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SEMI E54.16-0705 © SEMI 2005 37 Table 60 Sensor-AI-MNS Object Instance Netw ork Services Sensor-AI-MNS Profile ID = 180.21, Instance ID = 01 Service Request Code Service Name SDM Tag Request Parameters Result Parameters …

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SEMI E54.16-0705 © SEMI 2005 36
Table 56 Sensor-AI-LCS Object Instance Network Services
Sensor-AI-LCS
Profile ID = 180.16, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.6 Sensor-AI-SLS — The presentation of the Sensor Analog Input Stray Light Sensor (Sensor-AI-SLS) object
instance attributes are as indicated in Table 57. The presentation of Sensor-AI-SLS object services are indicated in
Table 58.
Table 57 Sensor-AI-SLS Object Instance Network Variables
Sensor-AI-SLS
Profile ID = 180.17, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
128 Reading Valid NVO SlsA1 SNVT_switch
129 Full Scale CP SlsA2 SCPTmaxRange
130 Alarm Settling Time CP SlsA3 SCPTalrmSetT2
131 Warning Settling Time CP SlsA4 SCPTalrmSetT1
Table 58 Sensor-AI-SLS Object Instance Network Services
Sensor-AI-SLS
Profile ID = 180.17, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.7 Sensor-AI-MNS — The presentation of the Sensor Analog Input Medium Noise Sensor (Sensor-AI-MNS)
object instance attributes are as indicated in Table 59. The presentation of Sensor-AI-MNS object services are
indicated in Table 60.
Table 59 Sensor-AI-MNS Object Instance Network Variables
Sensor-AI-MNS
Profile ID = 180.21, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
128 Reading Valid NVO MnsA1 SNVT_switch
129 Full Scale CP MnsA2 SCPTmaxRange
130 Alarm Settling Time CP MnsA3 SCPTalrmSetT2
131 Warning Settling Time CP MnsA4 SCPTalrmSetT1
SEMI E54.16-0705 © SEMI 2005 37
Table 60 Sensor-AI-MNS Object Instance Network Services
Sensor-AI-MNS
Profile ID = 180.21, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.8 Sensor-AI-Counter — The presentation of the Sensor Analog Input Counter (Sensor-AI-Counter) object
instance attributes are as indicated in Table 61. The presentation of Sensor-AI-Counter object services are indicated
in Table 62.
Table 61 Sensor-AI-Counter Object Instance Network Variables
Sensor-AI-Counter
Profile ID = 180.15, Instance ID = 01 through 1024
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
128 Reading Valid NVO CounterA1 SNVT_switch
129 Full Sacle CP CounterA2 SCPTmaxRange
130 Alarm Settling Time CP CounterA3 SCPTalrmSetT2
131 Warning Settling Time CP CounterA4 SCPTalrmSetT1
132 Upper Size CP CounterA5 SCPTminRange
133 Lower Size CP CounterA6 SCPTmaxRange
Table 62 Sensor-AI-Counter Object Instance Network Services
Sensor-AI-Counter
Profile ID = 180.15, Instance ID = 01 through 1024
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.9 Assembly-ISPM#1 — The presentation of the Assembly #1 In-Situ Particle Monitor (Assembly-ISPM#1)
object instance attributes is as indicated in Table 63. The presentation of Assembly-ISPM#1 object services are
indicated in Table 64.
Table 63 Assembly-ISPM#1 Object Instance Network Variables
Assembly-ISPM#1
Profile ID = 180.84, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
SEMI E54.16-0705 © SEMI 2005 38
Table 64 Assembly-ISPM#1 Object Instance Network Services
Assembly-ISPM#1
Profile ID = 180.84, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.10 Assembly-ISPM#2 — The presentation of the Assembly #2 In-Situ Particle Monitor (Assembly-ISPM#2)
object instance attributes is as indicated in Table 65. The presentation of the Assembly-ISPM#2 object services are
indicated in Table 66.
Table 65 Assembly-ISPM#2 Object Instance Network Variables
Assembly-ISPM#2
Profile ID = 180.85, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 66 Assembly-ISPM#2 Object Instance Network Services
Assembly-ISPM#2
Profile ID = 180.85, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined
9.3.11 Assembly-ISPM#3 — The presentation of the Assembly #3 In-Situ Particle Monitor (Assembly-ISPM#3)
object instance attributes is as indicated in Table 67. The presentation of Assembly-ISPM#3 object services are
indicated in Table 68.
Table 67 Assembly-ISPM#3 Object Instance Network Variables
Assembly-ISPM#3
Profile ID = 180.86, Instance ID = 01
Sequence
Number
Name Storage Class SDM Tag Standard NV or CP Data Type
1 Data File A1 LonMark file transfer NVs and messaging
interface.
Table 68 Assembly-ISPM#3 Object Instance Network Services
Assembly-ISPM#3
Profile ID = 180.86, Instance ID = 01
Service
Request Code
Service Name SDM Tag Request Parameters Result Parameters
-- No Additional Services Defined