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SEMI E102-0600 © SEMI 2000 29 RELATED INFORM A TI ON 1 SCENA RIOS FOR MATERIAL TRA N SPORT AND STORAGE NOT E: This re lated informa tion is not an official pa rt of SEMI E10 # and w as derive d from the w ork of the I300…

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SEMI E102-0600 © SEMI 2000 28
}; // MaterialTransportController
interface TransportJob : AbstractIF::Job {
exception TimeUndeterminableSignal { };
boolean canCompleteBy (
in Global::TimeStamp whenNeeded)
raises (Global::FrameworkErrorSignal,
TimeUndeterminableSignal);
Global::Duration transportTime ( )
raises (Global::FrameworkErrorSignal,
TimeUndeterminableSignal);
}; // TransportJob
interface TransportMachine : MachineAIG::Machine {
}; // TransportMachine
interface StorageMachine : MachineAIG::Machine {
const string MaterialContainerArrivedAtManualInputPortSubject =
“/MaterialTransport/StorageMachine/
MaterialContainerArrivedAtManualInputPort”;
struct MaterialContainerArrivedAtManualInputPortFilters {
Global::Property Port;
Global::Property MaterialContainer;
};
struct MaterialContainerArrivedAtManualInputPortEvent {
string eventSubject;
Global::TimeStamp eventTimeStamp;
MaterialContainerArrivedAtManualInputPortFilters eventFilterData;
Global::Properties eventNews;
StorageMachine aMachine
};
}; // StorageMachine
}; // module MaterialTransport
#endif // _CIMFW_MATERIAL_TRANSPORT_
}; // module CIMFW
NOTICE: SEMI makes no warranties or representations as to the suitability of the specification set forth herein for
any particular application. The determination of the suitability of the specification is solely the responsibility of the
user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other rele-
vant literature respecting any materials mentioned herein. These specifications are subject to change without notice.
The user’s attention is called to the possibility that compliance with this specification may require use of
copyrighted material or of an invention covered by patent rights. By publication of this specification, SEMI takes
no position respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned
in this specification. Users of this specification are expressly advised that determination of any such patent rights or
copyrights, and the risk of infringement of such rights, are entirely their own responsibility.
SEMI E102-0600 © SEMI 200029
RELATED INFORMATION 1
SCENARIOS FOR MATERIAL TRANSPORT AND STORAGE
NOTE: This related information is not an official part of SEMI E10# and was derived from the work of the I300I/J300E AMHS
workgroup accomplished during development of the proposed standard. This related information is included with the Material
Transport and Storage Component specification to aid the readers in understanding the intent and use of the standard. This related
information was approved for publication by full letter ballot procedures on January 14, 2000.
R1-1 Introduction
R1-1.1 Scenario Assumptions — These scenarios show possible implementations of the SEMI standard. The
information shown here is intended to be a guide rather than describe rigid implementation rules. Some of the
message sequences and implied functionality included in these scenarios will vary across different implementations.
R1-1.2 Scenario Configuration — There are thirteen scenarios included in this section. The first and last scenarios
show all interactions at an individual interface level. For simplicity, the remaining scenarios show interactions
abstracted up to the Component level. Background information related to the scenarios is shown in Figure R1-1.
Table R1-1 outlines the thirteen scenario case conditions.
Stk1
Stk2
Stk3
Stk4
Stk5
Stk6
Stk7
Stk8
Eq1 Eq2
Eq3 Eq4
Agt1
Agt2
Ohs1 Ohs2
Bay1
Bay2
Stk = Stocker
Eq
= Production Equipment
Agt = Automated Guided Transport
Sgr = Stocker Group
Oht = Overhead Hoist Transport
Stk9
Stk10
Sgr1
Eq5 Eq6
Bay3
Oht1
Figure R1-1
Scenario System Layout Configuration
SEMI E102-0600 © SEMI 2000 30
Table R-1 Material Transport and Storage Scenario Definitions
Case Source Destination Batch
Size
Route/Condition Comments
1 Stk4 Stk9
Manual
Output
Port
1
Carrier
Stk4>Ohs2>Stk9 Interactions at an
individual interface level.
2Eq1 Stk7 1
Carrier
Eq1>Agt1>Stk2>Ohs1>Stk(Relay)>Ohs2>Stk7
Stk(Relay) priority = Stk4, Stk5, Stk6
Base Scenario: Delivery
from Production
Equipment to Stocker.
3Stk7 Eq3 2
Carriers
Stk7>Ohs2>Stk8>Agt2>Eq3
Eq3 batch size = 2 Carrier
Ohs2 batch size = 1 Carrier
Agt2 batch size = 2 Carrier
Base Scenario: Batch
delivery from Stocker to
Production Equipment.
4Eq1 Stk7 1
Carrier
Eq1>Agt1>Stk2>Ohs1>Stk (Relay)>Ohs2>Stk8
(Temp)>Stk7
Stk(Relay) priority = Stk4, Stk5, Stk6
Stk4 Status = Down
Stk7 logical partition = Full
Includes AMHS equipment
(Storage Device)
monitoring and stocker
logical partition overflow
control.
5 Stk6 Stk4 1
Carrier
Operator>Stk6 Manual Carrier Input
handling.
6 Stk4 Stk9 1
Carrier
Stk4>Ohs2>Stk9 - Ohs2 Status = Down Includes AMHS equipment
(transport device)
monitoring.
7Stk7 Eq6 4
Carriers
Stk7>Ohs2>Sgr1>Oht1>Eq6
Eq6 has internal buffer, batch size = 4 carriers
Ohs2 batch size = 1 carrier, Oht1 batch size = 1
carrier
Base scenario: Batch
delivery to internal buffer
equipment.
8Stk5 Eq5 1
Carrier
Stk5>Ohs2>Sgr1>Oht1>Eq5
Macro command is aborted with carrier on Ohs2.
Includes abort job
handling.
9Stk5 Eq5 1
Carrier
Stk5>Ohs2>Sgr1>Oht1>Eq5
Macro command is modified to final destination
Sgr1.
Includes modify job
handling.
10 - - - Startup - Material Transport and Storage
Component is registered and starts up.
Base scenario: MTSC
startup.
11 Stk6 Stk4 1
Carrier
Stk6>Ohs2>Stk4 - Operator removes carrier
while on Ohs2.
Includes handling of
manual interruption of
delivery.
12 Eq3 Eq5 1
Carrier
Eq3>Agt2>Stk8>Ohs2>Sgr1>Oht1>Eq5 Base scenario: tool-to-tool
delivery.
13 Stk4 Stk9 1
Carrier
Stk4>Ohs2>Stk9 Interactions at an
individual interface level
(including capacity
reservation).