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SEMI C3.32-03 01 © SEMI 1987 , 2001 6 Figure 4 NOTICE: T his specification does not purpor t to address safety issues, i f any, associated with its u s e. It is t he responsibility of the user of this specification to es…

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SEMI C3.32-0301 © SEMI 1987, 20015
Figure 2
Oxygen and Nitrogen Determination
Figure 3
Metals Setup (Liquid Phase Analysis)
SEMI C3.32-0301 © SEMI 1987, 2001 6
Figure 4
NOTICE: This specification does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the user of this specification to establish appropriate safety and health practices and determine the
applicability of regulatory limitations prior to use. SEMI makes no warranties or representations as to the suitability
of the specification set forth herein for any particular application. The determination of the suitability of the
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herein. This specification are subject to change without notice.
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Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
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SEMI C3.56-0600 © SEMI 20001
SEMI C3.56-0600
SPECIFICATION FOR DIBORANE MIXTURES
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the European Gases Committee. Current edition approved by the European Regional Standards Committee on
April 4, 2000. Initially available at www.semi.org May 2000; to be published June 2000.
1 Purpose
1.1 To define the specification and analytical methods
and validate the specifications for diborane mixtures.
2 Scope
2.1 Diborane is not used as a pure gas but as a mixture
with balance gases of N
2
, H
2
, Ar, He, or SiH
4
.
2.2 The quality of the mixture is affected by a number
of factors which include:
• the purity of the gases used for mixture
preparation;
• component filling precision;
• the cylinder preparation process and in-situ
reactions of diborane with the internal surface of
the cylinder.
2.2.1 Furthermore, the elapsed time after filling is
important due to the chemical instability, and hence
decomposition, of the diborane (see Appendix 1).
2.2.2 All component gases shall adhere to the
appropriate SEMI specification, if available.
2.3 The quality of the final mixture can be checked
after manufacturing by analyzing each cylinder for the
concentration of diborane and for key impurities
(tracers), namely H
2
, N
2
, O
2
.
2.4 This specification does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this specification to
establish appropriate safety and health practices and
determine the applicability of regulatory limitations
prior to use.
3 Referenced Standards
3.1 DIN Standard
1
DIN 50457-1
NOTE 1: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
1 Deutches Institut für Normung e.V., BeuthVerlag GmbH,
burggrafenstrasse 4-10, D10787 Berlin, Germany, www.din.de
4 Specifications
4.1 Mixing Tolerances
Concentration of Diborane Preparation Tolerance Level
10–999 ppm
± 20%
0.1–10%
± 5%
4.2 Analytical precision: Determination of Diborane
Content
Concentration of Diborane Analytical Precision
10–99 ppm
± 3%
100–999 ppm
± 2%
0.1–10%
± 2%
N.B. Analytical precision is based on at least 6 replicate
determinations
4.3 Impurities
4.3.1 In the final mixture the concentration of
impurities should fulfill the following condition:
()
•+
•= )(
100
)(
100
)()(
mainc
x
diboranec
x
mix
i
main
i
diborane
i
c
c
i
(mix) — concentration of impurity i in the
mixture (ppm)
c
i
(diborane) — maximum concentration of impurity i
in diborane (ppm)
c
i
(main) — maximum concentration of impurity i
in the balance gas (ppm)
x
(diborane)
— concentration of diborane in the
mixture (%)
x
(main)
— concentration of balance gas in the
mixture (%)
5 Analytical Procedure for t he Determination
of Diborane Concentration
NOTE 2: This procedure is for the determination of the
diborane content using a Fourier Transform Infrared analyzer.
5.1 Detection limit — 2 ppm (mole/mole)