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SEMI P10-0705 © SEMI 1990, 2005 161 RELATED INFORMATION 3 SEMI PHOTOMASK ORDER DATA FILE EXAMPLE EMPLOYING MULTIPLE WRITE AND PROCESS STEPS FOR A SINGLE MASK NOTICE: The information contained in this related information …

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SEMI P10-0705 © SEMI 1990, 2005 160
INSPECTION_AREA -3000,-3000,3000,3000
END_DEFECT_DEFINITION DD.1
END_PATTERN_OPTIONS PTN3
END_PATTERN_GROUP_OPTIONS PG3
LEVEL_ID A
PATTERN_NAME GCARMSB-OX-AA
START_PATTERN_OPTIONS PTN3.AA
DIGITIZED_DATA_DARK F
END_PATTERN_OPTIONS PTN3.AA
END_PATTERN_DEFINITION A
END_PATTERN_GROUP PG3 !END ALIGNMENT MARK
!
END_MASK_GROUP 5X
END_MASK_SET 9999
END_ORDER MS9999
CHECKSUM computed checksum
SEMI P10-0705 © SEMI 1990, 2005 161
RELATED INFORMATION 3
SEMI PHOTOMASK ORDER DATA FILE EXAMPLE EMPLOYING
MULTIPLE WRITE AND PROCESS STEPS FOR A SINGLE MASK
NOTICE: The information contained in this related information is not an official part of SEMI P10, and it is not intended to
modify or supercede the official standard. Rather, this example is offered as an aid to visualizing possible output from software
which might implement the standard.
EXAMPLE: One 4-die phase shift reticle requiring two write and process steps.
START_ORDER MS999
SEMI_REVISION P10-0704 !<mask_order>
CUSTOMER COMPANY NAME
VENDOR ULTIMATE MASK COMPANY
FILE_DATE_TIME 06-JUL-2000, 01:06:00
MASK_SET_ID 9999 !<mask_set>
END_MASK_SET_OPTIONS 9999
!
MASK_GROUP_ID PSM !<mask_group>
START_TITLE 1
TITLE_TEXT DEVICE 9999
TITLE_TYPE DEVICE
TITLE_LOCATION 12500,58500
END_TITLE 1
START_TITLE 2
TITLE_TEXT PHASE SHIFT POLY
TITLE_TYPE MASK
TITLE_LOCATION 12500,56500
END_TITLE 2
MIRROR_MASK T
PRODUCT_TYPE RETICLE
PRODUCT_MAGNIFICATION 5X
PRODUCT_IMAGING_TYPE EAPSM
BLANK_SIZE 6/250
BLANK_TYPE ULTE
BLANK_FLATNESS 1
MASK_COATING MOSI
RESIST_TYPE POSITIVE
START_CD SPECIFICATION
CD_TOLERANCE 0.05
CD_RANGE 0.06
END_CD SPECIFICATION
END_MASK_GROUP_OPTIONS 5X
!
PLACEMENT_TOP_CELL C1
!
SEMI P10-0705 © SEMI 1990, 2005 162
MASK_ID 1 !First write and process step
DELIVERABLE_MASK F
MULTIWRITE (1,1)
START_PHASE_SHIFT 1
PSM_WAVELENGTH
248
TRANSMISSION_TARGET 6
TRANSMISSION_TOLERANCE 0.4
TRANSMISSION_RANGE 0.8
PHASE_ANGLE_TARGET 180
PHASE_ANGLE_TOLERANCE 4
PHASE_ANGLE_RANGE 8
END_PHASE_SHIFT 1
START_REGISTR 1
REGISTR_ERROR 0.10
END_REGISTR 1
MIN_MASK_FEATURE_SIZE 0.8
END_MASK 1
!
MASK_ID 2 !Second write and process step
DELIVERABLE_MASK T
MULTIWRITE (1,2)
START_PHASE_SHIFT 2
PSM_WAVELENGTH 248
TRANSMISSION_TARGET 6
TRANSMISSION_TOLERANCE 0.4
TRANSMISSION_RANGE 0.8
PHASE_ANGLE_TARGET 180
PHASE_ANGLE_TOLERANCE 4
PHASE_ANGLE_RANGE 8
END_PHASE_SHIFT 2
TOP_PELLICLE_TYPE CA627P-7043L
MIN_MASK_FEATURE_SIZE 0.8
START_DEFECT_DEFINITION C
DEFECT_SIZE 0.3
DEFECT_COUNT 0
INSPECTION_AREA -30000,-35000,30000,35000
END_DEFECT C
END_MASK 2
!
CELL_ID C1 !<cell_definition>
END_CELL_OPTIONS C1
CELL_INSTANCE C2 !MAIN ARRAY
END_CELL_INSTANCE C2
LOCATION 0,0
PATTERN_GROUP_INSTANCE PG3 !RMS ALIGNMENT KEYS