semi合集-English.pdf - 第1453页

SEMI 30.1-0200 © SEMI 1998, 2000 28 RESUME or PP -UPDATE may be used to resume the process. 6. PP-ASSIGN — Instru cts the equipment that supports queuing to create a n e w ISEM j ob (“CARRIERBLD”) f or the specified port…

SEMI 30.1-0200 © SEMI 1998, 200027

to the equipment. “PROCESS-BLD-GROUP”

includes the name of a specific “TABLE-

ANOMALY-DEF” in the parameter

AnomalyTableName. If not all of the anomalies

given in that “TABLE-ANOMALY-DEF” are

needed for this run, then either “ANOMALYLIST”

or “M21-ANOMALYLIST” is used and includes a

list of the names of the specific anomalies which

are desired. Those names refer to anomalies

defined in the named “TABLE-ANOMALY-DEF”.

• The equipment runs the process program using the

selected values and reviewing the specific

anomalies indicated.

• The equipment adds review information to the

ANOMALYATTRIBUTE list. Then the review

equipment sends this modified “TABLE-

ANOMALY-DEF” to the host.

13 Remote Commands

The purpose of this section is to identify remote

commands, command parameters, and valid commands

versus states pertinent to the SEM.

13.1 Requirements

• The equipment shall support the SEMI E30

required remote commands.

• All the remote commands defined by ISEM are

required unless they have been qualified by the

statement “if the equipment supports this

functionality, it shall use this command.” In this

case, they are only required if the equipment

supports the functionality necessary to support the

command. A good example of this is the MAP-

CARRIER command. If the equipment does not

have the hardware necessary to scan a carrier for

the presence of substrates in slots, then the

command is not required by the ISEM.

• The alphanumeric strings defined by ISEM for

RCMD and CPNAME are required.

Host Command Parameter (CPNAME/CPVAL) — A

parameter name/value associated with a particular host

command when using stream function (S2,F41) and a

(CPNAME/CEPVAL) parameter name/value when

using the enhanced remote command (S2,F49). This

document specifies unique names (CPNAMEs) and

values (CPVALs and CEPVALs) for many command

parameters. Note that if there are no associated

parameters, a zero length list is sent.

The purpose of the remote commands is to allow host

control over the following capabilities:

• Start processing

• Stop processing

• Temporarily suspend processing

• Resume processing

• Abort processing

• Select process programs, material, and/or sites to

measure

• Report location of material found

The following remote commands (RCMDs) shall be

supported as described below:

NOTE 3: The terms “current cycle” and “safe point” used

below are to be defined by the supplier.

13.2 Remote Commands Description

1. ABORT — Terminate the current cycle prior to its

completion. ABORT has the intent of immediately

stopping the process and is used because of

abnormal conditions. ABORT makes no guarantee

about the subsequent condition of material except

as noted in the “ABORTLEVEL” description.

2. CLEANUP — De-selection of the current ISEM

job (“CARRIERBLD”) and process program

(“PROCESS-BLD-GROUP”), including the

removal of all material to output locations and any

equipment-specific activities needed to transition

into the IDLE state. Completion of this command

should generate a collection event report. If the

equipment supports this functionality, it will use

this command.

3. MAP-CARRIER — Requests the equipment to

provide a list of carrier slots that contain material.

MAP-CARRIER has the intent of providing the

host with enough information about the location

and/or ID of material so it may select material for

processing accordingly. Completion of this

command shall generate a collection event report.

If the equipment supports this functionality, it must

use this command.

4. NEXT-MATERIAL — Processing of the current

substrate is halted at the first safe point and

unloaded to the target carrier location. NEXT-

MATERIAL has the intent of allowing the host to

skip measurement of the current substrate. This is a

trigger for processing state transition from

WORKING to UNLOAD. If the equipment

supports this functionality, it will use this

command.

5. PAUSE — Suspend processing temporarily at the

next safe point. PAUSE has the intent of resuming

the process at the same point where it was paused.

SEMI 30.1-0200 © SEMI 1998, 2000 28

RESUME or PP-UPDATE may be used to resume

the process.

6. PP-ASSIGN — Instructs the equipment that

supports queuing to create a new ISEM job

(“CARRIERBLD”) for the specified port

(“LOCATIONID”) when more than one port is

available for processing. If only one port is

available, “LOCATIONID” is not required.

Priority may optionally be specified with this

command. The “PRIORITY” specifies the priority

of the newly created job in the ISEM job queue (a

value of 0 (zero) assigns the highest priority to the

job). Without specifying a priority, the job is

queued with the default priority. Jobs with equal

priority are queued in the order the PP-ASSIGN

commands are received. This command is valid in

all PROCESSING states.

