.5.2 Communication should be via a protected-
path communications protocol that is fail safe.
R1-7 Alarms
R1-7.1 Alarms Alarms consist of audible and visual
notices of hazards that may be approaching.
R1-7.2 Alarms may also be selected as protective
devices.
R1-7.3 Alarms may be field configurable to allow for
selection of type of audible or visual allowed, or to
allow for selection of either audible or visual and
elimination of the other type.
R1-8 Signs and Visual Alerts
R1-8.1 Signs such as “Caution”, “Warning”, or other
sign appropriate to the potential hazard may be selected
as a method of protection.
R1-8.2 Signs should be compatible with SEMI S1, or
should be approved by the local jurisdictional authority.
R1-8.3 Visual Alerts an indicator applied to floors
or vertical surfaces surrounding a potential are of
delivery, which indicates to persons present that a
potential hazard exists in the area.
R1-8.4 Visual alerts may include:
• Striped tape on the floor
• Warning barriers
• Railings
NOTE R1-3: This should not be considered a complete list
there could be many other solutions.
R1-9 Communication Protocol
R1-9.1 Communication Protocol A method of
communicating the status of the equipment to a
centrally monitored location. This may be direct or
through the equipment communication path.
R1-9.2 Protective devices offered should be capable of
communicating with floor-traveling and space-traveling
UTVs through some type of interface.
R1-10 Providing Information
R1-10.1 If protective devices are offered, the UTV
supplier should provide documentation to the end user
customer about protective devices available.
R1-10.2 Information should be provided to the user to
explain the function of any protective devices that may
be offered.
R1-10.3 Information may also be needed by suppliers
of other equipment to insure adequate communication
between equipment types.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the guideline set
forth herein for any particular application. The
determination of the suitability of the guideline is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. This
guideline is subject to change without notice.
The user’s attention is called to the possibility that
compliance with this guideline may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this guideline, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this guideline. Users of this guideline
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI S18-1102 © SEMI 2002
1
SEMI S18-1102
ENVIRONMENTAL, HEALTH, AND SAFETY GUIDELINE FOR SILANE
FAMILY GASES HANDLING
This guideline was technically approved by the Global Environmental, Health, and Safety Committee and is
the direct responsibility of the Japan Environmental, Health, and Safety Committee. Current edition approved
by the Japan Regional Standards Committee on July 19, 2002. Initially available at www.semi.org
September 2002; to be published November 2002.
NOTICE: Paragraphs entitled “NOTE” are not an
official part of this document and are not intended to
modify or supersede the official guideline. The task
force has supplied them to clarify and to enhance usage
of the guideline by equipment designers.
1 Purpose
1.1 This guideline is intended as a minimum set of
safety and health criteria for silane family gases
handling related to equipment and facilities used in
semiconductor or Flat Panel Display (FPD)
manufacturing.
2 Scope
2.1 Silane family gases which are described in this
guideline are: monosilane (SiH
4
), disilane (Si
2
H
6
),
trisilane (Si
3
H
8
), dichlorosilane (SiH
2
Cl
2
) and
trichlorosilane (SiHCl
3
).
2.2 This guideline includes the following sections:
• Purpose
• Scope
• Limitations
• Referenced Standards
• Terminology
• General Principles
• Education and Training
• Leak Detection and Alarm Systems
• Fire Detection, Suppression and Alarm Systems
• Emergency Response
• Materials, Components, and Construction for
Silane Family Gas Handling Equipment and
Facilities.
• Pressurization and Leak Testing
• Storage
• Supply Systems
• Distribution Systems for Gas Supply
• Equipment Using Silane Family Gases
• Exhaust Systems and Plumbing
• Exhaust Treatment Systems
• Related Documents
2.3 This safety guideline does not purport to address all
of the safety issues associated with its use. It is the
responsibility of the users of this guideline to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
3 Limitations
3.1 This document is not intended to impart
requirements on any party.
3.2 This document is not intended to apply to gas
manufacturers or distribution companies.
4 Referenced Standards
NOTE 1: As listed or revised, all documents cited shall be
the latest publications of adopted standards.
