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SEMI M48-1101 © SEMI 2001 7 Notched W afers = R nom – EE Flatted W afers = R nom – (EE + Flat Depth) R/4 3R/4 R/2 Figure 3 Four Concentric Circles

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SEMI M48-1101 © SEMI 2001 6
R/3
Notched Wafers = R
nom
– EE
Flatted Wafers = R
nom
– (EE
+ Flat Depth)
R
nominal
2R/3
°
Figure 2
Three Concentric Circles
SEMI M48-1101 © SEMI 2001 7
Notched Wafers = R
nom
– EE
Flatted Wafers = R
nom
– (EE
+ Flat Depth)
R/4
3R/4
R/2
Figure 3
Four Concentric Circles
SEMI M48-1101 © SEMI 2001 8
Y
site
X
site
Figure 4
Cartesian Measurement Site Patterns