7. PP-SELECT — Instructs the equipment to make

the requested ISEM job(s) (“CARRIERBLD”)

available in the execution area. This is a trigger for

the processing state transition from IDLE to

SETTING UP. The first process program

(“PROCESS-BLD-GROUP”) specified in the

“CARRIERBLD” is also validated during

SETTING UP.

8. PP-UNASSIGN — Removes the ISEM job

assignment (“CARRIERBLD”) for a carrier or

port. The carrier or port is removed from the

process queue.

9. PP-UPDATE — Provides the ability to alter the

current process program being executed during the

PAUSED state. The process program variables

specified in the PP-UPDATE command will

replace previous definitions in the “PROCESS-

BLD-GROUP”. This command will trigger

transition to CHECKING for process program

parameter verification. A RESUME command is

implied with the validation of “all” replaced values

to resume the process. If the PP-UPDATE fails, the

process program variables present prior to the PP-

UPDATE are retained. If no parameters values are

specified, the defaults are used.

10. RESUME — Resume processing from the point

where the process was paused. This is the trigger

for processing state transition from PROCESS

PAUSE to the previous PROCESS state.

11. START — Instructs the equipment to initiate

processing. This is the trigger for the processing

state transition from READY to LOAD. An

“AUTOSTART” command parameter may be

included to allow for continuous processing.

12. STOP — Complete the current cycle, stop in a safe

condition, and return to the IDLE processing state.

Stop has the intent of stopping the process entirely.

This command can be used to both: stop the current

ISEM job or to stop all queued jobs. The

equipment is not required to support the

continuation of processing.

13.2.1 Remote Commands and Associated Host

Command Parameters — This table describes the

allowable command parameters (CPNAME) for each

remote command (RCMD). Equipment shall support all

parameters. The column marked Req/Opt specifies

which parameters are required to be sent by the host

and which parameters may be optionally sent by the

host.

Table 8 Allowable Command Parameters

Parameters

Remote Command

CPName Req/Opt Comments

ABORT “ABORTLEVEL” R

CLEANUP “CARRIERID”

“LOCATIONID”

“SLOTID”

PORT and SLOT may be used to define a

different carrier/slot destination for the

substrates.

MAP-CARRIER “CARRIERID”

“LOCATIONID”

* One is required.

NEXT-MATERIAL “CARRIERID”

“LOCATIONID”

“SLOTID”

PORT and SLOT may be used to define a

different carrier/slot destination for the

substrates.

PAUSE None NA None

PP-ASSIGN “PRIORITY”

“CARRIERBLD”*

* More than one “CARRIERBLD” may be

specified.

PP-SELECT “CARRIERBLD”* R * More than one “CARRIERBLD” may be

specified.

PP-UNASSIGN “CARRIERBLD” R None

PP-UPDATE “PPBUILDID”

“ALIGNLIST”

“ANOMALYLIST”

“AREALIST”

“ELEMENTLIST”

“SLOTLIST”

“SUBSTRATELIST”

“TABLE-ALIGN-DEF”

“TABLE-AREA-DEF”

“TABLE-ANOMALY-DEF”

“TABLE-M21-ANOMALY-DEF”

* At least one is required.

RESUME None N/A None

START “CARRIERBLD” 0 None

STOP “CARRIERBLD” 0 None

13.2.2 Host Command Parameter Names and Values

Table 9 Host Command Parameters CPNAMES

Parameter Value

CPName

Description Range Format

“ABORTLEVEL” ISEM-defined abort levels:

HALT — Process halts, and the ABORTING process state is

entered.

CLEANUP — Process halts, material cleanup is performed, and

the ABORTING process state is entered.

“1= HALT”

“2 = CLEANUP”

“ALIGNLIST” L,n

1. AlignName

For the SEMI M20 or M20P coordinate system.

List of

A[1..16]

data items

“ALIGNNAME” Alignment name

See the “TABLE-ALIGN-DEF” definition for further explanation.

A[1..16]

“ANOMALYLIST” L,n

1. AnomalyID

For the SEMI M20 or M20P coordinate system.

List of

A[1..16]

data items

“ANOMALYID” Anomaly identifier

See the “TABLE-ANOMALY-DEF” or the “TABLE-M21-

ANOMALY-DEF” definition for further explanation.

A[1..16]

“AREALIST” L,n

1. AreaName

List of

A[1..16]

data items

“AREANAME” Unique identifier for an area to be inspected.

See the “TABLE-AREA-DEF” definition for further explanation.

A[1..16]

“AUTOSTART” Specifies whether a START command is required from an external

source (operator or host) to exit the READY state.

0 = NoAutoStart (A START command required.)

1 = AutoStart (No external START command required to

begin execution.)

0–1 U2

“CARRIERID” Identifier of the carrier that the inspection/review data is

associated with.

A[1..16]