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SEMI E51-0200 © SEMI 1995 , 2000 9 Exhaust Te mp. Supply Filtrati on (absolute ) Specificati o n POC Material POC Fitting Notes Heat/General Solvent Vacuum Pump Aci d Electrica l Services Applic able Code Supply Voltage,…

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SEMI E51-0200 © SEMI 1995, 2000 8
Table 2 Site-Specific Facilities Services and Termination Matrix
Water Service Supply
Temp.
Supply Pressure
(Return Pressure
where noted)
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Non-Potable Water
Ultra Pure Water
Deionized Water
Hot Ultra Pure Water
Fire Protection
Process Cooling Water
Gas Service Supply
Temp.
Supply
Pressure
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Nitrogen, Ultra Pure
Nitrogen, Process
Nitrogen, Non-Process
Compressed Air
Oxygen
Hydrogen, Bulk
Argon
Helium
Natural Gas
Process Vacuum
Specialty Gases
Drains Waste Temp. Pressure Filtration
(absolute)
Specification POC Material POC Fitting Notes
Acid Waste
H
2
SO
4
Solvent Waste
Industrial
DI Reclaim
Fluoride Waste
HF Reclaim
Slurry
Bulk Chemical
Distribution
Supply Temp. Supply Pressure
(Return Pressure
where noted)
Filtration
(absolute)
Specification POC Material POC Fitting Notes
Acids, Bases, Oxidizers
Solvents
SEMI E51-0200 © SEMI 1995, 20009
Exhaust Temp. Supply Filtration
(absolute)
Specification POC Material POC Fitting Notes
Heat/General
Solvent
Vacuum Pump
Acid
Electrical Services
Applicable Code
Supply Voltage, Nominal
Supply Voltage Range
EMI Noise
ESD Ambient
Ground Currents
Computer Interfaces
Electrical Interface
UPS
Site-Specific Notes:
Freight Elevator:
Height/Width/Depth
Load Rating
Bldg./Fab Restrictions:
Cleanroom Parameters
Noise Level
Ceiling Heights
Max. Clearances in Support Areas
Other:
8 Related Documents
8.1 SEMI Standards
SEMI E4 — SEMI Equipment Communications
Standard 1 Message Transfer (SECS-I)
SEMI E5 — SEMI Equipment Communications
Standard 2 Message Content (SECS-II)
SEMI E37 — High-Speed SECS Message Services
(HSMS) Generic Services
SEMI E37.1 — High-Speed SECS Message Services
Single-Session Mode (HSMS-SS)
SEMI E37.2 — High-Speed SECS Message Services
General Session (HSMS-GS)
SEMI E76 — Guide for 300 mm Process Equipment
Points of Connection to Facility Services
SEMI S2 — Environmental, Health, and Safety
Guideline for Semiconductor Manufacturing Equipment
SEMI S6 — Safety Guideline for Ventilation
SEMI E51-0200 © SEMI 1995, 2000 10
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