4.1 SEMI Standards
SEMI F1 — Specification for Leak Integrity of High
Purity Gas Piping Systems and Components
SEMI F3 — Guide for Welding Stainless Steel Tubing
for Semiconductor Manufacturing Applications
SEMI F4 — Specification for Pneumatically Actuated
Cylinder Valves
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI F6 — Guide for Secondary Containment of
Hazardous Gas Piping Systems
SEMI F13 — Guide for Gas Source Control Equipment
SEMI F14 — Guide for the Design of Gas Source
Equipment Enclosures
SEMI F15 — Test Method for Enclosures Using Sulfur
Hexafluoride Tracer Gas and Gas Chromatography
SEMI S1 — Safety Guideline for Equipment Safety
Labels
SEMI S18-1102 © SEMI 2002
2
SEMI S2 — Environmental, Health, and Safety
Guideline for Semiconductor Manufacturing Equipment
SEMI S4 — Safety Guideline for the
Segregation/Separation of Gas Cylinders Contained in
Cabinets
SEMI S5 — Safety Guideline for Flow Limiting
Devices
SEMI S6 — Safety Guideline for Ventilation
SEMI S10 Safety Guideline for Risk Assessment
SEMI S13 Safety Guideline for Operation and
Maintenance Manuals Used with Semiconductor
Manufacturing Equipment
SEMI S14 Safety Guidelines for Fire Risk
Assessment and Mitigation for Semiconductor
Manufacturing Equipment
4.2 NFPA
1
Standards
NFPA 13 Installation of Sprinkler Systems
NFPA 70 National Electrical Code
NFPA 318 Standard for the Protection of
Cleanrooms
4.3 Compressed Gas Association
2
CGA P-20 Standard for the Classification of Toxic
Gas Mixtures
CGA P-23 Standard for Categorizing Gas Mixtures
Containing Flammable and Nonflammable Components
4.4 Other Documents
High Pressure Gas Safety Law
3
The High Pressure Gas Safety Institute of Japan
(KHK), Application Guide for the High Pressure Gas
Safety Law
4
Santa Clara County Toxic Gas Ordinance No. NS-
517.44
5
SSA Journal
6
, Volume 11 No. 4, Winter 1997
1 National Fire Protection Association, 1 Batterymarch Park, PO Box
9101, Quincy, MA 02269-9101
2 Compressed Gas Association, 1725 Jefferson Davis Highway, Suite
1004, Arlington, Virginia 22202-4102
3 KHK, Sumitomo-Tranomon Bldg., 4-3-9 Toranomon, Minatoku,
Tokyo 105-8447
4 KHK, Sumitomo-Tranomon Bldg., 4-3-9 Toranomon, Minatoku,
Tokyo 105-8447
5 Santa Clara County TGO
6 SSA Journal, SSA Journal Headquarters 1313 Dolly Madison Blvd.
Suite402, McLean, VA22101
4.5 US Code of Federal Regulations
Uniform Fire Code (UFC)
7
Sections 51, 79 and 80
Semiconductor Facility-Specific Sections
29CFR 1910.1200
8
, “Hazard Communication”
(OSHA)
NIOSH Pocket Guide available online at
http://www.cdc.gov/niosh/topreq.html
4.6 EU Directive
The Safety Sheets Directive 93/112 EEC
5 Terminology
5.1 Terminology defined in SEMI S2 should be
referred to except if otherwise specified below.
5.2 Abbreviations and Acronyms
5.2.1 ACGIH
®
— American Conference of
Governmental Industrial Hygienists. (ACGIH is a
registered trademark of the American Conference of
Governmental Industrial Hygienists.)
5.2.2 ESOV Emergency Shut Off Valve.
5.2.3 IDLH Immediately Dangerous to Life and
Health, concentration of airborne contaminants,
normally expressed in parts per million or milligrams
per cubic meter, which represents the maximum level
from which one could escape within thirty minutes
without any escape-impairing symptoms or irreversible
health effects. This level is established by the National
Institute of Occupational Safety and Health (NIOSH).
[SEMI F6]
5.2.4 MSDS Material Safety Data Sheet, a
document that provides information on the properties of
a chemical material in a format specified by a
regulation such as OSHA 29 CFR 1910.1200, “Hazard
Communication”.
5.2.5 PTFE Poly Tetra Fluoro Ethylene.
5.2.6 SSCS silane safety control system. SSCSs are
integrated systems of detection devices that, when
monitored as a group, provide for an overall status of
the safety of the hazardous gas handling system (e.g.,
pressure transducers linked to valve status monitors and
valve cycle counting programs or excess-flow
monitoring interlocked to shutdown the source).
5.2.7 TLVs
®
Threshold Limit Values for chemical
substances in the work environment adopted by
ACGIH
®
(TLV
®
is a registered trademark of the
7 Uniform Fire Code, 5360 South Workman Mill Road, Whitter, CA
90601
8 Occupational Safety and Health Administration U.S. Department
of Labor, http://www.osha.gov